Design of diffraction blazed concave grating by partitioned space calculated method

TAN Xin; Shen Chen; WU Na; ZHANG Fang-cheng; Bayanheshige

doi:10.3788/OPE.20132109.2303

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Design of diffraction blazed concave grating by partitioned space calculated method

更新时间：2020-08-12

- Design of diffraction blazed concave grating by partitioned space calculated method
- Optics and Precision Engineering Vol. 21, Issue 9, Pages: 2303-2308(2013)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学，北京 100049,中国
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132109.2303
  CLC： O436.1
- Received：24 December 2012，
  
  Revised：07 February 2013，
  
  Published Online：30 September 2013，
  
  Published：15 September 2013
- 稿件说明：
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谭鑫沈晨吴娜张方程巴音贺希格. 基于解析分区法设计闪耀全息凹面光栅[J]. 光学精密工程, 2013,21(9): 2303-2308

TAN Xin Shen Chen WU Na ZHANG Fang-cheng Bayanheshige. Design of diffraction blazed concave grating by partitioned space calculated method[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2303-2308
谭鑫沈晨吴娜张方程巴音贺希格. 基于解析分区法设计闪耀全息凹面光栅[J]. 光学精密工程, 2013,21(9): 2303-2308 DOI： 10.3788/OPE.20132109.2303.

TAN Xin Shen Chen WU Na ZHANG Fang-cheng Bayanheshige. Design of diffraction blazed concave grating by partitioned space calculated method[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2303-2308 DOI： 10.3788/OPE.20132109.2303.

摘要

研究了制备闪耀凹面光栅的离子束刻蚀工艺，提出了用解析分区法设计闪耀凹面光栅的衍射效率。该方法能通过确定离子束入射角，在实验前定量给出平行离子束刻蚀后光栅衍射效率的设计结果。经过理论设计计算出所需波长衍射效率较高的凹面闪耀光栅中心闪耀角，利用刻蚀模拟软件BLAZING计算出离子束刻蚀参数及光刻胶掩模参数；以计算结果为依据，利用全息-离子束刻蚀工艺制作出尺寸为45 mm40 mm2，曲率半径为224 mm的凹面闪耀光栅，其中心闪耀角约为9.21，峰值衍射效率为54.8%@300 nm，250 nm处衍射效率为50%，与解析分区法计算结果符合较好。实验结果表明，利用解析分区法进行凹面闪耀光栅衍射效率设计的方法简单易行，能够有效指导平行离子束刻蚀闪耀凹面光栅工艺，完成高衍射效率凹面闪耀光栅的制作。

Abstract

Ion beam etching technology was researched for fabricating blaze concave gratings

and a partitioned space calculated method was proposed to calculate the diffraction efficiency of a blaze concave grating. The method can calculate the diffraction efficiency quantitatively without experimentation by confirming an incidence angle. The blazed angle of the blaze concave grating with a given wavelength was calculated based on the partitioned space calculated method

and ion beam etching parameters and a mask parameter were calculated by etching software BLAZING. On the basis of these parameters

a concave grating with a size of 45mm40mm was fabricated by holographic ion beam etching. The focus blazed angles measured by an Atomic Force Microscope(AFM) are 9.21

the efficiencies of the gratings measured by a concave grating diffraction efficiency instrument are about 54.8% at 300 nm and 50% at 250 nm. The grating substrate has a smooth blazed groove profile with 1 200 groove/mm. The results are in agreement with that partitioned space calculated well. It means that partitioned space calculated method is suitable for designing and calculating the efficiency of blaze concave gratings and it can direct the fabrication of the blaze concave gratings by the ion beam etching technology.

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references

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Related Author

WU Na

TAN Xin

Bayanheshig

TANG Yu-guo

Quan LIU

Shuang-shuang HUANG

Jin-chao LU

Xin-hua CHEN

Related Institution

Graduate University of Chinese Academy of Sciences

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University

Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University

Shanghai Key Laboratory of Modern Optical System, Optical Instrument and Systems Engineering Centre of the Ministry of Education

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