Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad

WANG Xu

doi:10.3788/OPE.20122010.2123

您当前的位置：

首页 >

文章列表页 >

Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad

Article | 更新时间：2020-08-12

- Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad
- Optics and Precision Engineering Vol. 20, Issue 10, Pages: 2123-2131(2012)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122010.2123
  CLC： TH703;TN305
- Received：25 May 2012，
  
  Revised：01 July 2012，
  
  Published：10 October 2012
- 稿件说明：
移动端阅览
王旭. 使用优化的固着磨料磨盘全口径加工碳化硅反射镜[J]. 光学精密工程, 2012,20(10): 2123-2131

WANG Xu. Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad[J]. Editorial Office of Optics and Precision Engineering, 2012,20(10): 2123-2131
王旭. 使用优化的固着磨料磨盘全口径加工碳化硅反射镜[J]. 光学精密工程, 2012,20(10): 2123-2131 DOI： 10.3788/OPE.20122010.2123.

WANG Xu. Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad[J]. Editorial Office of Optics and Precision Engineering, 2012,20(10): 2123-2131 DOI： 10.3788/OPE.20122010.2123.

摘要

为提高碳化硅非球面反射镜的加工质量

对加工中涉及的固着磨料工艺去除函数进行了研究。在早期的实验中测试了圆形丸片的去除函数

引入填充因子的概念来评价实验所获得的去除函数

定量获得了丸片结构与填充因子之间的关系。为了提高填充因子和磨盘的加工特性

根据圆形丸片的实验结果优化了磨头的结构并基于Matlab软件模拟了新型磨头的去除函数。在全口径范围考察了磨头工作的稳定性

并在相同加工参数条件下完成了固着磨料和散粒磨料的加工实验。为了对理论模拟和实验结果进行比较

引入结构相似度指数的概念来评价全口径反射镜去除量模拟结果与实验结果之间的相似程度。结果显示

实验得到的结构相似度指数达到了0.425 7

证明优化后的固着磨料磨头在大口径碳化硅反射镜加工方面极有应用前景。

Abstract

To improve the fabricating quality of a SiC aspheric mirror

this paper researched the removal function in fixed abrasive technology involved in the mirror fabrication. The removal function was tested in the earlier round-pellet polishing pad

then a filling factor was introduced to evaluate the removal function obtained from the experiments and the relation between round-pellet pad structure and filling factor was established. To improve the filling factor and the characteristic of polishing pad

the pad structure was optimized according to the experimental results of the round-pellet pad.The removal function of the new polishing pad was simulated by MATLAB. A stability experiment in the full aperture was performed

and the both fixed abrasive and slurry abrasive polishing experiments were conducted under the same fabricating conditions. Finally

the Structural Similarity Index (SSI) was introduced to evaluate the similarity between simulations and experiments for the removal of large aperture mirror

and the best SSI of multi-square-pellet pad is 0.425 7. The comparison results are acceptable and positive

which shows that the optimized fixed abrasive polishing pad is highly promising for fabrication of large aperture SiC mirrors.

关键词

Keywords

references

CHOYKE W J, FARICH R F, HOFFMAN R A. SiC, a new material for mirrors 1: high powerlasers;2:VUV applications[J]. Appl. Opt., 1976,15(9):2006-2007.[2] GOLINI D,JACOBS S D. Physics of loose abrasive microgrinding[J]. Appl. Opt., 1991,30(19):2761-2777. [3] LAMBROPOULOS J C, XU S,FANG T. Loose abrasive lapping hardness of optical glasses and its interpretation[J]. Appl. Opt.,1997,36(7):1501-1516.[4] GILLMAN B E,JACOBS S D.Bound-abrasive polishers for optical glass[J]. Appl.Opt.,1998,37(6):3498-3504.[5] EDWARDS D F,HED P P. Optical glass fabrication technology. 1: fine grinding mechanism using bound diamond abrasives[J]. Appl. Opt.,1987,26(21):4670-4676.[6] FLETCHER T D, DRONEN B,GOBENA F T, et al..Fixed abrasive flat lapping with 3M trizact diamond tile abrasive pads.Presented at Optifab 2003, Rochester, New York, May 2003.[7] FLETCHER T,GOBENA F,ROMERO V.Diamond fixed abrasive lapping of brittle substrates.Presented at the OSA Optical Fabrication & Testing Topical Meeting, Rochester NY,2004.[8] BIFANO T, YI Y,KAHL W K. Fixed abrasive grinding of CVD SiC mirrors[J].Precision Engineering,1994,16(2):109-116.[9] JONES B A. Optimization of computer controlled polishing[J]. Appl. Opt.,1977,16(1):218-224.[10] JONES R A. Fabrication of small nonsymmetrical aspheric surfaces[J]. Appl. Opt.,1979,18(8):1244-1246.[11] WANG X, ZHANG X J. Theoretical study on removal rate and surface roughness in grinding RB-SiC mirror with a fixed abrasive[J]. Appl. Opt., 2009,48(5):904-910.[12] 王旭,张峰,张学军. 固着磨料抛光碳化硅反射镜的去除函数[J]. 光学精密工程,2009,17(5):951-957. WANG X, ZHANG F, ZHANG X J. Removal function of computer controlled polishing SiC mirror with fixed abrasive[J].Opt. Precision Eng.,2009,17(5):951-957.(in Chinese)[13] ZHANG X J, ZHANG ZH Y, LI Z L. Manufacturing and testing of 1-m class SiC aspherical mirror[J].SPIE,2007,6721:672109.[14] ZHENG L G, ZHANG X J. Novel resistance iterative algorithm for CCOS[J].SPIE,2006,6288:62880N.[15] ZHOU W, BOVIK A C,SHEIKH H R, et al.. Image quality assessment:from error visibility to structural similarity[J]. IEEE Transactions on Image Processing,2004,13(4):600-612.

Views

487

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

230 mm aperture RB-SiC mirror by reaction-formed joint

Study on removal function based on computer controlled grinding SiC mirror with fixed abrasive

Study on experiment of grinding SiC mirror with fixed abrasive

Testing technology for large aperture SiC asphere mirror

Weightlight SiC Mirror Technology

Related Author

ZHANG Bin-zhi

ZHANG Ge

DONG De-yi

王旭

薛栋林

MA Wen-Li

SHEN Mang-Zuo

Related Institution

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences, Beijing 100039, China

中国科学院长春光学精密机械与物理研究所

长春光机所

Institute of Optics and Electronics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰