Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface

XIE Jin; LIU Xu-ran; WU Ke-ke; LI Ping; LU Yong-xian

doi:10.3788/OPE.20142202.0376

您当前的位置：

首页 >

文章列表页 >

Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface
- Optics and Precision Engineering Vol. 22, Issue 2, Pages: 376-382(2014)
- 作者机构：
  
  华南理工大学机械与汽车工程学院,广东广州,510640
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142202.0376
  CLC： TG115.5;TH744.3
- Received：20 September 2013，
  
  Published：20 February 2014
- 稿件说明：
移动端阅览
谢晋,刘旭冉,吴可可等. 微磨削锥塔结构光滑表面的自适应方向检测与微加工精度[J]. 光学精密工程, 2014,22(2): 376-382

XIE Jin, LIU Xu-ran, WU Ke-ke etc. Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 376-382
谢晋,刘旭冉,吴可可等. 微磨削锥塔结构光滑表面的自适应方向检测与微加工精度[J]. 光学精密工程, 2014,22(2): 376-382 DOI： 10.3788/OPE.20142202.0376.

XIE Jin, LIU Xu-ran, WU Ke-ke etc. Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface[J]. Editorial Office of Optics and Precision Engineering, 2014,22(2): 376-382 DOI： 10.3788/OPE.20142202.0376.

摘要

用白光干涉检测(WLI)法检测微结构表面形貌时

其光滑结构面和边角数据很容易丢失

因此本文提出了自适应方向WLI检测法。该方法分别沿着每个微斜面法向进行自适应方向检测

评价分析其面形、特征轮廓和特征点的加工精度。首先

采用#3000金刚石砂轮微细尖端在Si表面加工出高度为50 μm、宽度为56 μm且光滑的微锥塔结构。然后

利用四次检测点云对微磨削表面进行拼接与重建。最后

分析面形误差、特征轮廓误差和特征点误差。实验显示:自适应方向WLI检测可以重构出完整的微锥塔结构表面

微磨削的面形误差为5.3 μm

表明该微磨削技术可以确保微锥塔结构光滑Si表面的加工精度。但是

对微锥塔结构表面特征轮廓误差及特征点误差的评价表明

特征轮廓误差高达7.7 μm

而特征点误差约为15 μm

约为面形误差的3倍。分析认为这些误差是由微金刚石砂轮V形尖端磨钝及微磨粒钝化造成的。

Abstract

When a White Light Interferometry (WLI) is used to measure the micro-structured surface topography

the measured points on smooth micro-structured surfaces and edges are easy to lose. Therefore

an adaptive-orientation WLI was proposed. The method measured each steep surface along its near normal-orientation for the evaluation of its surface shape

feature profile and micro-machining accuracy. First

a #3000 diamond wheel V-tip was employed to fabricate a micro-pyramid-structure Si surface with a depth of 50 μm and a width of 56 μm. Then

four adaptive-orientation measured point clouds were used to splice and reconstruct whole micro-ground surface. Finally

the micro-ground form error

feature profile error and the feature point error were investigated. Experiments show that the adaptive-orientation measurement can reconstruct integrated micro-pyramid-structured surface and the form error is 5.3 μm

which means that the micro-grinding may assure the machining accuracy of micro-pyramid-structured Si surface. In contrast

the evaluation for the feature profiles and feature points of a micro-pyramid-structure indicates that the feature profile error reaches 7.7 μm

and the feature point error is about 15 μm

which is about 3 times of its form error. It suggests that these errors come from the passivations of diamond wheel V-tip and micro grains.

关键词

Keywords

references

SHASTRY A, TAYLOR D, BOHRINGE K F. Micro-Structured Surface Ratchets for Droplet Transport [R]. Lyon:14thInt. Conf. on Solid-State Sensors, 2007.

WU D, WANG K, LUO X B, et al.. Enhancement of light extraction of multi-chips light-emitting diode (LED) modules with various micro-structure arrays[R]. Xi'an:11th Int. Conf. on Electronic Packaging Technology & High Density Packaging, 2010.

黄昆涛,房丰洲,宫虎. 超精密车削表面微观形貌对光学特性的影响[J]. 光学精密工程,2013, 21(1): 101-107.

HUANG K T, FANG F ZH, GONG H. Effect of surface microscopic topology generated by ultra-precision turning on optical characteristics [J]. Opt. Precision Eng., 2013, 21(1):101-107. (in Chinese)

徐慧, 张金龙, 刘京南,等. 零件轮廓表面检测与三维重构技术的研究[J].南京师范大学学报(工程技术版), 2011, 11(2):465-469.

XU H, ZHANG J L, LIU J N, et al.. Research on the part surface measurement and 3D reconstruction [J]. Journal of NanjingNormalUniversity (Engineering and technology edition), 2011, 11(2):465-469.(in Chinese)

杨薇, 赵娟, 周学威, 等. 基于线激光扫描的三维重构系统设计[J]. 光电技术应用, 2011, 26(5):5-7.

YANG W, ZHAO J, ZHOU X W, et al.. 3D reconstruction system design based on line laser scanning [J].Electro-optic technology application, 2011,26(5):5-7.(in Chinese)

贺俊,陈磊. 使用红外干涉仪测量非球面面形[J]. 光学精密工程,2010, 18(1): 69-74.

HE J,CHEN L. Measurement of aspheric surfaces by infrared interferometer[J]. Opt. Precision Eng., 2010,18(1): 69-74. (in Chinese)

常素萍, 谢铁邦. 基于白光干涉的MEMS三维表面形貌测量[J]. 华中科技大学学报(自然科学版), 2007, 35 (9):8-11.

CHANG S P, XIE T B. MEMS profile measurement by white-light interferometry [J]. J. Huazhong Univ. of Sci. & Tech. (Nature science edition),2007, 35 (9):8-11.(in Chinese)

YU D P, ZHONG X, WONG Y S, et al.. An automatic form error evaluation method for characterizing micro-structured surfaces[J].Measurementscience & Technology, 2011,22(1):296-305.

ZHU Z D. 3D-measurement of micro structure of surface and the application in manufacture [J].Modular Machine Tool & Automatic Manufacturing Technique, 2010,6(1):61-65.

SHINSUKE N, YASUHIRO T, TATSURO E.Evaluation of cell adhesion characteristics on the porous silicon substrates with various surface structures [J].Electrochemistry, 2008, 76(8):559-562.

HAYDAR A, STEIN S. Evaluation of a physical length scale for granular materials [J]. Computational materials science, 2008,42(3):525-530.

MOEOPOULOU A, DELEGOU E T, VLAHAKIS V. Digital processing of SEM images for the assessment of evaluation indexes of cleaning interventions on pentelic marble surfaces [J]. Materials characterization, 2007, 58(11-12): 1063-1069.

XIE J, ZHUO Y W, TAN T W. Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel [J]. Precision Engineering, 2011, 35(1):173-182.

曹慧荣, 王福昌. 全最小二乘和全加权最小一乘准则下的空间直线拟合[J].计算机应用与软件, 2010, 27(9):111-127.

CAO H R, WANG F CH. Space fitting line with criteria of total least square and total weighted least absolute deviation[J]. Computer applications and software, 2010, 27(9):111-127.(in Chinese)

Views

279

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Surfaces roughness study in diamond fly-cutting of micro-structured surface

Related Author

赵清亮

郭兵

杨辉

王义隆

Related Institution

哈尔滨工业大学精密工程研究所2. 哈尔滨工业大学3. 中国航空精密机械研究所

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰