Design and experiment of high-overload capacitive micro-machined accelerometers

TAO Yong-kang; LIU Yun-feng; DONG Jing-xin

doi:10.3788/OPE.20142204.0918

您当前的位置：

首页 >

文章列表页 >

Design and experiment of high-overload capacitive micro-machined accelerometers

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Design and experiment of high-overload capacitive micro-machined accelerometers
- Optics and Precision Engineering Vol. 22, Issue 4, Pages: 918-925(2014)
- 作者机构：
  
  清华大学精密仪器系北京,100084
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142204.0918
  CLC： TH824.4;U666.1
- Received：05 August 2013，
  
  Revised：01 February 2014，
  
  Published：25 April 2014
- 稿件说明：
移动端阅览
陶永康, 刘云峰, 董景新. 电容式高过载微机械加速度计的设计与实验[J]. 光学精密工程, 2014,22(4): 918-925

TAO Yong-kang, LIU Yun-feng, DONG Jing-xin. Design and experiment of high-overload capacitive micro-machined accelerometers[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 918-925
陶永康, 刘云峰, 董景新. 电容式高过载微机械加速度计的设计与实验[J]. 光学精密工程, 2014,22(4): 918-925 DOI： 10.3788/OPE.20142204.0918.

TAO Yong-kang, LIU Yun-feng, DONG Jing-xin. Design and experiment of high-overload capacitive micro-machined accelerometers[J]. Editorial Office of Optics and Precision Engineering, 2014,22(4): 918-925 DOI： 10.3788/OPE.20142204.0918.

摘要

针对某些高过载应用场合对微机械加速度计抗冲击能力的要求，设计了一种三轴向抗冲击的梳齿电容式闭环微机械加速度计。通过分析带止档的闭环加速度计冲击响应过程，提出在敏感方向使用悬臂梳齿结构作为柔性缓冲止档可以缓冲冲击过程中微结构间的接触碰撞；在非敏感方向采用结构模态和阻尼分离的设计可减小冲击变形，耗散冲击能量。马歇特锤冲击实验表明，该加速度计能够分别承受3个轴向幅值为13 200

，脉宽约102

s的的加速度冲击，冲击前后偏置漂移在5 mV以内。该闭环加速度计在±10

的非线性优于500×10

-6

，1.5 h偏置稳定性为0.27 m

。设计的样机基本满足高过载环境下惯性测量的要求。

Abstract

In consideration of the requirements of micro-machined accelerometers for enduring shock pulses in some special high-overload applications

a comb-finger capacitive closed-loop accelerometer with triaxial shock resistance was proposed. After analysis of the shock response of the closed-loop accelerometer with a stop

it points out that the flexible comb stop designed in the sensitive direction can reduce the impact force among the micro-structures and the modal separation and damping in the insensitive direction to strengthen the shock resistance in

and

axes can reduce the deformation and dissipate the shock energy. An impact hammer test demonstrates that the accelerometer can resist the acceleration shocks by 13

200

and 102

s respectively

and the bias drifts is less than 5 mV after shock. A prototype was designed and its nonlinearity is less than 500×10

-6

in a full scale of ±10

its bias stability is 0.27 m

for 1.5 h. The prototype can basically meet the demands of inertial measurements under high overload conditions.

关键词

Keywords

references

BARBOUR N M. Inertial MEMS systems and applications[C]. Nato Rto-en-Set, 2011:1-16.

PASTRE M, KAYAL M, SCHMID H, et al. A navigation-grade MEMS accelerometer based on a versatile front end[C].IECON 2011-37th Annual Conference on IEEE Industrial Electronics Society, IEEE, 2011: 4038-4043.

董景新. 微惯性仪表——微机械加速度计[M]. 北京:清华大学出版社, 2002. DONG J X. Micro Inertial Instruments——Micro Machined Accelerometer[M]. Beijing: Tsinghua University Press, 2002. (in Chinese)

刘危, 解旭辉, 李圣怡. 微机械惯性传感器的技术现状及展望[J]. 光学精密工程, 2003, 11(5):425-430. LIU W, XIE X H, LI SH Y. Present state and perspectives of micromachined inertial sensors[J]. Opt. Precision Eng., 2003, 11(5): 425-430. (in Chinese)

HARTZELL A L, SHEA H R. MEMS Reliability[M]. New York: Springer, 2011, 2-6.

伞海生, 宋子军, 王翔, 等. 适用于恶劣环境的MEMS压阻式压力传感器[J]. 光学精密工程, 2012, 20(3):551-553. SAN H SH, SONG Z J, WANG X, et al.. Piezoresistive pressure sensors for harsh environments[J]. Opt. Precision Eng., 2012, 20(3): 551-553. (in Chinese)

STAUFFER J M. Current capabilities of MEMS capacitive accelerometers in a harsh environment[J]. Aerospace and Electronic Systems Magazine IEEE, 2006, 21:29-32.

HIRATA Y, KONNO N, TOKUNAGA T, et al. A new z-axis capacitive accelerometer with high impact durability[C].Actuators and Microsystems Conference, 2009: 1158-1161.

YOON S W, LEE S, PERKINS N C, et al. Shock-protection improvement using integrated novel shock-protection technologies[J]. Journal of Microelectromechanical Systems, 2011, 20: 1016-1031.

TAO Y K, LIU Y F, DONG J X, et al. Experimental analysis of MEMS capacitive accelerometer's shock resistibility[C]. NSTI-Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational, Santa Clara, 2012:451-454.

刘晓为, 尹亮, 李海涛, 等. 闭环电容式微加速度计全差分CMOS接口电路[J]. 光学精密工程, 2011, 19(3):581-585. LIU X W, YIN L, LI H T, et al. Full differential CMOS interface circuit for closed-loop capacitive micro-accelerometers[J]. Opt. Precision Eng., 2011, 19(3): 581-585. (in Chinese)

TANNER D M, WALRAVEN J A, HELGESEN K, et al. MEMS reliability in shock environments[C].Reliability Physics Symposium, Proceedings. 38th Annual 2000 IEEE International, 2000:129-138.

刘宗林.电容式微惯性器件设计理论与方法研究[D]. 长沙:国防科学技术大学, 2004. LIU Z L.Study on the design theory and method of capactive micro inertial device[D].Changsha:National University of Defense Technology, 2004.

BAO M H. Analysis and Design Principles of MEMS Devices[M]. Elsevier Science Ltd, 2005.

Views

570

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

CMOS interface circuit for closed-loop accelerometer

Related Author

YIN Liang

CHEN Wei-ping

LIU Xiao-wei

ZHOU Zhi-ping

Related Institution

Department of Microelectronics, Harbin Institute of Technology, Harbin 150001, China

Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin 150001,China

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰