Application of all-phase spectral analysis to self-mixing interferometry for displacement measurement

YANG Ying; LI Xing-fei; KOU Ke; WANG Cuo

doi:10.3788/OPE.20122008.1740

您当前的位置：

首页 >

文章列表页 >

Application of all-phase spectral analysis to self-mixing interferometry for displacement measurement

更新时间：2020-08-12

- Application of all-phase spectral analysis to self-mixing interferometry for displacement measurement
- Optics and Precision Engineering Vol. 20, Issue 8, Pages: 1740-1746(2012)
- 作者机构：
  
  天津大学精密测试技术及仪器国家重点实验室,天津 300072
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122008.1740
  CLC： TH822;TH744.3
- Received：13 April 2012，
  
  Revised：14 May 2012，
  
  Published：10 August 2012
- 稿件说明：
移动端阅览
杨颖, 李醒飞, 寇科, 王错. 全相位谱分析在自混合干涉位移测量中的应用[J]. 光学精密工程, 2012,(8): 1740-1746

YANG Ying, LI Xing-fei, KOU Ke, WANG Cuo. Application of all-phase spectral analysis to self-mixing interferometry for displacement measurement[J]. Editorial Office of Optics and Precision Engineering, 2012,(8): 1740-1746
杨颖, 李醒飞, 寇科, 王错. 全相位谱分析在自混合干涉位移测量中的应用[J]. 光学精密工程, 2012,(8): 1740-1746 DOI： 10.3788/OPE.20122008.1740.

YANG Ying, LI Xing-fei, KOU Ke, WANG Cuo. Application of all-phase spectral analysis to self-mixing interferometry for displacement measurement[J]. Editorial Office of Optics and Precision Engineering, 2012,(8): 1740-1746 DOI： 10.3788/OPE.20122008.1740.

摘要

提出基于全相位谱分析的自混合干涉信号处理方法

用于减小激光自混合干涉位移测量的误差。首先

基于三镜法布里-珀罗腔模型介绍了自混合干涉系统的数学模型

分析了自混合干涉信号的产生机理和特性。然后

研究了弱反馈条件下自混合干涉位移测量方法

采用全相位谱分析算法进行相位测量

重构外部反射体位移曲线;讨论了信号处理算法原理并进行了算法仿真。最后

进行自混合干涉位移测量实验

并给出压电陶瓷位移测量实验结果。结果表明

全相位谱分析算法可将自混合干涉位移测量误差减小到4.4 nm;应用全相位谱分析算法分析自混合干涉信号

可在不增加外部光学元件的前提下将位移测量误差减小到纳米量级。

Abstract

A signal processing technique based on all-phase spectral analysis was proposed to reduce the displacement measurement error of a self-mixing interferometer. Self-mixing interference principle and signal processing technique were analyzed. First

the mathematical model and signal characteristics for the self-mixing interferometer were presented based on the model of laser oscillation cavity with three mirrors. Then

the displacement principle based on self-mixing interference was introduced. A all-phase spectral analysis was used to extract the phase of self-mixing interference signal to reconstruct the displacement of a reflective target and the signal processing algorithm was investigated with arithmetic simulation. Finally

an experiment system was established and the calibration result of bimorph PZT was presented. Experimental results indicate that the displacement error can be decreased to 4.4 nm by using all-phase spectral analysis. It concludes that the all-phase spectral analysis can reduce the displacement error of the self-mixing interferometer to nanometer level without increasing the number of optical elements.

关键词

Keywords

references

王鸣,聂守平,李明,等. 自混合干涉微位移传感器[J]. 仪器仪表学报,2004,25(4):428-431. WANG M, NIE SH P, LI M, et al.. Self-mixing Interferometry for Micro Displacement Measurement[J]. Chinese Journal of Scientific Instrument,2004,25(4):428-431.(in Chinese)

KING P, STEWARD G J. Metrology with an optical maser[J]. New Sci, 1963,17:180.

毛威,张书练,张连清,等. 激光回馈效应及其传感应用研究的进展[J]. 光学技术,2007,33(1):16-22. MAO W, ZHANG SH L, ZHANG L Q, et al.. Optical feedback effect and the optical feedback interferometry for sensing application[J]. Optical Technique, 2007,33(1):16-22.(in Chinese)

GIULIANI G, NORGIA N, DONATI S, et al.. Laser diode self-mixing technique for sensing applications[J]. Journal of Optics A: Pure and Applied Optics, 2002,4(6):283-294.

ZHANG L, ZHANG S L, ZHOU L F, et al.. Nanometer-resolution displacement measurement system based on weak feedback effect of dual-frequency laser[J]. Frontier Research in Nanoscal Science and Technology, 2009,2(1):19-26.

GOUAUX F, SERVAGENT N, BOSCH T. Laser self-mixing interferometry for mechatronics applications[J]. Applied Optics, 37(28):6684-6689.

OTTONELLI S, DABBICCO M, LUCIA F, et al.. Laser-self-mixing interferometry for mechatronics applications[J]. Sensors, 2009,9(5):3527-3548.

YU Y G, XI J T, CHICHARO. Measuring the feedback parameter of a semiconductor laser with external optical feedback[J]. Optics Express, 2011,19(10):9582-9593.

WANG M, LAI G M. Self-mixing microscopic interferometer for the measurement of microprofile[J]. Optics Communicationns, 2004,238(4-6):237-244.

WANG H, SHEN J, YU B,et al.. Laser diode feedback interferometry in flowing Brownian motion system: a novel theory[J]. Applied Physics B-Lasers and Optics, 2010,101(1-2):173-183.

DONATI S, GIULIANI G, MERLO S. Laser diode feedback interferometer for measurement of displacements without ambiguity[J]. IEEE Journal of Quantum Electronics,1995,31(1):113-119.

TAKAHASHI N, KAKUMA S, OHBA R. Active heterodyne interferometric displacement measurement using optical feedback effects of laser diode[J]. Society of Photo-Optical Instrumentation Engineers, 1996,35(3):802-806.

SERVAGENT N, BOSCH T, LESCURE M. Design of a phase-shifting optical feedback interferometer using an electro-optic modulator[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2000,6(5):798-802.

WANG M. Fourier transform method for self-mixing interference signal analysis[J]. Optics & Laser Technology, 2001, 33(6):409-416.

王兆华,黄翔东. 基于全相位谱分析的相位测量原理及其应用[J]. 数据采集与处理,2009,24(6):777-781. WANG ZH H, HUANG X D. Principle of phase measurement and its application based on all-phase spectral analysis[J]. Journal of Data A cquisit ion & P rocessing, 2009,24(6):777-781.(in Chinese)

黄翔东,王兆华. 全相位时移相位差频谱校正法[J]. 天津大学学报,2008,41(7):815-820. HUANG X D, WANG ZH H. All-phase time-shift phase difference correcting spectrum method[J]. Journal of Tianjin University, 2008, 41(7):815-820.(in Chinese)

Views

283

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Error compensation for laser heterodyne interferometric displacement measurement based on Kalman filter

Ultra-precision spatial-separated heterodyne Littrow grid encoder displacement measurement system

Measurement of all-fiber multi-feedback liquid refractive index

Review of ultra-precision optical interferential grating encoder displacement measurement technology for immersion lithography scanner

Research on optical fiber multi-wavelength laser for measuring displacement precisely

Related Author

CHEN Benyong

CHEN Yu

WANG ShengFan

ZHOU Zhipeng

LOU Yingtian

Leijie WANG

Ziwen GUO

Weinan YE

Related Institution

School of Information Science and Engineering， Zhejiang Sci-Tech University

State Key Laboratory of Tribology & Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control， Department of Mechanical Engineering， Tsinghua University

Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument， Beijing Information Science & Technology University

State Key Laboratory of Tribology & Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Department of Mechanical Engineering, Tsinghua University

Laboratory of Optoelectronic Information Science and Engineering, School of Science, Beijing Jiaotong University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰