Laser confocal measurement system for curvature radii of lenses

QIU Li-rong; LI Jia; ZHAO Wei-qian; YANG Jia-miao

doi:10.3788/OPE.20132102.0246

您当前的位置：

首页 >

文章列表页 >

Laser confocal measurement system for curvature radii of lenses

Article | 更新时间：2020-08-12

- Laser confocal measurement system for curvature radii of lenses
- Optics and Precision Engineering Vol. 21, Issue 2, Pages: 246-252(2013)
- 作者机构：
  
  北京理工大学光电学院北京,中国,100081
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132102.0246
  CLC： TH741
- Received：11 October 2012，
  
  Revised：03 December 2012，
  
  Published Online：23 February 2013，
  
  Published：15 February 2013
- 稿件说明：
移动端阅览
邱丽荣李佳赵维谦杨佳苗. 激光共焦透镜曲率半径测量系统[J]. 光学精密工程, 2013,21(2): 246-252

QIU Li-rong LI Jia ZHAO Wei-qian YANG Jia-miao. Laser confocal measurement system for curvature radii of lenses[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 246-252
邱丽荣李佳赵维谦杨佳苗. 激光共焦透镜曲率半径测量系统[J]. 光学精密工程, 2013,21(2): 246-252 DOI： 10.3788/OPE.20132102.0246.

QIU Li-rong LI Jia ZHAO Wei-qian YANG Jia-miao. Laser confocal measurement system for curvature radii of lenses[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 246-252 DOI： 10.3788/OPE.20132102.0246.

摘要

基于共焦技术独特的轴向层析定焦能力并结合气浮导轨平移台和激光干涉仪测长系统

研制了一套高精度、非接触激光共焦透镜曲率半径测量系统。该系统利用共焦轴向光强响应曲线的峰值点对应系统物镜聚焦焦点这一特性，使用峰值点对被测透镜的猫眼位置及共焦位置进行精确定位，并结合激光干涉仪获得透镜猫眼位置及共焦位置坐标值，从而计算得到透镜的曲率半径。系统由主控软件控制气浮导轨带动被测透镜在猫眼位置及共焦位置附近进行扫描测量，并实现信号采集和数据处理。实验表明，利用该系统测量透镜的曲率半径时，测量重复性优于2 μm，满足国内高精度透镜曲率半径测量的精度需求。该系统测量速度快、操作简便、结构简单且易于实现小型化。

Abstract

Combined an air bearing platform and a laser interferometer

a set of non-contact and high precision system for curvature radius measurements of lenses is developed based on the axial focusing of confocal technique. The developed system is characterized by that the peak point of the confocal axial intensive curve corresponds to the focus of an objective. On the characteristic

it identifies precisely the cat-eye and confocal positions of the test lens. Then it takes the laser interferometer to obtain the position coordinates of the cat-eye and confocal positions and calculates the curvature radius of the lens. Furthermore

the main control software drives an air bearing slider with a test lens to achieve the scanning measurement near the cat eye and confocal positions

and then acquires signals and processes data. Experimental results show that the measurement system has the reproducibility less than 2 μm， which meets the requirements of curvature radius measurement for high precision. The developed measurement system has the advantages of high test speed

easy operation

simple structure and easy to be miniaturized.

关键词

Keywords

references

YI H Y, ZHANG R ZH, HUA X Y, et al.. A novel compensation method for the measurement of radius of curvature [J].Optics and Lasers in Engineering, 2011, 43(4): 911-915.[2]林旭东，陈涛，明名,等.球面拼接镜的相对曲率半径测量[J].光学精密工程,2010,18(1): 75-82. LIN X D, CHEN T, MING M, et al.. Measurement of relative curvature radius for spherical segmented mirrors [J]. Opt. Precision Eng., 2010, 18(1): 75-82. (in Chinese)[3]SCHMITZ T L,N G, VAUGHN M, et al.. Improving optical bench radius measurements using stage error motion data [J]. Applied Optics, 2008, 47(36): 6692-6670.[4]杨李茗，叶海仙.大口径大曲率半径光学元件的高精度检测[J]. 光学精密工程, 2011, 19(6):1207-1212.YANG L M, YE H X. High-precision metrology for optical components with large-apertures and large radius of curvature [J]. Opt. Precision Eng., 2011, 19(6): 1207-1212. (in Chinese)[5]李海，徐海卫.基于3D数模的三坐标测量机曲面检测[J]. 中国测试技术, 2005, 31(4):24-27.LI H, XU H W. Inspecting surfaces by CMM based on 3D CAD model [J].China Measurement Technology, 2005, 31(4): 24-27. (in Chinese)[6]李先元.简易球径仪在光学加工中的应用[J]. 四川兵工学报, 1997, 18(4): 28-30.LI X Y. Simple ball diameter instrument application in optical processing [J]. Journal of Sichuan Ordnance, 1997, 18(4): 28-30. (in Chinese)[7]魏仲慧.数字光电自准直仪的研究与设计[J].光学精密工程,1996,4(3):116-120.WEI ZH H. Research and design of the digital optoelectronic autocollimator [J]. Opt. Precision Eng., 1996, 4(3): 116-120. (in Chinese)[8]王孝坤，郑立功.一种精确测量光学球面曲率半径的方法[J]. 光学学报, 2011, 31(8):1-5.WANG X K, ZHENG L G. A method for testing radius of curvature of optical spheric surface [J].Acta Optica Sinica, 2011, 31(8) :1-5. (in Chinese)[9]SHEPPARD C J R,WILSON T. Depth of field in the scanning microscope [J]. Optics Letters, 1978, 3(3): 115-117.[10]顾敏. 共焦显微术的三维成像原理[M]. 新加坡：新时代出版社,2000: 1-2, 3-5, 112-114.GU M. Three-Dimensional Imaging in Confocal Microscopes [M].Singapore:World Scientific Publishing Co.Pte.Ltd., 2000: 1-2, 3-5, 112-114. (in Chinese)[11]WANG F S, TAN J B, ZHAO W Q. The optical probe using confocal technique for surface profile measurement [J]. SPIE, 2000, 4222:194-197.[12]ZHAO W Q, TAN J B, QIU L R. Bipolar absolute differential confocal approach to higher spatial resolution[J]. Optics Express, 2004, 12(21):5013-5021.[13]ZHAO W Q, SUN R D, QIU L R, et al.. Laser differential confocal radius measurement[J]. Optics Express, 2010, 18(3): 2345-2360.[14]孙若端，邱丽荣，杨佳苗，等.激光差动共焦曲率半径测量系统的研制[J]. 仪器仪表学报,2011, 32(12): 33-38. SUN R D, Q L R, Y J M, et al.. Development of laser differential confocal radius measurement system [J].Chinese Journal of Scientific Instrument, 2011, 32(12):33-38. (in Chinese)[15]赵维谦,杨佳苗,邱丽荣. 共焦干涉定焦及曲半径测量方法:中国,CN102175426A[P].2011-09-07.ZHAO W Q,Y J M,Q L R. Confocal interference fixed focal length and curvature radius measuring method:China, CN102175426A[P].2011-09-07. (in Chinese)

Views

715

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Establishment of optical measuring system for blades edges

Thickness measurement of rotary parts with double laser under unknown relative position condition

Detection of wheel-set size of rail vehicle using double 2D laser displacement sensors based on point cloud data registration in frequency domain

High accuracy detection algorithm for eccentric signal of grinding wheel

Non-contact measurement for liquid refractive index in a closed pipe

Related Author

Chao BI

Jian-guo FANG

Ting-ting SONG

Long-xiang BAO

Jun WANG

Jia-fu LI

Xiao-lin ZHANG

Hua WANG

Related Institution

Aviation Key Laboratory of Science and Technology on Precision Manufacturing Technology, Beijing Precision Engineering Institute for Aircraft Industry

Rizhao Polytechnic

School of Electrical Engineering and Automation, Harbin Institude of Technology

School of Mechatronic Engineering, Changchun University of Technology

School of Mechatronic Engineering, Changchun Institute of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰