Nonlinear Least-Squares Fitting Polarization Calibration of Stokes Ellipsometer

HOU Jun-feng; WANG Dong-guang; DENG Yuan-yong; ZHANG Zhi-yong; SUN Ying-zi

doi:10.3788/OPE.20132108.1914

您当前的位置：

首页 >

文章列表页 >

Nonlinear Least-Squares Fitting Polarization Calibration of Stokes Ellipsometer

更新时间：2020-08-12

- Nonlinear Least-Squares Fitting Polarization Calibration of Stokes Ellipsometer
- Optics and Precision Engineering Vol. 21, Issue 8, Pages: 1915-1922(2013)
- 作者机构：
  
  1. Tokyo,Japan,182-8585
  2. 中国科学院国家天文台中国科学院太阳活动重点实验室，北京&nbsp
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132108.1914
  CLC： TH744.2
- Received：21 March 2013，
  
  Revised：06 May 2013，
  
  Published Online：20 August 2013，
  
  Published：15 August 2013
- 稿件说明：
移动端阅览
侯俊峰王东光邓元勇张志勇孙英姿. 斯托克斯椭偏仪的非线性最小二乘拟合偏振定标[J]. 光学精密工程, 2013,21(8): 1915-1922

HOU Jun-feng WANG Dong-guang DENG Yuan-yong ZHANG Zhi-yong SUN Ying-zi. Nonlinear Least-Squares Fitting Polarization Calibration of Stokes Ellipsometer[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 1915-1922
侯俊峰王东光邓元勇张志勇孙英姿. 斯托克斯椭偏仪的非线性最小二乘拟合偏振定标[J]. 光学精密工程, 2013,21(8): 1915-1922 DOI： 10.3788/OPE.20132108.1914.

HOU Jun-feng WANG Dong-guang DENG Yuan-yong ZHANG Zhi-yong SUN Ying-zi. Nonlinear Least-Squares Fitting Polarization Calibration of Stokes Ellipsometer[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 1915-1922 DOI： 10.3788/OPE.20132108.1914.

摘要

由于传统的斯托克斯椭偏仪定标方法中入射光源的偏振效应、定标单元中光学元件的制造与装调误差都会降低仪器矩阵的定标精度，从而影响偏振态的测量精度，本文提出了基于非线性最小二乘拟合算法的仪器矩阵偏振定标方法。该方法将描述定标单元的参量和仪器矩阵的所有矩阵元一起作为未知参数，根据偏振光学传输理论建立探测光强与未知参数的函数关系式；然后

基于非线性最小二乘拟合方法拟合实际探测光强随定标单元方位角的变化曲线，进而得到斯托克斯椭偏仪的仪器矩阵。实验中使用该方法和传统方法在500~700 nm波段分别定标了KD*P型斯托克斯椭偏仪的仪器矩阵。结果显示，新方法在500~600 nm波段获得的斯托克斯参数的总均方根(RMS)偏差为1.6%，较传统定标方法提高约0.5%；波长大于600 nm时，由于系统信噪比降低使得新方法的测量精度降为2.4%，但仍然远高于传统方法的测量精度。结果表明，提出的方法简单易行，适用于各种斯托克斯椭偏仪的仪器矩阵定标。

Abstract

Traditional calibration methods for a Stokes ellipsometer will reduce the calibration accuracy of instrument matrix and effect the measuring accuracy of a polarization state

due to the polarization effect of incident light and the imperfect optical elements in a calibration unit. To measure precisely the instrument matrix of the Stokes ellipsometer

a calibration method was proposed based on the nonlinear least-square fitting method. By taking error sources mentioned above and instrument matrix together as unknown parameters

the function formula between detector intensity and unknown parameters was established based on the Mueller matrix theory. Then nonlinear least-square fitting method was used to fit the detecting intensity curves changed with the azimuth of calibration units and to calculate the instrument matrix of Stokes ellipsometer. The new method and traditional methods were used to calibrate the instrument matrix at 500-700 nm

and it is shown that the total Root Mean Square (RMS) of the Stokes parameter by the proposed method is 1.6% in 500-600 nm

about 0.5% less than that of traditional methods. Moreover

when wavelength is larger than 600 nm

the RMS drops to 2.4%

but it still is far less than that of traditional methods. In conclusions

the method is easily feasible and is suitable for the calibration of instrument matrix for various Stokes ellipsometers.

关键词

Keywords

references

［1］AZZAM R M A. Divisionofamplitude photopolarimeter(DOAP) for the simultaneous measurement of all four Stokes parameters of light ［J］. Opt. Acta, 1982, 29(5):685689.［2］WANG D G, AI G X, SUN C H, et al.. Optical design of polarimeter for space solar telescope ［J］. SPIE, 2000, 4013:616624.［3］WANG D G, DENG Y Y, AI G X. Analysis of a new polarimeter for space solar telescope［J］. SPIE, 2002, 4843:406413..［4］张志勇,邓元勇,王东光,等. 基于液晶波片的近红外偏振分析器［J］.中国激光,2010,37(3):696702.ZHANG ZH Y, DENG Y Y, WANG D G, et al.. Near infrared polarimeter based on liquid crystal variable retardes［J］.Chinese Journal of Lasers,2010,37(3):696702. (in Chinese) ［5］林元章. 太阳物理导论［M］.北京:科学出版社,2000.LIN Y ZH. Introduction to Solar Physics［M］. Beijing: Science Press, 2000. (in Chinese) ［6］KEIL S, RIMMELE T, KELLER C, et al.. Design and development of the advanced technology solar telescope［J］. Astron. Nachr., 2003, 324:303307.［7］DENG Y Y, ZHANG H Q. Progress in space solar telescope ［J］. Sci. China Ser. G, 2009, 52(11):16551659.［8］LIU ZH, DENG Y Y, JI H SH, et al.. Groundbased giant solar telescope of China［J］. Sci. SinPhys. Mech. Astron., 2012, 42(12): 12821291.［9］AZZAM R M A, LOPEZ A G. Accurate calibration of the fourdetector photopolarimeter with imperfect polarizing optical elements ［J］. Opt. Soc. Am. A, 1989,6(10):15131521.［10］KRISHNAN S. Calibration, properties, and application of the divisionofamplitude photopolarimeter at 632.8 nm and 1 523 nm ［J］. J.Opt.Soc.Am.A,1992,9(9):16151622.［11］王勇辉,郑春龙,赵振堂.基于斯托克斯椭偏测量系统的多点定标法［J］.中国激光,2012,39(11):1108013.WANG Y H, ZHENG CH L, ZHAO ZH T.Multipoint calibration method based on Stokes ellipsometry system［J］.Chinese Journal of Lasers,2012,39(11):1108013. (in Chinese)［12］宋茂新,孙斌,孙晓兵,等.航空多角度偏振辐射计的偏振定标［J］.光学精密工程,2012,20(6):11531158.SONG M X, SUN B, SUN X B, et al..Polarization calibration of airborne mutiangle polarimetric radiometer ［J］.Opt. Precision Eng., 2012, 20(6):11531158. (in Chinese)［13］廖延彪.偏振光学［M］.北京：科学出版社，2003.LIAO Y B. Polarization of Optics［M］. Beijing:Science Press, 2003. (in Chinese)

Views

106

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Polarization calibration of airborne muti-angle polarimetric radiometer

The Tracking and Guiding Method for Full Solar Disk Image Using Large CCD-Array

Related Author

SONG Mao-xin

SUN Bin

SUN Xiao-bing

HONG Jin

肖江

胡柯良

林佳本

申基

Related Institution

Center for Remote Sensing, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

中国科学院国家天文台

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰