Laser scattering of rough surfaces generated by superposition of periodic and random processes

WU Yao-jun; WANG Qun-shu; YE Xi-sheng; TANG CHUAN-xiang; LIN Xin-wei; WU Li-Xiong

doi:10.3788/OPE.20132103.0546

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Laser scattering of rough surfaces generated by superposition of periodic and random processes

更新时间：2020-08-12

- Laser scattering of rough surfaces generated by superposition of periodic and random processes
- Optics and Precision Engineering Vol. 21, Issue 3, Pages: 546-553(2013)
- 作者机构：
  
  清华大学工程物理系2. 西北核技术研究所激光与物质相互作用国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132103.0546
  CLC： O436.2
- Received：27 September 2012，
  
  Revised：24 October 2012，
  
  Published Online：20 March 2013，
  
  Published：15 March 2013
- 稿件说明：
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吴耀军王群书叶锡生唐传祥林新伟吴丽雄. 周期和随机分量叠加而成粗糙表面的激光散射[J]. 光学精密工程, 2013,21(3): 546-553

WU Yao-jun WANG Qun-shu YE Xi-sheng TANG CHUAN-xiang LIN Xin-wei WU Li-Xiong. Laser scattering of rough surfaces generated by superposition of periodic and random processes[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 546-553
吴耀军王群书叶锡生唐传祥林新伟吴丽雄. 周期和随机分量叠加而成粗糙表面的激光散射[J]. 光学精密工程, 2013,21(3): 546-553 DOI： 10.3788/OPE.20132103.0546.

WU Yao-jun WANG Qun-shu YE Xi-sheng TANG CHUAN-xiang LIN Xin-wei WU Li-Xiong. Laser scattering of rough surfaces generated by superposition of periodic and random processes[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 546-553 DOI： 10.3788/OPE.20132103.0546.

摘要

The characteristics of laser scattering of rough surfaces composed of periodical and random components generated by mechanical machining were researched. Based on the HelmholtzKirchhoff integration theorem and some statistic theories

the formula for calculating the scattering field distribution in the space of rough surfaces was derived. According to the derived formula

the scattering coefficients of rough surfaces with different amplitudes of the periodic component and different roughnesses of the random component were obtained. Meanwhile

the spatial distribution characteristics of the scattering field and its formation were analyzed. The experiments show when the roughness of random component is far less than the laser wavelength

the number of the diffraction fringes augment with the increase of the amplitude of the periodic component. While the roughness of random component is comparable with the magnitude of the laser wavelength

the amplitude of the periodic component has a little effect on the scattering field distribution within the range of laser wavelength and the diffraction fringes are disappear. In this circumstance

the scattering field distribution in the space is considered to be modulated by changing the amplitude of the periodic component.

Abstract

研究了机械加工时由周期分量和随机分量叠加形成的粗糙表面的激光散射特性。基于HelmholtzKirchhoff积分定理并结合统计学相关理论，推导得到了上述粗糙表面的散射场强空间分布理论计算公式。根据推导得到的计算公式，计算了不同周期振幅和不同随机粗糙度情况下的散射场强空间分布，并分析了散射场空间分布的特征和形成原因。理论计算结果表明：在随机性粗糙度远小于激光波长时，周期振幅越大，散射场空间分布的衍射条纹现象越明显；而在随机性粗糙度和激光波长可比拟时，周期振幅在波长范围内的变化对散射场空间分布特征影响较小，不再有衍射条纹出现。在这种情况下，周期振幅的变化所产生的效果相当于是对散射场空间分布进行了调制。

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references

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