Pre-control of mechanical scratching diffractive grating

ZHANG Bao-qing; SHI Guo-quan; SHI Guang-feng; CAI Hong-bin; ZHANG Shan-wen

doi:10.3788/OPE.20132107.1666

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Pre-control of mechanical scratching diffractive grating

更新时间：2020-08-12

- Pre-control of mechanical scratching diffractive grating
- Optics and Precision Engineering Vol. 21, Issue 7, Pages: 1666-1675(2013)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 长春理工大学机电工程学院,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132107.1666
  CLC： O436.1;TN305
- Received：13 November 2012，
  
  Revised：22 March 2013，
  
  Published Online：15 July 2013，
  
  Published：15 July 2013
- 稿件说明：
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张宝庆史国权石广丰蔡洪彬张善文. 衍射光栅机械刻划成槽的预控试验[J]. 光学精密工程, 2013,21(7): 1666-1675

. Pre-control of mechanical scratching diffractive grating[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1666-1675
张宝庆史国权石广丰蔡洪彬张善文. 衍射光栅机械刻划成槽的预控试验[J]. 光学精密工程, 2013,21(7): 1666-1675 DOI： 10.3788/OPE.20132107.1666.

. Pre-control of mechanical scratching diffractive grating[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1666-1675 DOI： 10.3788/OPE.20132107.1666.

摘要

由于目前机械刻划衍射光栅加工仍依赖操作者经验

故存在成槽质量差、无法预控等问题。本文结合铝薄膜蒸镀工艺现状，采用X射线衍射法（XRD）、扫描电子显微镜法（SEM）及纳米压痕实验揭示不同薄膜样本的微观结构与力学属性，提出了制作衍射光栅的薄膜分类试刻法。研究结果表明，光栅刻划过程可近似等效为楔体下压过程，对低弹性模量类薄膜，可采用滑移线场进行解析求解并一次试刻成槽；对弹塑性类薄膜，可采用有限元模拟实验进行成槽预控。该方法可预先对薄膜甄别分类，用不同的计算方法确定不同种类薄膜的工装参数，进而刻划出近乎完美的槽形；同时减少了试验刻划耗时与浪费

提高了成槽质量与刻划效率；为刻划更加精密的光栅奠定了基础。

Abstract

As the mechanical scratching of diffraction gratings still depends on the experiences of operators

it gives poor grooved quality and can not be precontrolled. This paper proposes a diffraction grating production method: film classification test engraving method based on an aluminum thin film deposition process status quo

and reveals the microstructure and mechanical properties of different thin film samples based on Xray Diffraction(XRD)

Scanning Electron Microscope (SEM) and nanoindentation experiments. The study results show that the grating ruling can be approximately equivalent to a wedge under the pressure of the process

so that the slipline field can be used to obtain the solution analytically and carve the slot on time trial for the low elastic modulus class film. Moreover

the finite element simulation can be used to precontrol the slot for elastoplastic class. The method can implement the preclassification of the films， and can determine the tool processing parameters for different types of films with different methods. Futhermore

a nearperfect trough is scratched. Experiments show that the timeconsuming and preengraving test times are reduced and the graving quality and efficiency are improved. The method lays the foundation for improving the characteristics of more sophisticated gratings.

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references

王芳,齐向东.高精度控制光电光栅刻划机的光栅外差干涉仪[J]. 激光技术,2008,32(5):474-476.WANG F,QI X D. High-precision control of a photoelectric grating ruling machine grating heterodyne interferometer [J]. Laser Technology，2008,32(5):474-476.（in Chinese）[2]巴音贺希格,高键翔,齐向东.10.6 m激光器一级输出高衍射效率闪耀光栅的研制[J]. 光电子激光,2004,15(10):1137-1140. BAYHXG,GAO J X,QI X D. 10.6 m laser level output high diffraction efficiency blazed grating developed [J]. OptoelectronicsLaser,2004,15(10):1137-1140.（in Chinese）[3]时轮，郝德阜，齐向东．高精度衍射光栅刻划机的最新技术进展[J]．仪器仪表学报，2001，22(4)：438-439．SHI L,HAO D F,QI X D. Latest technological advances in high-precision diffraction grating ruling machine[J]．Chinese Journal of Scientific Instrument，2001，22(4)：438-439．（in Chinese）[4]李英海,巴音贺希格,齐向东.用于衍射光栅刻划的超精密金刚石刻刀的研制[J]. 微细加工技术,2006,12:15-17.LI Y H, BAYHXG, QI X D. Development of ultra-precision diamond graver for the diffraction grating ruling[J]. Microfabrication Technology,2006,12:15-17．（in Chinese）[5]李英海.超精密金刚石刀具衍射光栅刻划刀[J]. 光学精密工程, 1996,4(3): 81-84.LI Y H. Ultra-precision diamond toolsthe diffraction grating characterize knife[J]. Opt. Precision Eng.,1996,4(3): 81-84.（in Chinese）[6]BAUMBACH T, LBBERT D, GAILHANOU M. Strain relaxation in surface nano-structures studied by X-ray diffraction methods[J]. Materials Science and Engineering, 2000, B69-70: 392-396.[7]石广丰，史国权,徐志伟，等. 中阶梯光栅铝膜的大压深纳米压痕试验[J]. 机械工程学报,2012，48（20）：26-44.SHI G F,SHI G Q, XU ZH W, et al.. The echelle aluminum pressure deep nanoindentation test[J]. Journal of Mechanical Engineering,2012，48（20）：26-44.（in Chinese）[8]OLIVER W C, PHARRR G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments [J]. J. Mater Res., 1992, 7(6): 1564-1583.[9]蔡洪彬.尖劈刀刻划衍射光栅的槽形控制研究[D].长春：长春理工大学，2013.CAI H B. The tip Pidao characterization of the diffraction grating trough control study [D]. Changchun: Changchun University of Science and Technology, 2013.（in Chinese）[10]石广丰，史国权，张垒垒，等. 衍射光栅机械刻划过程的有限元仿真分析[J]. 计算机仿真，2012，29（5）：103-106.SHI G F,SHI G Q, ZHANG L L， et al.. Finite element simulation analysis of the diffraction grating mechanical scratching process[J]. Computer Simulation，2012，29（5）：103-106.（in Chinese）[11]史国权，倪坤，宋林森，等. 基于有限元与正交试验法的机械刻划光栅研究[J]. 机械设计与研究,2011，27（1）：80-82.SHI G Q,NI K,SONG L S, et al.. Based on mechanical finite element and orthogonal experiment method ruled gratings[J]. Machine Design and Research, 2011，27（1）：80-82.（in Chinese）

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