Design of  frequency-shift interference fringe locking  system in holographic grating exposure

SONG Ying; Bayanheshig; QI Xiang-dong; ZHANG Ning; TANG Yu-guo

doi:10.3788/OPE.20142202.0318

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Design of frequency-shift interference fringe locking system in holographic grating exposure

Modern Applied Optics | 更新时间：2020-08-13

- Design of frequency-shift interference fringe locking system in holographic grating exposure
- Optics and Precision Engineering Vol. 22, Issue 2, Pages: 318-324(2014)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学北京,中国,100049
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142202.0318
  CLC： O436.1;O438.1
- Received：10 October 2013，
  
  Published：20 February 2014
- 稿件说明：
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宋莹,巴音贺希格,齐向东等. 移频式全息光栅曝光干涉条纹锁定系统的设计[J]. 光学精密工程, 2014,22(2): 318-324

SONG Ying, Bayanheshig ,QI Xiang-dong etc. Design of frequency-shift interference fringe locking system in holographic grating exposure[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 318-324
宋莹,巴音贺希格,齐向东等. 移频式全息光栅曝光干涉条纹锁定系统的设计[J]. 光学精密工程, 2014,22(2): 318-324 DOI： 10.3788/OPE.20142202.0318.

SONG Ying, Bayanheshig ,QI Xiang-dong etc. Design of frequency-shift interference fringe locking system in holographic grating exposure[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 318-324 DOI： 10.3788/OPE.20142202.0318.

摘要

建立了移频式全息光栅曝光干涉条纹锁定系统以提高全息光栅槽型对比度并降低由外部环境造成的曝光干涉条纹相位移动。根据系统的组成原理

分析了相位测量系统中莫尔条纹的产生条件及其与干涉条纹相位变化的关系

给出了探测器的选择方法。根据系统精度要求计算了A/D转换位数

自行设计了数字控制系统。提出采用光束移频方法来调整条纹相位

应用声光调制器对干涉条纹移动进行实时校正。实验结果表明

该系统采样频率可以达到5 kHz

对干涉条纹漂移和10 Hz以下的低频振动都有较好的抑制作用

相位变化3σ值小于0.12 rad

即相位变化小于±0.02个干涉条纹周期。该系统可以实时有效地锁定曝光干涉条纹

较好地满足全息曝光的要求。

Abstract

A frequency-shift interference fringe locking system was established to enhance the contrast of holographic grating profile and to decrease the phase shift of exposure interference fringe caused by the external environment. According to the composition and the working principle of the system

the moiré pattern occurrence condition in the measuring system and its dependence on the phase change of interference fringe were analyzed and the selection method for photodetectors was given. On the basis of the system accuracy

the digital control system was self-designed including A/D conversion digit. A optical frequency shifting method was used to regulate the fringe phase

and an acousto-optic modulator was taken to correct the frequency shifter of the interference fringe movement in real time . The experimental results illustrate that the system can offer a sampling frequency of 5 kHz and can restrain the interference fringe drift and low-frequency moving below 10 Hz. The 3σ value of the phase shift is below 0.12 rad

which means its phase is within ±0.02 interference fringe period. The system can lock the phase of the exposure interference fringe effectively in real time

and can satisfy the requirements of the holographic grating lithography better.

关键词

Keywords

references

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Related Institution

State Key Laboratory of Tribology & Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Department of Mechanical Engineering, Tsinghua University

College of Physics, Optoelectronics and Energy & Collaborative Innovation Center of Suzhou Nano Science and Technology, Laboratory Key Laboratory of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Laboratory of Modern Optical Technologies of Education Ministry of China, Soochow University

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences, Beijing 100049, China

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