Modeling of sensing interface for micromachined gyroscope and its front-end optimization

ZHAO Yang; QIU An-ping; SHI Qin; ZHAO Jian

doi:10.3788/OPE.20132107.1734

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Modeling of sensing interface for micromachined gyroscope and its front-end optimization

更新时间：2020-08-12

- Modeling of sensing interface for micromachined gyroscope and its front-end optimization
- Optics and Precision Engineering Vol. 21, Issue 7, Pages: 1734-1740(2013)
- 作者机构：
  
  南京理工大学 MEMS惯性技术研究中心,江苏南京,210094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132107.1734
  CLC： V666.123;TH824
- Received：24 December 2012，
  
  Revised：25 February 2013，
  
  Published Online：15 July 2013，
  
  Published：15 July 2013
- 稿件说明：
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赵阳裘安萍施芹赵健. 微机械陀螺检测接口建模及前置放大器优化[J]. 光学精密工程, 2013,21(7): 1734-1740

. Modeling of sensing interface for micromachined gyroscope and its front-end optimization[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1734-1740
赵阳裘安萍施芹赵健. 微机械陀螺检测接口建模及前置放大器优化[J]. 光学精密工程, 2013,21(7): 1734-1740 DOI： 10.3788/OPE.20132107.1734.

. Modeling of sensing interface for micromachined gyroscope and its front-end optimization[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1734-1740 DOI： 10.3788/OPE.20132107.1734.

摘要

为了进一步提高微机械陀螺的极限分辨率，建立了基于SOI工艺的微机械陀螺的检测接口模型，并设计了与之相匹配的前置接口放大器。首先，根据陀螺表头的实际结构建立了微机械陀螺表头的RC集总参数模型和微机械陀螺检测接口的噪声模型，分析了检测接口主导噪声源及提高极限分辨率的措施。然后，在跨阻式前置放大器的基础上设计了改进的与检测接口匹配的T型前置放大器。实验结果表明：相比于跨阻式前置放大器，采用改进的T型前置放大器的等效噪声输入电流由1.18 pA/Hz降低至0.27 pA/Hz，对应的电容极限分辨率可达到0.62 aF/Hz。结果显示，采用与检测接口匹配的T型前置放大器提高了微机械陀螺的极限分辨率。

Abstract

To improve the resolving limit of a micromachined gyroscope

a sensing interface model for the micromachined gyroscope fabricated by Silicon on Insulator(SOI) process was established

and a matching front-end was designed. Firstly

a RC lumped parameter model for the gyroscope was established based on the practical gyroscope structure

then a noise model for the sensing interface was built. The dominant noise source and methods to improve the resolving limit were analyzed. Finally

on the foundation of a TIA front-end

an improved T-network front-end was designed to match the sensing interface. Experimental results indicate that the T-network front-end improves the sensing interface equivalent input noise current from 1.18 pA/Hz to 0.27 pA/Hz

corresponding to a capacitive resolution of 0.62 aF/Hz as compared to those of the transimpedance front-end. It suggests that the improved T-network front-end can reach a better resolution.

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Keywords

references

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