Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers

DENG Yuan-long; LI Xue-jin; GENG You-fu; HONG Xue-ming

doi:10.3788/OPE.20122011.2373

您当前的位置：

首页 >

文章列表页 >

Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers

Article | 更新时间：2020-08-12

- Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers
- Optics and Precision Engineering Vol. 20, Issue 11, Pages: 2373-2379(2012)
- 作者机构：
  
  1. 深圳大学机电与控制工程学院,广东深圳,518060
  2. 深圳市传感器技术重点实验室,广东深圳 518060
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122011.2373
  CLC： O484.5;TH744.3
- Received：01 June 2012，
  
  Revised：17 July 2012，
  
  Published：10 November 2012
- 稿件说明：
移动端阅览
邓元龙, 李学金, 耿优福, 洪学明. 非偏振分光镜对干涉式椭偏仪测量精度的影响[J]. 光学精密工程, 2012,20(11): 2373-2379

DENG Yuan-long, LI Xue-jin, GENG You-fu, HONG Xue-ming. Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2373-2379
邓元龙, 李学金, 耿优福, 洪学明. 非偏振分光镜对干涉式椭偏仪测量精度的影响[J]. 光学精密工程, 2012,20(11): 2373-2379 DOI： 10.3788/OPE.20122011.2373.

DENG Yuan-long, LI Xue-jin, GENG You-fu, HONG Xue-ming. Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2373-2379 DOI： 10.3788/OPE.20122011.2373.

摘要

提出了一种新型激光外差干涉椭偏测量术用于实现纳米级精度的薄膜厚度测量。采用偏振光p和s分量透射比、反射比、反射相移、透射相移共同表征非偏振分光镜(NPBS)的退偏效应

建立了相应的误差模型

从而研究了多层介质膜NPBS的退偏效应和方位角对椭偏参数误差的影响。研究结果表明

由环境温度、入射角和光束偏振态的变化引起的NPBS退偏参数的漂移对椭偏测量精度影响很大

且无法通过标定来降低。为实现纳米级测量精度

NPBS的对准误差需要控制在0.1以内。相对而言

用于合光的NPBS方位角误差对测量精度影响较大

NPBS所导致的膜厚测量总误差约为1.8~2.5 nm

说明NPBS是马赫曾德尔干涉式椭偏仪的一个不可忽视的误差源。

Abstract

A novel heterodyne interferometric ellipsometer was investigated to measure the thicknesses of thin films in the nanometer-accuracy. The depolarization effect of a Nonpolarizing Beam Splitter (NPBS) was characterized by the transmission-induced-retardance (TIR) between p and s components of a polarizing beam

reflectance ratio

transmittance ratio and reflection-induced-retardance (RIR)

then a corresponding error model was established. The influence of the depolarization effect and misorientation of a multi-layer dielectric NPBS on the errors of ellipsometric parameters was investigated. Experimental results indicate that the fluctuation of the depolarization effect caused by the environmental temperatures

incident angles and the change of polarizating state has a major impact on the measurement accuracy

and it can not be eliminated by calibration. In order to implement the nanometer-accuracy

the misorientation angle must be smaller than 0.1. Furthermore

it shows that the NPBS orientation angle errors for recombination of the measurement light and the reference light have more important contribution than another ones to the measurement accuracy. The thickness measurement error of thin film induced by NPBS is about 1.8-2.5 nm

which means that the NPBS is an assignable error source in the Mach-Zehnder interferometric ellipsometer.

关键词

Keywords

references

HAZEBROEK H F. HOLSCHER A A. Interferometric ellipsometry[J]. J. Phys. E: Sci.Instrum., 1973, 6:822-826.[2] HEMMES K, HAMSTRA M A, KOOPS K R, et al.. Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster [J]. Thin Solid Films, 1998, 313-314: 40-46.[3] LIN CH H, CHOU CH, CHANG K S. Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques [J]. Appl.Opt.,1990,29(34):5159-5162.[4] CHIU M H, LEE J Y, SU D C. Complex refractive-index measurement based on Fresnel's equations and the use of heterodyne interferometry [J]. Appl. Opt., 1999, 38(19): 4047-4052.[5] WATKINS L R, HOOGERLAND D M. Interferometric ellipsometer with wavelength-modulated laser diode source [J]. Appl. Opt., 2004, 43(22):4362-4366.[6] WATKINS L R. Accurate heterodyne interferometric ellipsometer [J]. Optics and Lasers in Engineering, 2010, 48:114-118.[7] ELLIS J D, MESKERSA A J H, SPRONCK J W. Fiber-coupled displacement interferometry without periodic nonlinearity [J]. Optics Letters, 2011, 36(18): 3584.[8] 候文玫,张运波,许琦欣,等. 分光镜对外差激光干涉仪非线性的影响[J]. 机械工程学报,2008,44(9):163-168. HOU W M, ZHANG Y B, XU QI X, et al.. Effect of beam splitter on nonlinearity in heterodyne interferometers [J]. Chinese Journal of Mechanical Engineering, 2008, 44(9): 163-168. (in Chinese)[9] 陈洪芳,钟志,丁雪梅. 激光外差干涉的非线性误差补偿[J]. 光学精密工程,2010,18(5):1043-1047. CHEN H F, ZHONG ZH, DING X M. Compensation of nonlinear errors in laser heterodyne interferometers [J]. Opt. Precision Eng., 2010, 18(5):1043-1047. (in Chinese)[10] 邓元龙,李岳峙,吴玉斌,等. 金属反射镜对外差干涉椭偏测量精度的影响[J]. 中国激光,2009, 36(2): 339-443. DENG Y L, LI Y ZH, WU Y B, et al.. Influence of metal mirrors on measurement accuracy in heterodyne interferometric ellipsomtry [J]. Chinese J. Lasers, 2009, 36(2):339-443. (in Chinese)[11] DENG Y L, CHAI J L, XUE X J, et al.. Polarization mixing error in transmission ellipsometry with two acousto-optical modulators [J]. Optical Engineering, 2008, 47(7): 075601.[12] WU CH M, SU CH SH. Nonlinearity in measurements of length by optical interferometry[J]. Meas. Sci. Technol., 1996, 7(1): 62-68.[13] EOM T B, CHOI T Y, LEE K H, et al.. A simple method for the compensation of the nonlinearity in the heterodyne interferometer[J]. Meas. Sci. Technol., 2002, 13(2):222-225.[14] 杨华勇,吕海宝,胡永明,等. 入射光的偏振和强度对分光镜透/反比的影响[J]. 光电子激光, 2003, 14(4):345-348. YANG H Y, LV H B, HU Y M, et al.. Influence of polarization and intensity variations of incident beam on transmitting and reflecting intensities of a beam splitter [J]. Journal of OptoelectronicsLaser, 2003, 14(4):345-348.(in Chinese)[15] JIN H SH, ZHENG P W. Theoretical analysis of two nonpolarizing beam splitters in asymmetrical glass cubes [J]. Appl.Opt., 2008,47(13):C275-C278.[16] JIN H SH,CHUN Y G, ZHENG P W. Design and analysis of metal-dielectric nonpolarizing beam splitters in a glass cube [J]. Appl.Opt., 2009, 48(18):3385-3390.[17] 姜海丽,王政平. 保偏膜的反射相移温度特性的实验研究[J]. 哈尔滨工程大学学报, 2006, 27(2):305-307. JIANG H L, WANG ZH P. Temperature features of reflection induced retardance of polarization preserving reflecting medium layer [J]. Journal of Harbin Engineering University, 2006, 27(2):305-307.(in Chinese)[18] 康崇,王政平,黄宗军,等. 无偏振效应分束器反射相移对法拉第镜式光学电流互感器输出光偏振态的影响[J]. 光学学报,2007, 26(12):1857-1860. KANG CH, WANG ZH P, HUANG Z J, et al.. Influence of reflection-induced-retardance of non-polarizing beam splitter upon the polarization state of the output light of faraday mirror optical current transformer [J]. Acta Optica Sinica, 2007, 26(12):1857-1860.(in Chinese)[19] DENG Y L, LI X J, WU Y B, et al.. Analysis of frequency mixing error on heterodyne interferometric ellipsometry [J]. Meas. Sci. Technol.,2007, 18(11): 3339-3343.

Views

582

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰