Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 Machine

XIA Yi-min; YANG Tian-ren; ZHANG Gang-qiang; LUO Song-bao; YU Hong-yun

doi:10.3788/OPE.20132101.0144

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Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 Machine

Article | 更新时间：2020-08-12

- Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 Machine
- Optics and Precision Engineering Vol. 21, Issue 1, Pages: 144-150(2013)
- 作者机构：
  
  ．中南大学高性能复杂制造国家重点实验室 2．北京航空精密机械研究所航空科技重点实验室
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132101.0144
  CLC： TH133.3
- Received：24 August 2012，
  
  Revised：24 October 2012，
  
  Published Online：24 January 2013，
  
  Published：15 January 2013
- 稿件说明：
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夏毅敏杨添任张刚强罗松保禹宏云. Nanosys-1000机床静压止推轴承流场分布规律及承载特性[J]. 光学精密工程, 2013,21(1): 144-150

XIA Yi-min YANG Tian-ren ZHANG Gang-qiang LUO Song-bao YU Hong-yun. Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 Machine[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 144-150
夏毅敏杨添任张刚强罗松保禹宏云. Nanosys-1000机床静压止推轴承流场分布规律及承载特性[J]. 光学精密工程, 2013,21(1): 144-150 DOI： 10.3788/OPE.20132101.0144.

XIA Yi-min YANG Tian-ren ZHANG Gang-qiang LUO Song-bao YU Hong-yun. Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 Machine[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 144-150 DOI： 10.3788/OPE.20132101.0144.

摘要

为了提高Nanosys-1000非球面曲面光学零件超精密加工机床加工精度，研究了机床核心部件静压止推轴承内流场分布规律，进而揭示其承载特性。利用ANSYS/Fluent软件建立对称结构静压止推轴承扇形油垫的仿真模型，采用层流模式对进油压力为1.3~1.9 MPa、油膜厚度为20~36 m的油垫流场分布规律与承载特性进行分析。研究结果表明：油垫内压力在油腔区域比较均匀，沿封油边呈线性下降；油膜承载力随油腔压力线性增长，且在同一进油压力下，油膜厚度越小，油膜承载力越大，进油压力为1.5 MPa时，油膜厚度从36 m减小到20 m，油腔压力从3.0510

Pa增加到8.0210

Pa，油膜承载力相应地从880 N增加到2 109 N；同一负载即油膜承载力下，进油压力越高，油膜厚度越大，油膜承载力为1 320 N时，进油压力从1.3 MPa增加到1.9 MPa，油膜厚度从26 m增加到30 m；同一油膜厚度下，进油压力越高，润滑油流量越大，油膜厚度为28 m时，进油压力从1.3 MPa增加到1.9 MPa，润滑油流量从0.179 L/min增加到0.231 L/min。相关研究结果在研制的Nanosys-1000非球面曲面超精密加工机床静压止推轴承上得到了验证。

Abstract

To improve the machining accuracy of Nanosys-1000 ultra-precision machine for aspheric optics

the flow distribution of a hydrostatic thrust bearing which is one of core components in the machine was researched to reveal the characteristics of the bearing．A simulation model of fan-shaped oil pad for a symmetrical structure hydrostatic thrust bearing was created by using ANSYS/Fluent software

and the flow field distribution law and bearing characteristics of the oil pad on a inlet oil pressure of 1.3-1.9 MPa and an oil film thickness of 20-36 m were analyzed by using a laminar flow model. The results show that the pressure in the oil chamber region is very uniform and it decreases linearly along resistive oil edges. Furthermore

the oil film bearing capacity is linear growth with the oil cavity pressure.Under the same inlet oil pressure

the smaller the oil film thickness is

the greater the oil film bearing capacity is; when inlet oil pressure is 1.5 MPa

the oil film thickness decreases from 36 m to 20 m and the oil cavity pressure increases from 3.0510

Pa to 8.0210

Pa; accordingly

the oil film bearing capacity increases from 880 N to 2 109 N. Under the same load

the higher the inlet oil pressure is

the larger the oil film thickness is; when the oil film bearing capacity is 1 320 N

the inlet oil pressure increases from 1.3 MPa to 1.9 MPa; accordingly

the oil film thickness increases from 26 m to 30 m. Moreover

under the same oil film thickness

the higher the inlet oil pressureis

the larger the oil flow is; when the oil film thickness is 28 m

the inlet oil pressure increases from 1.3 MPa to 1.9 MPa; accordingly

the oil flow increases from 0.179 L/min to 0.231 L/min. The relative research results have been verified in the hydrostatic thrust bearing of the Nanosys-1 000 ultra-precision machining tool.

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references

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