Correction of crosstalk and fake signal trigger of EUV imager

WANG Xiao-dong; ZHU Xiao-ming; LV Bao-lin; LIU Wen-guang

doi:10.3788/OPE.20122012.2674

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Correction of crosstalk and fake signal trigger of EUV imager

Article | 更新时间：2020-08-13

- Correction of crosstalk and fake signal trigger of EUV imager
- Optics and Precision Engineering Vol. 20, Issue 12, Pages: 2674-2679(2012)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2. 中国科学院大学,北京 100039
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20122012.2674
  CLC： TH74;TP391.4
- Received：23 July 2012，
  
  Revised：19 September 2012，
  
  Published：10 December 2012
- 稿件说明：
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王晓东, 朱小明, 吕宝林, 刘文光. EUV成像仪极间串扰和伪信号触发计数修正[J]. 光学精密工程, 2012,20(12): 2674-2679

WANG Xiao-dong, ZHU Xiao-ming, LV Bao-lin, LIU Wen-guang. Correction of crosstalk and fake signal trigger of EUV imager[J]. Editorial Office of Optics and Precision Engineering, 2012,20(12): 2674-2679
王晓东, 朱小明, 吕宝林, 刘文光. EUV成像仪极间串扰和伪信号触发计数修正[J]. 光学精密工程, 2012,20(12): 2674-2679 DOI： 10.3788/OPE.20122012.2674.

WANG Xiao-dong, ZHU Xiao-ming, LV Bao-lin, LIU Wen-guang. Correction of crosstalk and fake signal trigger of EUV imager[J]. Editorial Office of Optics and Precision Engineering, 2012,20(12): 2674-2679 DOI： 10.3788/OPE.20122012.2674.

摘要

为了提高极紫外(EUV)光子计数成像仪的分辨率

分析了EUV成像仪系统WSZ阳极(Wedge Strip Zigzag anode)不同条带间的极间串扰以及非目标能量区间内信号触发产生的伪信号对图像质量的影响。讨论了串扰产生的原因

通过测量极间电容

找到了串扰系数所在的范围

并最终确定最优值;使用该系数对不同能量范围内的光子进行处理

确定了合适的能量区间(上下限)。在设定的能量区间重新成像并与原图像进行对比

结果显示图像质量有了明显提高。通过消除极间串扰和剔除混杂在图像数据中的伪数据

使图像的边缘特性更强

提高了图像分辨率。

Abstract

In order to improve the resolution of an Extreme Ultraviolet (EUV) photon counting imager

this paper analyzed the influence of the crosstalk between Wedge Strip Zigzag (WSZ) anodes and the false trigger resulted from out-range signals on image quality. First

the reasons which caused the crosstalk were analyzed

and the range of crosstalk coefficient and its optimum value were determined by measuring interelectrode capacitance. Then

the crosstalk coefficient was used to process photons and determine a proper energy interval (upper and lower limit). Finally

the image obtained in the setting energy interval was compared with an original image. The comparison shows that the image quality has been improved obviously. The results demonstrate that the image edge becomes stronger further and image resolution is improved by eliminating the crosstalk between WSZ anodes and removing fake data from real data.

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references

尼启良, 刘世界, 陈波. 极紫外位置灵敏阳极光子计数成像探测器研究[J]. 中国光学与应用光学,2009,22(1): 36-40. NI Q L, LIU SH J, CHEN B. Investigation on extreme ultraviolet photon-counting imaging detector with position sensitive anode [J]. Chinese Journal of Optics and Applied Optics, 2009,22(1):36-40. (in Chinese)[2] 何玲平.极紫外光子计数探测器成像特性研究. 北京:中国科学院博士毕业论文,2010,34-49. HE L P. Study of imaging characteristics of EUV photon counting detector. Beijing:Dissertation for Doctor Degree of Chinese Academy of Sciences, 2010,4:34-49. (in Chinese)[3] 王光明. 基于30.4 nm极紫外成像的WSZ探测器研究. 北京:中国科学院博士毕业论文,2006,19-24,41-48. WANG G M.Study on WSZ Detector of 30.4nm EUV Imager. Beijing:Dissertation for Doctor Degree of Chinese Academy of Sciences, 2006,19-24, 41-48. (in Chinese)[4] 尼启良, 何玲平, 刘世界,等. 使用感应电荷位敏阳极的极紫外单光子计数成像系统[J]. 光学精密工程, 2010,18(12):2543-2548. NI Q L, HE L P, LIU SH J, et al.. Extreme ultraviolet single photon counting imaging system based on induced charge position-sensitive anode [J]. Opt. Precision Eng., 2010,18(12): 2543-2548. (in Chinese)[5] 何玲平, 尼启良, 李敏,等. 楔条形阳极位置灵敏探测器图像非线性研究[J]. 光电子激光 2010,21(4):512-515. HE L P, NI Q L, LI M,et al.. The imaging non linearity of position sensitive detector based on wedge-strip anode [J]. Journal of OptoelectronicsLaser,2010,21(4): 512-515. (in Chinese)[6] 何玲平,尼启良,李敏,等. 楔条形阳极光子计数探测器成像性能的检测[J]. 光学精密工程 2009,17(11): 2699-2704. HE L P, NI Q L, LI M,et al.. Image performance of photon-counting imaging detector with wedge and strip anode [J]. Opt. Precision Eng., 2009,17(11):2699-2704. (in Chinese)[7] LAPINGTON J S,SMITH A D,WALTON D M. Micro channel plate pore size limited imaging with ultra-thin wedge and strip anodes [J]. IEEE Transactions on Nuclear Science, 1987,34(1): 431-433. [8] 徐克尊.粒子探测技术[M]. 合肥:中国科学技术大学出版社,136-146. X K Z. Technology of Particle Detector[M].Hefei: University of Science and Technology of China,136-146. (in Chinese)[9] 韦亚一, 陶兆民. 微通道板最佳倾斜角的设计[J]. 红外技术,1994,16(2):19-21. WEI Y Y, TAO ZH M. Optimal Design of the MCP Inclined Angle[J]. Infrared Technology, 1994,16(2):19-21.(in Chinese)[10] 闫金良, 孟淑英, 向世明. 微通道板增益疲劳机理研究[J]. 应用光学,1996,17(4):25-28. YAN J L,MENG SH Y.The study of gain fatigue mechanism of MCP [J].Applied Optics,1996,17(4) :25-28.(in Chinese)

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Image tailing processing of WSZ position sensitive anode detector based on MCP

Related Author

WANG Xiao-dong1

ZHU Xiao-ming1

LV Bao-lin1

BAO Hai-ming1

LIU Wen-guang1

LI Zhe1

Related Institution

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

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