High Accuracy Temperature Response Modeling of Projection Lens under Thermal Disturbance

QIN Shuo1; 2; GONG Yan1; YU Xin-feng1; YUAN Wen-quan1; PENG Hai-feng1; YANG Huai-jiang1

doi:10.3788/OPE.20132111.2829

您当前的位置：

首页 >

文章列表页 >

High Accuracy Temperature Response Modeling of Projection Lens under Thermal Disturbance

更新时间：2020-08-12

- High Accuracy Temperature Response Modeling of Projection Lens under Thermal Disturbance
- Optics and Precision Engineering Vol. 21, Issue 11, Pages: 2829-2835(2013)
- 作者机构：
  
  1. 空军航空大学,吉林长春,130022
  2. 中国科学院长春光学精密机械与物理研究所,吉林长春,130021
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132111.2829
  CLC： TN305.7
- Received：05 December 2012，
  
  Revised：14 January 2013，
  
  Published Online：22 November 2013，
  
  Published：15 November 2013
- 稿件说明：
移动端阅览
秦硕, 巩岩, 于新峰, 袁文全, 彭海峰, 杨怀江. 热扰动条件下投影物镜温度响应的高精度建模[J]. 光学精密工程, 2013,21(11): 2829-2835

QIN Shuo, GONG Yan, XU Xin-Feng, YUAN Wen-Quan, BANG Hai-Feng, YANG Fu-Jiang. High Accuracy Temperature Response Modeling of Projection Lens under Thermal Disturbance[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2829-2835
秦硕, 巩岩, 于新峰, 袁文全, 彭海峰, 杨怀江. 热扰动条件下投影物镜温度响应的高精度建模[J]. 光学精密工程, 2013,21(11): 2829-2835 DOI： 10.3788/OPE.20132111.2829.

QIN Shuo, GONG Yan, XU Xin-Feng, YUAN Wen-Quan, BANG Hai-Feng, YANG Fu-Jiang. High Accuracy Temperature Response Modeling of Projection Lens under Thermal Disturbance[J]. Editorial Office of Optics and Precision Engineering, 2013,21(11): 2829-2835 DOI： 10.3788/OPE.20132111.2829.

摘要

针对投影物镜温度控制系统具有多重扰、多时滞和时间常数较大等问题，搭建了投影物镜温控实验平台；研究了实验平台的结构、激励信号设计、数据预处理方法和建模算法，建立了超高精度温度响应模型。首先，考虑光刻机对震动和洁净度的严格要求，设计了远距离串级水冷控制系统；进行了物镜温度的阶跃响应实验，采用两点法建立了物镜的温度响应传递函数（粗建模）。然后，根据获得的物镜阶跃响应传递函数，设计二位式伪随机辨识输入信号的参数，并采用分段线性化方法对输入输出数据进行预处理。最后，设计迭代最小二乘算法

辨识得到物镜的ARMAX温度响应模型（精建模）。基于该模型的物镜温控实验结果表明：在环境温度波动幅值达0.6 ℃并加入3 W的热扰动条件下，物镜温度稳态误差控制在0.001 ℃以内，满足光刻机对投影物镜的超高精度温度控制要求。

Abstract

In consideration of the repetitive disturbance

time lag and a larger time constant in a temperature control system for the projection lens

a temperature control experimental platform of projection lens was built. The structures

data preprocessing method and modeling algorithm for the experimental platform were researched

and a high precision temperature response model was established. Firstly

Taking into account the request of a lithographic machine for stringent vibration and cleanliness

the long-distance range cascade water cooling control system was designed. Then

the step response experiment of projection lens on the temperature was carried on

and the temperature response transfer function of projection lens was established with the two-point method(coarse model). Furthermore

pseudo random input signal was designed on the basis of the transfer function

and the input and output data were preprocessed by using the piecewise linear method. Finally

the iteration least square algorithm was designed to obtain the ARMAX temperature response model of projection lens. The temperature control experiment based on the model show that the temperature stability of the projection lens achieves 0.001 ℃ in environment temperature with a fluctuation amplitudes up to 0.6 ℃ and thermal disturbance of 3 W

which meets the requirements of projection lens of lithography for ultra-high-precision temperature control.

关键词

Keywords

references

SOICHI O,HIROYUKI N,YUUKI I,et al.. Full-field exposure tools for immersion lithography [J]. SPIE, 2010 (34):164-170.[2]CULLIMORE B,PANCZAK T,BAUMANN J.Integrated analysis of thermal/structural /optical systems [J].SAE,2002(2444）:1-8.[3]SOUKIEH M,ABDUL G B,HAMMADI M. Numerical calculations of temperature distribution of double layer metallic surface treated by laser beams [J].Optics & Laser Technology, 2004(36):523-528.[4]VICTOR L G, KEITH B D, GREGORY J M. Optical performance as a function dynamic mechanical loading [J].SPIE,2008,5178(4):1-6.[5]王平，王汝冬，田伟,等.Fizeau干涉仪主机的热稳定性设计与分析[J].光学精密工程，2011,19（9）：2100-2107.WANG P,WANG R D,TIAN W, et al.. Design and analysis of thermal stability for main frame in Fizeau interferometer[J].Opt. Precision Eng.,2011,19(9):2100-2107.(in Chinese)[6]杨献伟，吴清文，李书胜，等. 空间光学遥感器热设计[J]. 中国光学，2011,4(2):139-146.YANG X W, WU Q W, LI S S, et al.. Thermal design of space optical remote sensor \[J\]. Chinese Optics, 2011,4(2):139-146.(in Chinese)[7]张晓龙，刘英，孙强. 高精度非致冷长波红外热像仪的辐射标定\[J\]. 中国光学，2012,5(3):235-241.ZHANG X L, LIU Y, SUN Q, et al.. Radiometric calibration of uncooled long-wave infrared thermal imager with high-precision \[J\]. Chinese Optics, 2012,5(3):235-241.(in Chinese)[8]顾国超，王丽，刘洪波，高雁，陈家琦.瞬态热量标定系统的太阳模拟器光学系统设计\[J\]. 中国光学,2012,5(6):630-639.GU G C, WANG L, LIU H B, et al.. Optical design of solar simulator used for transient calorimeter calibration system\[J\]. Chinese Optics, 2012,5(6):630-639.(in Chinese)[9]郭亮，吴清文，曹启鹏,等. 空间相机电控机箱的热设计及仿真分析\[J\]. 中国光学,2011,4(2):129-138.GUO L, WU Q W,CAO Q P, et al.. Thermal design and simulation analysis of electronic controlling cabinet in space camera\[J\]. Chinese Optics, 2011,4(2):129-138.(in Chinese)[10]叶伟楠，董吉洪.大口径主镜轻量化结构参数的优化设计\[J\].中国光学,2012,5(3):222-228.YE W N, DONG J H. Optimized design of lightweight structural parameters for large-aperture primary mirror\[J\]. Chinese Optics, 2012,5(3):222-228.(in Chinese)[11]李志来，薛栋林，张学军.长焦距大视场光学系统的光机结构设计[J].光学精密工程，2008,16（12）：2485-2490.LI ZH L,XUE D L,ZHANG X J. Optical and mechanical design for long focal length and wide-field optical system [J]. Opt. Precision Eng.,2008,16(12):2485-2490.(in Chinese)[12]刘海波,谭吉春,沈本剑.星敏感器光学系统的热/结构/光分析[J].宇航学报,2010,31(3):875-879.LIU H B,TAN J CH,SHEN B J.Thermal/Structural/Optical analysis of optical system of star sensor[J].Journal of Astronautics,2010,31(3):875-879. (in Chinese)[13]郭亮,吴清文,颜昌翔.空间光谱成像仪热设计参数的灵敏度[J].光学精密工程,2012,20(6):1208-1217.GUO L,WU Q W,YAN CH X. Sensitivity of thermal design parameters for space spectral imaging apparatus [J]. Opt. Precision Eng.,2012,20(6):1208-1217. (in Chinese)[14]EDESON R L, SHAUGHNESSY B M, WHALLEY M S.The mechanical and thermal design and analysis of the VISTA infrared camera[J].SPIE,2004,5497:508-519.[15]ZHAO Y,DAVID L T, RALF K H, et al.. Optimization and temperature mapping of an ultra-high thermal stabilithy environmental enclosure[J].Precision Engineering, 2010(34):164-170.

Views

188

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

High precision temperature control for projection lens with long time thermal response constant

Dynamic fuzzy-PID coordinated control of the cool-hot end temperature of large climate environmental test chambers

High-precision and wide-range optical crystal temperature control system

Research on precision temperature control of laser diode based on the novel fuzzy-PID control unit

Measurement of thermoelectric characteristics of high resistance nano films

Related Author

YANG Huai-jiang

YUAN Wen-quan

GONG Yan

QIN shuo

XIE Xiaojie

CHEN Qinghua

YU Xiaozhou

YANG Hongtao

Related Institution

Aviation University of Air Force2. Fine Mechanics and Physics, Chinese Academ of Sciences

Public Key Laboratory of Mining Response and Disaster Prevention and Control in Deep Coal Mines， Anhui University of Science and Technology

School of Mechanical Engineering， Anhui University of Science and Technology

Research Institute of Physical and Chemical Engineering of Nuclear Industry

School of Electrical and Electronic Engineering, Tianjin Key Laboratory for Control Theory & Applications in Complicated System, Tianjin University of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰