Non-contact rotation angle measurement system for scanning mirrors

WANG Yang; YAN Chang-xiang; HU Chun-hui; WANG Yi-qun; GU Zhi-yuan; ZHANG Da; ZHANG Xin-jie

doi:10.3788/OPE.20142204.0850

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Non-contact rotation angle measurement system for scanning mirrors

Modern Applied Optics | 更新时间：2020-08-13

- Non-contact rotation angle measurement system for scanning mirrors
- Optics and Precision Engineering Vol. 22, Issue 4, Pages: 850-855(2014)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院大学北京,中国,100049
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142204.0850
  CLC： TB92;TP731
- Received：20 August 2013，
  
  Revised：07 October 2013，
  
  Published：25 April 2014
- 稿件说明：
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王洋, 颜昌翔, 胡春晖等. 非接触式扫描反射镜转角测量系统[J]. 光学精密工程, 2014,22(4): 850-855

WANG Yang, YAN Chang-xiang, HU Chun-hui etc. Non-contact rotation angle measurement system for scanning mirrors[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 850-855
王洋, 颜昌翔, 胡春晖等. 非接触式扫描反射镜转角测量系统[J]. 光学精密工程, 2014,22(4): 850-855 DOI： 10.3788/OPE.20142204.0850.

WANG Yang, YAN Chang-xiang, HU Chun-hui etc. Non-contact rotation angle measurement system for scanning mirrors[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 850-855 DOI： 10.3788/OPE.20142204.0850.

摘要

为了提高扫描反射镜转角检测系统的测角范围，建立了基于一字线激光器和线阵CCD的高精度非接触式扫描镜角度检测系统。介绍了检测系统的结构和工作原理，该系统根据激光光斑在CCD上的位置计算扫描反射镜的转角，并利用特殊设计的阵列反射镜增大测角范围。为了降低对加工及装调精度的要求，对系统进行了误差分析，给出了采用多项式拟合法进行角度测量的理论依据。讨论了影响系统检测精度的一系列误差源，计算了系统测量的总误差。最后进行了相关的测量实验。实验结果表明：系统的检测系统分辨率为2.5"，测角范围为11°，测角精度可达3"，可以满足扫描反射镜对角度测量系统提出的高精度、非接触、大测角范围的要求。

Abstract

A non-contact rotation angle measurement system based on a line laser

and a linear array CCD was established to extent the angle measuring scope of a scanning mirror. The structure and measurement principle of the measurement system were introduced. It calculates the rotational angle of the scanning mirror by the position of the laser spot on the linear CCD and extents the measuring scope by array mirrors with special design. To reduce the alignment requirements

the error was analyzed and a calibration measurement method with polynomial fitting was verified. A series of error sources that affect the measurement accuracy were analyzed and the total errors of the measurement system were calculated. Finally

the related measurement experiment was performed. Experimental results indicate that the measurement system can offer a resolution of 2.5"

angular measurement range of 11°

and the precision of angular measurement is up to 3". Obtained results can satisfy the system requirements for non-contact

higher precision and wider measurement ranges.

关键词

Keywords

references

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