Passive micro-valve based on SU-8

ZHANG Cong-chun; GUO Tai; DING Gui-fu

doi:10.3788/OPE.20132104.1011

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Passive micro-valve based on SU-8

更新时间：2020-08-12

- Passive micro-valve based on SU-8
- Optics and Precision Engineering Vol. 21, Issue 4, Pages: 1011-1016(2013)
- 作者机构：
  
  上海交通大学微纳科学技术研究院微米/纳米加工技术重点实验室
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132104.1011
  CLC： TH134.1
- Received：24 October 2012，
  
  Revised：10 December 2012，
  
  Published Online：20 April 2013，
  
  Published：15 April 2013
- 稿件说明：
移动端阅览
张丛春郭泰丁桂甫. 基于SU-8胶的新型被动式微型阀[J]. 光学精密工程, 2013,21(4): 1011-1016

ZHANG Cong-chun GUO Tai DING Gui-fu. Passive micro-valve based on SU-8[J]. Editorial Office of Optics and Precision Engineering, 2013,21(4): 1011-1016
张丛春郭泰丁桂甫. 基于SU-8胶的新型被动式微型阀[J]. 光学精密工程, 2013,21(4): 1011-1016 DOI： 10.3788/OPE.20132104.1011.

ZHANG Cong-chun GUO Tai DING Gui-fu. Passive micro-valve based on SU-8[J]. Editorial Office of Optics and Precision Engineering, 2013,21(4): 1011-1016 DOI： 10.3788/OPE.20132104.1011.

摘要

为了在微流体控制系统中实现对流体流速的控制和流体的单向流动，借鉴人体心脏瓣膜的结构，设计了新型被动式微阀。选用SU-8作为被动式微型阀的结构材料，用ANSYS仿真了不同厚度（10，15，20 m）的阀门膜片在不同压力作用下的挠度与应力，进而确定了合适的阀门膜片厚度。利用微细加工技术，集成加工了微型阀，并由此确定和优化了微型阀的加工工艺。用去离子水作为介质测试了微型阀的过流特性，在正向压力为11.7 kPa的压力作用下，测得A、B型被动式微阀的正向流速分别为1.66 ml/min和1.35 ml/min。对测试数据的分析表明，设计的微型阀有线性控制的潜能。以SU-8胶作为结构材料的微型阀不仅性能较好，同时具有生物兼容性，可扩展微型阀的应用范围。

Abstract

To control the velocity and one-way flow of fluid in a micro-fluidic system

a novel passive micro-valve was designed base on Micro-electrical-mechanical System(MEMS) technology. By drawing lessons from a human heart valve structure

the deflections and stresses of a valve membrane under different pressures were analyzed with ANSYS by using SU-8 as the passive micro-valve structural materials

then the thickness of the valve membrane was optimized. The valve was fabricated with integrated processing of MEMS technique

so that the process technology for the valve membrane was determined. The performance of the passive valve was tested using deionized water as media and the forward flow velocities obtained are 1.66 ml/min for type A and 1.35 ml/min for type B under a forward pressure of 11.7 kPa. The tested analyzing data indicate that the designed passive valve has the potentiality of linear control

which means that the passive micro-valve made by SU-8 has not only better performance but also better bio-compatibility and can extend the applications of passive micro-valves.

关键词

Keywords

references

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