Manufacture of SiC off-axis aspheric mirrors by double-swing method

LI Jun-feng; SONG Shu-mei

doi:10.3788/OPE.20122008.1669

您当前的位置：

首页 >

文章列表页 >

Manufacture of SiC off-axis aspheric mirrors by double-swing method

更新时间：2020-08-12

- Manufacture of SiC off-axis aspheric mirrors by double-swing method
- Optics and Precision Engineering Vol. 20, Issue 8, Pages: 1669-1675(2012)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122008.1669
  CLC： TH703;TN305.2
- Received：21 March 2012，
  
  Revised：17 April 2012，
  
  Published：10 August 2012
- 稿件说明：
移动端阅览
李俊峰, 宋淑梅. 应用双摆动技术加工离轴碳化硅反射镜[J]. 光学精密工程, 2012,(8): 1669-1675

LI Jun-feng, SONG Shu-mei. Manufacture of SiC off-axis aspheric mirrors by double-swing method[J]. Editorial Office of Optics and Precision Engineering, 2012,(8): 1669-1675
李俊峰, 宋淑梅. 应用双摆动技术加工离轴碳化硅反射镜[J]. 光学精密工程, 2012,(8): 1669-1675 DOI： 10.3788/OPE.20122008.1669.

LI Jun-feng, SONG Shu-mei. Manufacture of SiC off-axis aspheric mirrors by double-swing method[J]. Editorial Office of Optics and Precision Engineering, 2012,(8): 1669-1675 DOI： 10.3788/OPE.20122008.1669.

摘要

研究了用双摆动技术抛光离轴非球面的工艺。介绍了用双摆动抛光加工离轴非球面的原理

分析了双摆动抛光过程中抛光盘与工件的相对运动特性及各个工艺参数对相对运动路径的影响。建立了双摆动抛光运动的数学模型

进行了计算机仿真

并对不同参数下的仿真结果进行了比较。给出了抛光模形状模型

实验验证了不同形状抛光模的材料去除特性。应用双摆动技术加工了一个224 mm×108 mm离轴碳化硅反射镜

结果显示:应用该技术加工离轴非球面镜可以有效抑制光学表面中频误差

具有较高的材料去除效率

面形精度可以稳定达到λ/30(rms

@633 nm)。因此

双摆动抛光技术的研究有助于推动离轴非球面制造技术的发展。

Abstract

The polishing principle of Double-Swing Method (DSM) was introduced

the relative movement characteristic between polishing lap and workpiece was analyzed

and the influence of polishing parameters on the relative movement was discussed. A mathematical model of the DSM in a movement state was established and its movement was simulated in a programming language. Then

simulation effects under different parameters was compared. The shape model of the polishing lap was presented

and the material removal character of the polishing lap with diffident shapes was verified.Finally

a rectangle off-axis aspheric mirror in a size of 224 mm×108 mm was polished by the DSM. The experiment result shows that to manufacture the off-axis aspheric mirror by the DSM can control the middle-frequency error and can obtain high working efficiency

and the surface precision is about λ/30 (rms

@633nm). Therefore

the DSM benefits the development of the manufacture technique for off-axis aspheric mirrors.

关键词

Keywords

references

郑立功,张学军,张峰. 矩形离轴非球面的数控加工[J]. 光学精密工程,2004,12(1):113-117. ZHENG L G, ZHANG X J, ZHANG F. NC surfacing of two off-axis aspheric mirrors[J]. Opt. Precision Eng.,2004,12(1):113-117. (in Chinese)

李锐钢,郑立功,张峰,等. 大口径高陡度离轴非球面精磨阶段的数控加工[J]. 光学精密工程,2007,15(5):633-639. LI R G, ZHENG L G, ZHANG F, et al.. Computer controlled manufacturing during fine grinding stage of highly steep off-axis asphere with large aperture [J]. Opt. Precision Eng., 2007,15(5):633-639.(in Chinese)

欧阳渺安. 超精密非球面镜面模具直轴磨削的研究[J]. 光学精密工程,2006,14(4):545-552. OUYANG M A.Study of ultra-precision vertical grinding for aspheric lens mould[J].Opt.Precision Eng.,2006,14(4):545-552.(in Chinese)

王贵林.SiC光学材料超精密研抛关键技术研究 . 北京:中国科学院,2002. WANG G L. A study on key techniques in ultra-precision lapping and polishing for optical SiC materials .Beijing:Graduate University of the Chinese Academy of Sciences, 2002.(in Chinese)

程灏波,张学军,郑立功,等. 离轴非球面加工、检测轨迹优化研究[J]. 光学技术,2003,29(2):247-249. CHENG H B, ZHANG X J, ZHENG L G, et al.. Optimizing the moving-orbit for off-axis aspheric manufacturing and test [J]. Optical Technique, 2003,29(2):247-249. (in Chinese)

WANG P, LI J F, XUAN B, et al.. Double-swing method used for polishing off-axis aspherical mirrors[J]. SPIE, 2009,7282:728203.

赵文兴,张舸,赵汝成,等. 轻型碳化硅质反射镜坯体的制造工艺[J]. 光学精密工程,2011,19(11):2609-2617. ZHAO W X, ZHANG G, ZHAO R CH, et al..Fabrication of silicon carbide lightweight mirror blank[J]. Opt. Precision Eng.,2011,19(11):2609-2617.(in Chinese)

邓伟杰,郑立功,史亚莉,等. 离轴非球面抛光路径的自适应规划[J]. 光学精密工程,2009,17(1):65-71. DENG W J, ZHENG L G, SHI Y L,et al.. Adaptive programming algorithm for generating polishing tool-path in computer controlled optical surfacing[J]. Opt. Precision Eng., 2009,17(1):65-71.(in Chinese)

KIM D W, KIM S W.Static tool influence function for fabrication simulation of hexagonal mirror segments for extremely large telescopes[J]. Optics Express, 2005, 13(3):910-917.

SONG C,WALKER D, YU G Y. Misfit of rigid tools and interferometer subapertures on off-axis aspheric mirror segments[J]. Optics Engineering, 2011,50(7):073401.

Views

627

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Large aperture optical element’s wavefront gradient controlled by CNC polishing

Large aperture optical element wavefront gradient controlled by computer numerical controlled polishing

Ultra-precision optical manufacture and laser performance of Yb:LuScO₃ crystal

Partition gelation casting in RB-SiC mirror billet

Motion-precision control in bonnet-polishing

Related Author

HUANG Jinyong ZHAO Heng HU Qing GAO Xuhua

Xu-hua GAO

Qing HU

Heng ZHAO

Jin-yong HUANG

Xue-ke XU

Long ZHANG

Feng-feng SHEN

Related Institution

Chengdu Fine Optical Engineering Research Center

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

Shanghai Hengyi Optics and Fine Mechanics Co., Ltd

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰