Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad

LI Jun; XIA Lei; WANG Xiao-ming; ZHU Yong-wei; ZUO Dun-wen

doi:10.3788/OPE.20142212.3287

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Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad

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- Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad
- Optics and Precision Engineering Vol. 22, Issue 12, Pages: 3287-3293(2014)
- 作者机构：
  
  1. 南京航空航天大学机电学院, 江苏省精密与微细制造技术重点实验室,江苏南京,210016
  2. 中国航天空气动力技术研究院北京,100074
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142212.3287
  CLC： O786;TN305.2
- Received：19 February 2014，
  
  Revised：11 March 2014，
  
  Published：25 December 2014
- 稿件说明：
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李军, 夏磊, 王晓明等. 三乙醇胺浓度对固结磨料研磨垫自锐性能的影响[J]. 光学精密工程, 2014,22(12): 3287-3293

LI Jun, XIA Lei, WANG Xiao-ming etc. Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad[J]. Editorial Office of Optics and Precision Engineering, 2014,22(12): 3287-3293
李军, 夏磊, 王晓明等. 三乙醇胺浓度对固结磨料研磨垫自锐性能的影响[J]. 光学精密工程, 2014,22(12): 3287-3293 DOI： 10.3788/OPE.20142212.3287.

LI Jun, XIA Lei, WANG Xiao-ming etc. Effect of triethanolamine concentration on self-sharpening performance of fixed abrasive pad[J]. Editorial Office of Optics and Precision Engineering, 2014,22(12): 3287-3293 DOI： 10.3788/OPE.20142212.3287.

摘要

采用不同浓度的三乙醇胺研磨液研磨石英晶体

基于研磨垫磨损率和工件与研磨垫的磨损比

分析了三乙醇胺浓度对石英晶体的去除率及其去除稳定性、研磨垫磨损率、磨损比、研磨摩擦系数、声发射信号和研磨后表面质量的影响.结果表明:随着三乙醇胺浓度的增加

工件与研磨垫磨损比先增大后减小

石英晶体的材料去除率和去除稳定性也对应地先增大后减小

摩擦系数先减小后增大

声发射信号先增加后减小

研磨后工件表面质量先变好后变差.当三乙醇胺浓度为5%时

石英晶体的材料去除率最大

去除率随时间变化最稳定

研磨垫使用寿命最长

表面质量最好.结果表明:研磨液中添加适量的三乙醇胺

会稳定石英晶体加工过程

延长研磨垫使用寿命

提高工件表面质量

降低生产成本.

Abstract

The triethanolamine (TEA) with different concentrations was added to the slurry to lap of quartz crystal. By defining the ratio of Material Removal Rate(MRR) and Pad Wear Rate (PWR) as the wear ratio

the effects of TEA concentrations on the magnitude and stability of quartz crystal

MRR

PWR

wear ratio

Friction Coefficient (COF)

Acoustic Emission (AE) and the surface quality of quartz crystal after lapping were investigated in fixed abrasive lapping process. The results show that with increasing additive amount of TEA in the slurry

the wear ratio increases first and then decreases

and the magnitude and stability of MRR for the quartz crystal have the same variation trend

too. Moreover

the COF decreases first and then increases and AE increases first and then decreases. The surface quality of quartz crystal after lapping gets first better then goes bad. When TEA concentration is 5%

the MRR of quartz crystal is the maximum and most stable

and the service life of FAP is the longest and surface quality is the best. Obtained results indicate that to add appropriate amount of TEA in the slurry will stabilize the lapping process of quartz crystal

prolong the service life of pad

enhance the surface quality of work pieces and reduce production costs in lapping process.

关键词

Keywords

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Related Author

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Related Institution

College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics

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