230 mm aperture RB-SiC mirror by reaction-formed joint

ZHANG Bin-zhi; ZHANG Ge; DONG De-yi

doi:10.3788/OPE.20122011.2360

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230 mm aperture RB-SiC mirror by reaction-formed joint

Article | 更新时间：2020-08-12

- 230 mm aperture RB-SiC mirror by reaction-formed joint
- Optics and Precision Engineering Vol. 20, Issue 11, Pages: 2360-2364(2012)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所中科院光学系统先进制造技术重点实验室,吉林长春,130033
  2. 中国科学院大学北京,100039
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122011.2360
  CLC： TH703;TN305
- Received：16 January 2012，
  
  Revised：01 March 2012，
  
  Published：10 November 2012
- 稿件说明：
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张斌智, 张舸, 董德义. 反应连接230 mm口径RB-SiC反射镜[J]. 光学精密工程, 2012,20(11): 2360-2364

ZHANG Bin-zhi, ZHANG Ge, DONG De-yi. 230 mm aperture RB-SiC mirror by reaction-formed joint[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2360-2364
张斌智, 张舸, 董德义. 反应连接230 mm口径RB-SiC反射镜[J]. 光学精密工程, 2012,20(11): 2360-2364 DOI： 10.3788/OPE.20122011.2360.

ZHANG Bin-zhi, ZHANG Ge, DONG De-yi. 230 mm aperture RB-SiC mirror by reaction-formed joint[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2360-2364 DOI： 10.3788/OPE.20122011.2360.

摘要

针对传统工艺难以制备口径大于1.2 m的整块反射镜的问题

提出了反应连接制备大口径RB-SiC反射镜的工艺。该工艺在素坯阶段实现连接

一次反应烧结完成坯体的致密化和镜体的连接。采用该工艺制备了230 mm口径的RB-SiC反射镜

并使用FSGJ-2光学数控机床对反射镜进行了研磨、粗抛光和精抛光加工

其镜面面形精度RMS值达到了

/50(

=632.8 nm)。在环境温度(203) ℃检测了连接反射镜

其面形变化RMS值小于

/300

热循环试验前后连接反射镜面形没有明显变化;连接镜体表面在焊缝处粗糙度

3.3 nm

连接层与基体的显微结构基本相似

热性能相匹配。研究结果表明

用新型反应连接技术制成的RB-SiC反射镜可以满足空间光学应用要求。

Abstract

As the aperture for a monolithic mirror was limited in 1.2 m by traditional technologies

a new reaction-formed joint technology for RB-SiC was proposed. With the proprosed technology

the SiC mirror was joined in the green body process

and the green body densification and the joint of mirror were finished in the same sintering process. A 230 mm diameter RB-SiC mirror was fabricated by this technology. After milling and polishing finely with the FSJG-2 facility

the figure error of the mirror surface is less than

/50(

=632.8 nm). The mirror was tested in the temperature range of (203) ℃

and the tested results show that the change of the figure error of the mirror surface is less than

/300

and the mirror surface figure is not changed obviously after the thermal cycle test. Moreover

the roughness of the surface near the joint line is 3.3 nm

and its microstructure is similar to that of the RB-SiC ceramic. The thermal property of welding line is matching with that of RB-SiC ceramic. Obtained results demonstrate that the reaction-formed joint technology for the RB-SiC mirror satisfies the need of the large aperture mirror used in space optics.

关键词

Keywords

references

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中国科学院长春光学精密机械与物理研究所

长春光机所

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