X-Ray Anormalous Surface Scattering on Optical Surface

MENG Yan-li; LI Da; CHEN Bo

doi:10.3788/OPE.20132102.0253

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X-Ray Anormalous Surface Scattering on Optical Surface

Article | 更新时间：2020-08-12

- X-Ray Anormalous Surface Scattering on Optical Surface
- Optics and Precision Engineering Vol. 21, Issue 2, Pages: 253-259(2013)
- 作者机构：
  
  东北师范大学物理学院2. 中国科学院长春光学精密机械与物理研究所3. 中国科学院大学
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China
- DOI：10.3788/OPE.20132102.0253
  CLC： O436.1;O434.19
- Received：03 February 2012，
  
  Revised：26 March 2012，
  
  Published Online：23 February 2013，
  
  Published：15 February 2013
- 稿件说明：
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孟艳丽李达陈波. 光学表面X射线异常散射现象[J]. 光学精密工程, 2013,21(2): 253-259

MENG Yan-li LI Da CHEN Bo. X-Ray Anormalous Surface Scattering on Optical Surface[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 253-259
孟艳丽李达陈波. 光学表面X射线异常散射现象[J]. 光学精密工程, 2013,21(2): 253-259 DOI： 10.3788/OPE.20132102.0253.

MENG Yan-li LI Da CHEN Bo. X-Ray Anormalous Surface Scattering on Optical Surface[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 253-259 DOI： 10.3788/OPE.20132102.0253.

摘要

研究了用掠入射散射法测量光学表面散射分布实验中存在的异常散射现象。首先

介绍了实验装置，并用原子力显微镜(AFM)测量了样品的表面粗糙度

给出了工作波长为0.154 nm时不同样品在不同掠入射角下的表面散射分布。然后

分析了异常散射角与临界角的关系。最后

对影响散射强度的因素进行了分析。实验结果表明：当掠入射角大于临界角时能观测到光学表面的异常散射现象。在波长一定的情况下，异常散射角与样品材料有关，与掠入射角和表面粗糙度无关；异常散射角略小于临界角，误差变化为-8.6%~-0.9%。另外，镜像反射强度随着入射角和表面粗糙度的增大而迅速减弱，但异常散射强度与镜像反射强度的比值（峰值比）反而随着掠入射角或表面粗糙度的增大而增大，其比值在0.012~2.667变化。结果证明样品的材料和表面形貌是影响异常散射分布的两个重要因素。

Abstract

An Anomalous Surface Scattering (ASS) phenomenon was researched during the measurement of surface roughnesses for a smooth surface by a grazing X-ray scattering method. Firstly

an experimental facility based on an X-ray diffractometer were introduced. Several kinds of samples with different surface roughnesses were measured by an Atomic Force Microscope(AFM) and their surface scattering distributions in different grazing incident angles were given at working wavelength of 0.154 nm. Then

the relationship between anomalous scattering angles and critical angle was analyzed. Finally

the factors affecting on the scattering intensity were studied. Experimental results indicate that ASS can be observed when the grazing angle is larger than the critical angle. The anomalous scattering angle is related to the sample materials when incidence wavelength is a constant and it changes slightly with the grazing angle and surface roughness(Root Mean Square (RMS)). Moreover

all the measured anomalous scattering angles are slightly smaller than the nominal critical angle values of Si

fused quartz

Ni and Au respectively

and the measurement errors range from -8.6% to -0.9%. On the other hand

the equiangular reflection intensity is reduced obviously as the increasing of the grazing angle and surface roughness

whereas the intensity of ASS radiation is apt to increase instead of being weakened and the ratio of ASS peak intensity to equiangular reflection peak intensity ranges from 0.012 to 2.667. These results prove that sample materials and surface roughness are two principal factors affecting on ASS radiation distribution.

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Keywords

references

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