Automatic alignment of double paths in electron pumped excimer laser amplifier

WANG Da-hui; ZHAO Xue-qing; ZHANG Yong-sheng; SUN Yu-wei; ZHAO Jun

doi:10.3788/OPE.20122007.1434

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Automatic alignment of double paths in electron pumped excimer laser amplifier

更新时间：2020-08-12

- Automatic alignment of double paths in electron pumped excimer laser amplifier
- Optics and Precision Engineering Vol. 20, Issue 7, Pages: 1434-1439(2012)
- 作者机构：
  
  西北核技术研究所激光与物质相互作用国家重点实验室,陕西西安,710024
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122007.1434
  CLC： TN248.2
- Received：16 January 2012，
  
  Revised：05 March 2012，
  
  Published Online：10 July 2012，
  
  Published：10 July 2012
- 稿件说明：
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王大辉, 赵学庆, 张永生, 孙昱薇, 赵军. 电子束泵浦准分子激光放大器的双程光路自动准直[J]. 光学精密工程, 2012,20(7): 1434-1439

WANG Da-hui, ZHAO Xue-qing, ZHANG Yong-sheng, SUN Yu-wei, ZHAO Jun. Automatic alignment of double paths in electron pumped excimer laser amplifier[J]. Editorial Office of Optics and Precision Engineering, 2012,20(7): 1434-1439
王大辉, 赵学庆, 张永生, 孙昱薇, 赵军. 电子束泵浦准分子激光放大器的双程光路自动准直[J]. 光学精密工程, 2012,20(7): 1434-1439 DOI： 10.3788/OPE.20122007.1434.

WANG Da-hui, ZHAO Xue-qing, ZHANG Yong-sheng, SUN Yu-wei, ZHAO Jun. Automatic alignment of double paths in electron pumped excimer laser amplifier[J]. Editorial Office of Optics and Precision Engineering, 2012,20(7): 1434-1439 DOI： 10.3788/OPE.20122007.1434.

摘要

提出了一种电子束泵浦准分子激光放大器的双程光路准直方法

以保证光束在放大器中按照预定方向传输

并使多路光束稳定精确地照射靶面。首先

鉴于准分子放大器中无天然准直基准提出了利用双叉丝像传递光路进行准直的方法

即把输入光束叉丝基准作为"近场点"

把输出光束叉丝基准作为"远场点"

并设计了放大器准直光路

编写了相应的软件。然后

在现有实验室条件下开展了电子束泵浦准分子激光放大器双程光路的自动准直实验。最后

分析了影响该方法的相关因素及准直精度。实验及分析表明

设计的准直系统在较短时间内实现了预定传输光路的自动准直

系统自身精度为0.63 μrad

光束最大复位误差为13.75 μm

满足了电子束泵浦准分子激光放大器双程光路自动准直的要求。

Abstract

A kind of beam automatic alignment method used for double path amplification in an electron pumped excimer laser system was presented to ensure the beams from the amplifiers to transfer in a designed direction and irradiate on a target stably and accurately. As excimer laser amplifiers had no natural alignment references

an image-relaying structure with two cross-hairs was proposed

in which the cross-hair on the input beam was regarded as the near-field reference while the cross-hair of output beam was regarded as the far-field reference. Then

an alignment beam path was designed and the software was compiled. Furthermore

the automatic alignment experiment of double paths in electron pumped excimer laser amplifier was performed and the correlative influence factors and the alignment precision were analysed. Experimental results indicate that the automatic alignment system can achieve the beam transmission given in short time

the accuracy of alignment system is 0.63 μrad and the beam maximum restoration error is 13.75 μm. Obtained results satisfy the demand of beam alignment.

关键词

Keywords

references

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