Self-calibration for 2-D ultra-precision stage

CUI Ji-wen; LIU Xue-ming; TAN Jiu-bin

doi:10.3788/OPE.20122009.1960

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Self-calibration for 2-D ultra-precision stage

Article | 更新时间：2020-08-12

- Self-calibration for 2-D ultra-precision stage
- Optics and Precision Engineering Vol. 20, Issue 9, Pages: 1960-1966(2012)
- 作者机构：
  
  哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122009.1960
  CLC： TH703;TP273
- Received：24 April 2012，
  
  Revised：11 June 2012，
  
  Published：10 September 2012
- 稿件说明：
移动端阅览
崔继文, 刘雪明, 谭久彬. 超精密级二维工作台的自标定[J]. 光学精密工程, 2012,20(9): 1960-1966

CUI Ji-wen, LIU Xue-ming, TAN Jiu-bin. Self-calibration for 2-D ultra-precision stage[J]. Editorial Office of Optics and Precision Engineering, 2012,20(9): 1960-1966
崔继文, 刘雪明, 谭久彬. 超精密级二维工作台的自标定[J]. 光学精密工程, 2012,20(9): 1960-1966 DOI： 10.3788/OPE.20122009.1960.

CUI Ji-wen, LIU Xue-ming, TAN Jiu-bin. Self-calibration for 2-D ultra-precision stage[J]. Editorial Office of Optics and Precision Engineering, 2012,20(9): 1960-1966 DOI： 10.3788/OPE.20122009.1960.

摘要

为了提高超精密级二维工作台的运动定位精度

提出了一种实现工作台系统误差分离的二维自标定算法。基于工作台测量误差模型

该算法利用辅助标记板的5个不同测量位姿

分别得到迭代模型和迭代初始值

最终建立完整的迭代二维自标定模型。应用该算法对系统误差为0.2 m的二维工作台进行仿真

结果显示:当不存在随机测量噪声时

标定精度为0.33 nm;引入随机测量噪声时

标定精度与噪声同一量级。对

x、y

向给定测量精度分别为2.98 m和3.22 m的二维工作台进行自标定

得到

x、y

向测量精度分别为2.59 m和3.14 m。提出的自标定算法对随机测量噪声有很好的鲁棒性

能够用于精密或超精密级二维工作台自标定。

Abstract

A two-dimensional self-calibration algorithm was developed to extract the stage systematic measurement error from a stage position measurement error. On the basis of the stage measurement error model

the algorithm got the iterative self-calibration model and the initial value by measuring five different views of an artifact on the stage

and then it established a complete iterative 2D self-calibration model. The algorithm was used to simulate a 2D stage with an accuracy of 0.2 m. The results show that the calibration error is 0.33 nm without random measurement noises and is the same order of magnitude with random measurement noises. The actual self-calibration experiment on a stage with the given measuring accuracies of 2.98 m and 3.22 m in

and

directions was performed

and obtained measuring accuracies are 2.59 m and 3.14 m in

and

directions

respectively. All results demonstrate that the proposed algorithm has a good robustness for the random measurement noises

and it is suitable for the calibrations for precision stages or ultra-precision stages.

关键词

Keywords

references

YE J, TAKAC M, BERGLUND C N, et al.. An exact algorithm for self-calibration of precision metrology stages [J]. Precision Engineering, 1997, 20(1):16-32.[2] 朱立伟,朱煜,尹文生. 超精密二维工作台自标定技术研究[J]. 中国机械工程, 2005,16(20): 1787-1790. ZHU L W, ZHU Y, YIN W SH. Research on self-calibration of two-dimensional ultra-precision Stages[J].China Mechanical Engineering, 2005, 16(20): 1787-1790. (in Chinese)[3] 朱煜,朱立伟, 尹文生,等. IC加工及检测装备超精密工作台自标定技术研究[J]. 电子工业专用设备, 2005,34(3):20-24. ZHU Y, ZHU L W, YIN W SH, et al.. Research on self-calibration of ultra-precision stages applied in IC fabrication and inspection devices [J]. Equipment for Electronic Products Manufacturing, 2005, 34(3): 20-24. (in Chinese)[4] RAUGH M R.Absolute two-dimensional sub-micron metrology for electronal beam lithograph: a theory of calibration with applications [J]. Precision Engineering,1985, 7(1): 3-13.[5] LU X M. Real-time self-calibration and geometry error measurement in nm level multi-axis precision machines based on multi X-Y encoder integration. University of New Mexico, 2004.[6] YOO S, KIM S W. Self-calibration algorithm for testing out-of-plane errors of two-dimensional profiling Stages [J]. International Journal of Machine Tools & Manufacture, 2004, 44(7):767-774.[7] RAUGH M R. Self-calibration of interferometer stages: mathematical techniques for deriving Lattice algorithms for nanotechnology. Technical Report, 2002.[8] ZHU Y, HU C X, HU J C, et al.. A transitive algorithm for self-calibration of two-dimensional ultra-precision stages [J]. IEEE, 2011: 594-598.[9] ZHU Y, HU C X, HU J C. Least-square based self-calibration of two-dimensional ultra-precision stages [J]. IEEE, 2011: 597-602.[10] ELEANOR F H. Investigation into applying self-calibration techniques to measuring large optical components on a CMM [J]. SPIE,2003, 5190: 232-241.[11] ZHANG G X, FU J Y. A method for optical CMM calibration using a grid plate [J]. Annals of the ClRP, 2000, 7(49):399-402.[12] 林洪桦. 测量误差与不确定度评估 [M]. 北京:机械工业出版社,2009. LIN H H. Measurement Error and Uncertainty Evaluation[M]. Beijing: China Machine Press, 2009.(in Chinese)

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