Linear lever-type piezoelectric inchworm actuator

MA Li; XIAO Jin-tao; ZHOU Sha-sha; SUN Li-ning

doi:10.3788/OPE.20152301.0184

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Linear lever-type piezoelectric inchworm actuator

更新时间：2020-08-13

- Linear lever-type piezoelectric inchworm actuator
- Optics and Precision Engineering Vol. 23, Issue 1, Pages: 184-190(2015)
- 作者机构：
  
  1. 上海大学机电工程与自动化学院上海,200072
  2. 苏州大学机器人与微系统研究中心,江苏苏州,215021
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152301.0184
  CLC： TN384
- Received：25 March 2014，
  
  Revised：18 May 2014，
  
  Published：25 January 2015
- 稿件说明：
移动端阅览
马立, 肖金涛, 周莎莎等. 杠杆式尺蠖压电直线驱动器[J]. 光学精密工程, 2015,23(1): 184-190

MA Li, XIAO Jin-tao, ZHOU Sha-sha etc. Linear lever-type piezoelectric inchworm actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 184-190
马立, 肖金涛, 周莎莎等. 杠杆式尺蠖压电直线驱动器[J]. 光学精密工程, 2015,23(1): 184-190 DOI： 10.3788/OPE.20152301.0184.

MA Li, XIAO Jin-tao, ZHOU Sha-sha etc. Linear lever-type piezoelectric inchworm actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(1): 184-190 DOI： 10.3788/OPE.20152301.0184.

摘要

设计了一种基于尺蠖运动原理的压电直线驱动器

用于解决光学领域中的精密定位问题.该驱动器采用了对称杠杆式位移放大机构

在保证钳紧力的同时

可以获得较大的驱动位移.阐述了尺蠖式压电驱动器的工作原理

对杠杆式柔性放大机构的位移损失、压电陶瓷与柔性机构的耦合特性及箝位机构与中间驱动机构的刚度进行了分析.利用有限元软件Ansys对钳位机构和驱动机构的变形、应力、输出位移和固有频率等参数进行了仿真分析.最后

搭建了实验平台

测试了驱动器的各项性能.测试结果显示

该驱动器的行程为±25 mm

钳紧力为17 N

承载力为11 N

最大和最小步距分别为55 μm和60 nm.当驱动电压为150 V时

驱动器的最高驱动速度为1.259 mm/s.得到的性能指标满足光学领域精密定位需要.

Abstract

A linear lever-type piezoelectric inchworm actuator is designed to implement the high precision positioning of optical field. The actuator adopts the displacement amplification mechanism of symmetric lever

which offers enough clamping force while obtains a larger driving displacement. The working principle of piezoelectric inchworm actuator is presented. And the displacement loss of the flexible amplification mechanism

the coupling characteristics between piezoelectric ceramics and flexible mechanism

and the stiffness and driving mechanism of the clamping mechanism are analyzed. The finite element method is used to simulate the clamping mechanism and the driving mechanism

then the deformation

stress

output displacement and natural frequency are all analyzed. An experimental platform is set up to test the performance of the actuator. The results on the actuator are shown that the travel range

clamping force and the bearing capacity for the actuator are 25 mm

17 N

and 11 N

respectively. Moreover

the maximum step is 55 μm

and the minimum step is 60 nm

respectively. By applying a driving voltage of 150 V

it offers the highest driving speed of 1.259 mm/s. these data meet the demands of the precision positioning in the optical field.

关键词

Keywords

references

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