Design and control of miniature piezoelectric actuator based on strain gauge sensor

WANG Geng; GUANG Chun-lin; ZHANG Xiao-jun; ZHOU Hong; RAO Chang-hui

doi:10.3788/OPE.20132103.0709

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Design and control of miniature piezoelectric actuator based on strain gauge sensor

更新时间：2020-08-12

- Design and control of miniature piezoelectric actuator based on strain gauge sensor
- Optics and Precision Engineering Vol. 21, Issue 3, Pages: 709-716(2013)
- 作者机构：
  
  中国科学院光电技术研究所2. 中国科学院自适应光学重点实验室3. 中国科学院大学
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132103.0709
  CLC： TN384;TP273
- Received：21 September 2012，
  
  Revised：19 November 2012，
  
  Published Online：20 March 2013，
  
  Published：15 March 2013
- 稿件说明：
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王耿官春林张小军周虹饶长辉. 应变式微型精密压电驱动器的一体化设计及其PID控制[J]. 光学精密工程, 2013,21(3): 709-716

WANG Geng GUANG Chun-lin ZHANG Xiao-jun ZHOU Hong RAO Chang-hui. Design and control of miniature piezoelectric actuator based on strain gauge sensor[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 709-716
王耿官春林张小军周虹饶长辉. 应变式微型精密压电驱动器的一体化设计及其PID控制[J]. 光学精密工程, 2013,21(3): 709-716 DOI： 10.3788/OPE.20132103.0709.

WANG Geng GUANG Chun-lin ZHANG Xiao-jun ZHOU Hong RAO Chang-hui. Design and control of miniature piezoelectric actuator based on strain gauge sensor[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 709-716 DOI： 10.3788/OPE.20132103.0709.

摘要

基于有限元分析设计了一种利用应变片进行位移反馈的微型精密压电驱动器。该驱动器采用位移放大机构对微小应变进行放大，通过测量应变电桥的输出间接地测量出驱动器的微小位移。标定实验显示该传感器的精度为80 nm。虽然该应变反馈式压电驱动器是一种含有迟滞特性的复杂受控对象，但是在准静态条件下PID算法可以对其进行有效的闭环控制。分别进行了准静态的定位实验和跟踪实验，结果表明，PID控制算法对本驱动器的控制效果比较理想。在定位试验中，定位效果与开环相比有明显提高，定位误差不超过0.059 m；单频正弦信号跟踪误差不超过0.085 m；多频正弦信号跟踪误差不超过0.092 m。实验证明了该方法在准静态条件下的有效性。

Abstract

A kind of miniature precise piezoelectric actuator with strain gauges is designed. The actuator uses a displacement-amplified mechanism to amplify the small strain and measure the output change of the wheat-stone bridge composed of strain gauges to obtain the displacement output indirectly. The experiments show that the accuracy of the actuator is 80 nm. Due to the complex hysteresis characteristics

it is very difficult to control this actuator. However

PID control algorithm is suitable for control of this actuator effectively in the closed loop. A position test and a tracking test at the quasi-static condition are performed to verify the performance of the actuator. Experimental results show that the control performance of the PID control algorithm is good for this actuator. It has effective positioning performance

the positioning error does not exceed 0.059 m; the maximum tracking errors for single-frequency signal and multi-frequency signal do not exceed 0.085 m and 0.092 m

respectively. These results prove the validity of the control algorithm in the quasi-static condition.

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Keywords

references

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