Design of bonding quality testing system for micro device made of transparent materials

WANG Xiao-peng; LIU ZHi-hua; CHEN Tian-ning

doi:10.3788/OPE.20132101.0069

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Design of bonding quality testing system for micro device made of transparent materials

Article | 更新时间：2020-08-12

- Design of bonding quality testing system for micro device made of transparent materials
- Optics and Precision Engineering Vol. 21, Issue 1, Pages: 69-76(2013)
- 作者机构：
  
  西安交通大学机械工程学院振动与噪声控制研究所
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132101.0069
  CLC： TP242+6;TH706
- Received：21 May 2012，
  
  Revised：05 July 2012，
  
  Published Online：24 January 2013，
  
  Published：15 January 2013
- 稿件说明：
移动端阅览
王小鹏刘志华陈天宁. 透明材料微小器件键合质量检测系统设计[J]. 光学精密工程, 2013,21(1): 69-76

WANG Xiao-peng LIU ZHi-hua CHEN Tian-ning. Design of bonding quality testing system for micro device made of transparent materials[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 69-76
王小鹏刘志华陈天宁. 透明材料微小器件键合质量检测系统设计[J]. 光学精密工程, 2013,21(1): 69-76 DOI： 10.3788/OPE.20132101.0069.

WANG Xiao-peng LIU ZHi-hua CHEN Tian-ning. Design of bonding quality testing system for micro device made of transparent materials[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 69-76 DOI： 10.3788/OPE.20132101.0069.

摘要

针对材料和结构均特殊的透明材料微小器件的键合质量检测，提出了可见光透射机器视觉检测法。分析了检测系统硬件中主要部件的性能要求，研究了该检测系统的图像处理技术。检测系统利用光源、相机、镜头和计算机等主要部件实现图像采集功能，并通过图像相减、灰度直方图调整、图像滤波和图像二值化等图像处理功能来完成质量检测。实验结果表明，提出的可见光透射机器视觉检测法能灵敏有效地检测出透明材料微小器件键合位置处存在的键合间隙和缺陷大小，检测精度可达10 m，满足透明材料微小器件键合质量的要求，是一种高效、非接触、无损、无污染的检测方法。

Abstract

A visible light transmittance machine vision detection method was put forward to measure the bonding quality of micro devices made by transparent materials with specific compositions and structures. The performance requirements of main components in the system hardware was analyzed

and the image processing techniques for the detection system were researched. The visible light transmittance machine vision detection system captured the image with the main components of the light source

camera

lens and the computer and implemented quality testing by image subtraction

gray histogram adjustment

image filtering and image binarization. Experimental results indicate that the proposed detection method can detect the bonding gaps of the micro devices made by transparent materials sensitively and effectively

and the detection accuracy of flaw size is about 10 m. The results meet the detection requirements of micro devices for bonding quality and verify that the method is efficient

non-contact

non-destructive and non-polluting.

关键词

Keywords

references

郭怡，师小红，王广龙,等．微纳米级裂纹的非线性超声检测[J]. 光学精密工程, 2011,19（1）:132-137.DUN Y, SHI X H, WANG G L. Nonlinear ultrasonic test of micro-nano crack [J]. Opt. Precision Eng., 2011,19（1）:132-137. ( in Chinese)[2]何存富，袁红梅，吴斌,等．软包装热封缺陷的超声无损检测[J]．仪器仪表学报,2009，30（4）：750-754．HE C F, YUAN H M, WU B, at el.. Defect detection in sea region of flexible packages using ultra sonic nondestructive testing technique [J]. Chinese Journal of Scientific Instrument, 2009，30（4）：750-754．( in Chinese)[3]周平，廖广兰，史铁林,等．晶片键合质量的红外检测系统设计[J] ．半导体技术,2006， 31（11）：819-822．ZHOU P, LIAO G L, SHI T L, at el.. IR system for detecting wafer bonding quality [J]. Semiconductor Technology, 2006, 31（11）：819-822．( in Chinese)[4]李星宇，贾友见．数字实时全息对物体微小形变的测量研究[J]．邵阳学院学报, 2008,7（4）：31-34.LI X Y, JIA Y J. Application of the real-time digital holograph in the measurement of small deformation [J]. Journal of Shaoyang University， 2008，7（4）：31-34．( in Chinese)[5]YANG R, CHEN T, CHEN H, et al.. Microfabrication of biodegradable (PLGA) honeycomb-structures and potential applications in implantable drug delivery [J]. Sensors and Actuators B: Chemical, 2005, 106 (2): 506-511.[6]钱良山，王小鹏，陈天宁．基于MEMS的微型药物控释系统的特性研究[J]．纳米科技, 2005，11(5)：31-34．QIAN L SH, WANG X P, CHEN T N. Study of release traits of subminiature controlled drug release system based on MEMS [J]. Nanoscience & Technology, 2005，11(5)：31-34．( in Chinese)[7]崔建英．光学机械基础[M]．北京：清华大学出版社．2008： 1-9．CUI J Y. Fundamentals of Optical Mechanics[M]. Beijing: Tsinghua University press, 2008： 1-9．( in Chinese)[8]张洋．印刷质量在线检测系统照明设计与系统实现[D] ．武汉：华中科技大学．2006．ZHANG Y. Design and Implementation on Lighting of Printing Online Inspection System[D]. Wuhan：Huazhong University of Science and Technology, 2006．( in Chinese)[9]薛向东. 嵌入式IC晶片视觉检测系统技术研究及应用 [D]．广州：广东工业大学．2006 ．XUE X D. Research and Application on Embedded IC chip detection system[D]．Guangzhou：Guangdong Technology University, 2006 ．( in Chinese)[10]贾小丽．基于LabVIEW的微型电感器生产装备视觉检测系统的研究[D] ．广州：广东工业大学．2008．JIA X L. Research on Visual Inspection System of Miniature Inductor Production Equipment Based on the LabVIEW[D]．Guangzhou：Guangdong Technology University, 2008 ．( in Chinese)[11]谢立，王永强，于德敏,等．利用图像的灰度特征实现半透明产品的识别[J] ．微计算机信息, 2005．11（21）:44-46．XIE L，WANG Y Q，YU D M, at el.. Research on traffic information classification based on a grey-histogram and linear discriminant analysis[J]. CAAI Transactions on Intelligent Systems, 2005,11（21）:44-46．( in Chinese)[12]龙清．直方图图像增强技术[J]. 电脑知识与技术, 2011, 4：883-886．LONG Q. The image enhancement based on histogram [J]. Computer Knowledge and Technology, 2011, 4：883-886．( in Chinese)[13]祝中秋，李斌．基于直方图拉伸的图像增强算法及实现[J]．信息技术, 2009, 5：54-58．ZHU ZH Q, LI B．Image enhancement algorithm based on histogram extension and its implementation [J]．Information Technology, 2009, 5：54-58．( in Chinese)[14]唐启敬，田行斌，耿明超,等．CCD视觉检测系统的整体标定[J] ．光学精密工程, 2011,19（8）:1903-1910.TANG Q J, TIAN X B, GENG M CH．Global calibration method for CCD based visual inspective system [J]．Opt. Precision Eng., 2011, 19（8）:1903-1910. ( in Chinese)[15]高浩军，杜宇人．中值滤波在图像处理中的应用[J]．电子工程师, 2004，30（8）：35-36．GAO H J , DU Y R．The application of median filtering on image processing [J]． Electronic Engineer, 2004，30（8）：35-36．(in Chinese)[16]伍济钢，宾鸿赞．机器视觉的薄片零件尺寸检测系统[J]．光学精密工程, 2007, 15（1）:124-130.WU J G，BIN H Z．Dimensional inspecting system of thin sheet parts based on machine vision [J]． Opt. Precision Eng., 2007, 15（1）:124-130. ( in Chinese)

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