CHARITIDIS C A. Nanomechanical and nanotribological properties of carbon-based thin films: A review [J]. International Journal of Refractory Metals & Hard Materials, 2010, 28(1):51-70.[2]ROBERTSON J. Diamond-like amorphous carbon [J]. Materials Science and Engineering R, 2002, 37(4-6):129-131.[3]FUJIMTO A, OKADA M. Thermal durability of diamond like carbon films containing tungsten fabricated [J]. Japanese Journal of Applied Physics, 2012, 51: 06FD07-1-5.[4]J H ZHENG, M KATO, K NAKASA. Effect of intermediate layer on wear-delaminating life of low-frictional SiC-2.6mass% Ti film sputter-deposited on titanium substrate [J]. Surface & Coatings Technology, 2010, 205(7):2532-2537.[5]孙丽丽,代伟,张栋，等.Cr掺杂及Cr过渡层对类金刚石薄膜附着力的影响[J].中国表面工程,2010,23(4):26-34.SHUN L L, DAI W, ZHANG D,et al.. The effect of Cr-doped and Cr interlayer on adhesive strength of diamond-like carbon films [J]. China surface engineering, 2010, 23(4):26-34. (in Chinese)[6]王云峰. 复合类金刚石薄膜的制备及摩擦性能研究[D].兰州:兰州大学研究生论文，2012,6.WANG Y F. A Study on Preparation and Tribological Properties of Composite DLC Films [D]. Lanzhou：Lanzhou University graduate thesis, 2012,6. (in Chinese)[7]杨发展，沈丽如，高翠,等.316不锈钢表面沉积厚类金刚石膜层的性能研究[J].功能材料，2012，43(15):1994-1997.YANG F Z, SHENG L R, GAO C, et al.. Properties of diamond-like carbon films were deposited on 316 stainless?steel [J]. Journal of Functional Materials, 2012, 43(15):1994-1997. (in Chinese)[8]DENG J G, BRAUN M. Residual stress and microhardness of DLC multilayer coatings [J]. Diamond and Related Materials, 1996, 5 (3): 478-482.[9]MA F, LI G. Diamond-like Carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique [J]. Materials Letters, 2002, 57(1): 82-86.[10]ENDO K, TATSUMI T. Deposition of silicon dioxide films on amorphous carbon films by plasma enhanced chemical vapor deposition for low dielectric constant interlayer dielectrics [J]. Applied Physics Letters, 1997, 70(9):1078- 1079.[11]足立雄介, 青木佑一, 大竹尚登.オイル潤滑下でのセグメント構造DLC膜のトライボロジー特性評価 [J]. 日本機械学会論文集(C編),2007,74(737):169-173.ADACHI Y, AOKI Y, OHTAKE N. Tribological characterizations of DLC film with segment structure under oil lubrication [J]. Transactions of the Japan Society of Mechanical Engineers, Ser. C, 2007, 74(737):169-173. (in Japanese)[12]JIA Z, XIA Y, PANG X. Tribological behaviors of different Diamond-like carbon coatings on nitrided mild steel lubricated with benzotriazole-containing borate esters [J]. Tribology Letters, 2011,41(1):247-256.[13]黄立业,徐可为.类金刚石碳膜在纳米划擦过程中的弹一塑性变形及断裂机制分析[J].金属学报,2001, 37(17):733-736.HUANG L Y, XU K W. Elasto-plastic deformation and fracture mechanism analysis of Diamond-like carbon film in Nano-scratch [J]. Acia Metallurgica Sinica, 2001,37(17):733-736. (in Chinese)[14]ZHENG J H, CHEN Y. A study on interface strength of a-Si:H-DLC film [J]. Advanced Materials Research, 2011, 179-180:775-780.[15]郑锦华.高界面强度类金刚石薄膜材料的常温沉积设备 [P].专利号:ZL 2010 2 0673327.2，2011.ZHENG J H. Deposition equipment of DLC films with high interfacial strength at room temperature [P]. Patent No. ZL 2010 2 0673327.2，2011. (in Chinese)[16]郑锦华.高界面强度类金刚石薄膜材料的常温沉积设备及其方法.中国,ZL 2010 1 0599609[P].2012-07.ZHENG J H. Deposition equipment and method of DLC films with high interfacial strength at room temperature. China:ZL 2010 1 0599609[P].2012-07. (in Chinese)[17]廖家轩，夏立芳，孙跃.氮和碳等离子体基离子注入铝合金表面氮化铝/类金刚石碳改性层的摩擦学特性[J].摩擦学学报，2001，21(5): 324-329.LIAO J X, XIA L F, SUN Y. The tribological properties of AlN/DLC modified layer on 2024 aluminum alloy implanted with nitrogen and carbon by plasma based ion implantation[J]. Tribology, 2001, 21(5): 324-329. (in Chinese)