Design of laser parallel confocal measurement system with single source and dual beam paths

YU Qing; YU Xiao-fen; CUI Chang-cai

doi:10.3788/OPE.20132102.0281

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Design of laser parallel confocal measurement system with single source and dual beam paths

Article | 更新时间：2020-08-12

- Design of laser parallel confocal measurement system with single source and dual beam paths
- Optics and Precision Engineering Vol. 21, Issue 2, Pages: 281-286(2013)
- 作者机构：
  
  华侨大学机电及自动化学院2. 合肥工业大学仪器科学与光电工程学院
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132102.0281
  CLC： TH703;TN247
- Received：11 September 2012，
  
  Revised：12 October 2012，
  
  Published Online：23 February 2013，
  
  Published：15 February 2013
- 稿件说明：
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余卿余晓芬崔长彩. 单光源双光路激光并行共焦测量系统设计[J]. 光学精密工程, 2013,21(2): 281-286

YU Qing YU Xiao-fen CUI Chang-cai. Design of laser parallel confocal measurement system with single source and dual beam paths[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 281-286
余卿余晓芬崔长彩. 单光源双光路激光并行共焦测量系统设计[J]. 光学精密工程, 2013,21(2): 281-286 DOI： 10.3788/OPE.20132102.0281.

YU Qing YU Xiao-fen CUI Chang-cai. Design of laser parallel confocal measurement system with single source and dual beam paths[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 281-286 DOI： 10.3788/OPE.20132102.0281.

摘要

针对传统激光并行共焦测量过程中存在的泰伯效应，提出将数字微镜器件（DMD）引入激光并行共焦测量系统来正确辨识正焦面的位置。采用了DMD作为光分束器件，从理论上验证了它是一种投影式的阵列光源，对激光分束后不会在光路方向上产生泰伯像;同时，考虑DMD不能对分束后的光线产生会聚作用，并非高效的并行光源分束器件，本文将DMD与微透镜阵列(MLA)结合构建了单光源双光路并行共焦测量系统。该系统利用DMD光路探测正焦面位置，利用微透镜阵列光路进行精确的共焦测量。实验结果表明，两种光路下的正焦面位置仅相差2 μm，在一个泰伯间距范围之内，可以较好地克服泰伯效应对激光并行共焦测量的影响，进而保证较高精度的并行共焦测量。

Abstract

To avoid the Talbot effect that is a multiple imaging in the traditional laser parallel confocal measurement

this paper introduces a Digital Micromirror Device(DMD) into the laser parallel confocal measurement to recognize the in-focus image. By taking the DMD as an optical splitting system

it is verified to be a flexible array source

and can not bring Talbot effect into the measurement system. However

the DMD is not an effectual splitting source as it can not converge the split ray effectively. Based on the characteristics of DMD

a laser parallel confocal measurement system with a single source and dual beam paths is constructed by combining a DMD and a Microlens Array(MLA). In this system

the position of in-focus image can be distinguished with the beam path of DMD and the high precision measurement can be completed with the beam path of MLA. The theoretical analysis and the experiment results indicate that the difference between the positions of in-focus images under two kinds of optical detection paths is about 2 μm. Moreover

the influence of Talbot effect on the laser parallel confocal measurement becomes weaker

and the parallel confocal measurement with high precision is achieved.

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references

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