MEMS based electrochemical seismic sensors with planar electrodes

WANG Jun-bo; GONG Li-ming; CHEN De-yong; HE Wen-tao; WANG Peng; CHWN Jian

doi:10.3788/OPE.20152303.0769

您当前的位置：

首页 >

文章列表页 >

MEMS based electrochemical seismic sensors with planar electrodes

更新时间：2020-08-13

- MEMS based electrochemical seismic sensors with planar electrodes
- Optics and Precision Engineering Vol. 23, Issue 3, Pages: 769-775(2015)
- 作者机构：
  
  中国科学院电子学研究所传感技术国家重点实验室北京,100190
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152303.0769
  CLC： P315.62;TP212.9
- Received：20 May 2014，
  
  Revised：06 July 2014，
  
  Published：25 March 2015
- 稿件说明：
移动端阅览
王军波, 龚黎明, 陈德勇等. 平面电极型MEMS电化学地震传感器[J]. 光学精密工程, 2015,23(3): 769-775

WANG Jun-bo, GONG Li-ming, CHEN De-yong etc. MEMS based electrochemical seismic sensors with planar electrodes[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 769-775
王军波, 龚黎明, 陈德勇等. 平面电极型MEMS电化学地震传感器[J]. 光学精密工程, 2015,23(3): 769-775 DOI： 10.3788/OPE.20152303.0769.

WANG Jun-bo, GONG Li-ming, CHEN De-yong etc. MEMS based electrochemical seismic sensors with planar electrodes[J]. Editorial Office of Optics and Precision Engineering, 2015,23(3): 769-775 DOI： 10.3788/OPE.20152303.0769.

摘要

针对传统电化学地震传感器的加工工艺成本高、一致性差等问题

设计了一种新的平面电极型微机电系统(MEMS)电化学地震传感器结构。建立了平面电极型MEMS电化学地震传感器的计算模型

通过Comsol多场耦合数值模拟分析方法

对影响传感器的结构参数如:电极宽度、电极间距、流道高度等进行了计算和优化。采用MEMS表面工艺和准LIGA工艺

制备了平面电极型MEMS电化学地震传感器。最后

与采用传统方法精密加工的MET2003器件进行了频率响应和微震动的对比测试。实验结果表明:与MET2003器件相比

平面电极型MEMS电化学地震传感器的带宽从1 Hz扩展到了30 Hz

两种器件的采集结果具有很好的相关性和一致性

Abstract

For higher fabrication costs and poor consistency of electrochemical seismic sensors

a new structure for an electrochemical seismic sensor with planar electrodes based on Micro-electric-mechanical System (MEMS) was presented. A 2D calculation model for the seismic sensor designed was built. The key structure parameters

such as the widths of electrodes

the space between electrodes and the height of the channel which might affect the performance of the seismic sensor

were calculated and optimized by the multi-field coupling numerical simulation method with Comsol software. Through the MEMS surface processes and quasi-LIGA (Lithographie Galvanoformung Abformung) process

the MEMS based electrochemical seismic sensor with planar electrodes was fabricated and packaged. Finally

the characteristic experiments of the frequency response and the tiny-vibration testing for the sensor designed and the traditional seismic sensor based on precise-machining (MET 2003) were carried out. The experiments show that the frequency bandwidth of the sensor designed is expanded from 1 Hz to 30 Hz as compared with that of the MET 2003 and the consistency between the sensor designed and MET 2003 is achieved to 0.887. The noise level is less than 120 dB at 1 Hz.

关键词

Keywords

references

CHEN D Y, LI G B, WANG J B, et al.. A micro electrochemical seismic sensor based on MEMS technologies [J]. Sensors and Actuators A:Physical, 2013, 202:85-89.

LI G B, CHEN D Y, WANG J B, et al.. A MEMS based seismic sensor using the electrochemical approach [J]. Procedia Engineering, 2012, 47:362-365.

KOZLOV V A, AGAFONOV V M. Convective accelerometer:USA, Patent 20050257616A1 [P]. 2005.

KOZLOV V A, AGAFONOV V M. Convective accelerometer with positive or negative inertial mass:USA, Patent 20080216571A1 [P]. 2008.

LEVCHENKO D G, KUZIN I P, SAFONOV M V, et al.. Experience in seismic signal recording using broadband electrochemical seismic sensors [J]. Seismic Instruments, 2010, 46(3):250-264.

HE W T, CHEN D Y, LI G B, et al.. Low frequency electrochemical accelerometer with low noise based on MEMS [J]. Key Engineering Materials, 2012, 503:75-80.

KOZLOV V A, TERENT'EV D A. Transfer function of a diffusion transducer at frequencies exceeding the thermodynamic frequency [J]. Russian Journal of Electrochemistry, 2003, 39(4):401-406.

AGAFONOV V M, NESTEROV A S. Convective current in a four-electrode electrochemical cell at various boundary conditions at anodes [J]. Russian Journal of Electrochemistry, 2005, 41(8):880-884.

AGAFONOV V M, KRISHTOP V G. Diffusion sensor of mechanical signals:Frequency response at high frequencies [J]. Russian Journal of Electrochemistry, 2004, 40(5):537-541.

KOZLOV V A, SAFONOV M V. Dynamic characteristic of an electrochemical cell with gauze electrodes in convective diffusion conditions [J]. Russian Journal of Electrochemistry, 2004, 40(4):460-462.

SUN Z Y, AGAFONOV V M. 3D numerical simulation of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometer [J]. Sensors and Actuators B:Chemical, 2010, 146(1):231-238.

SUN Z Y, AGAFONOV V M. Computational study of the pressure-driven flow in a four-electrode rectangular micro-electrochemical accelerometer with an infinite aspect ratio [J]. Electrochemical Acta, 2010, 55(6):2036-2043.

DENG T, CHEN D Y, WANG J B, et al.. A MEMS based electrochemical vibration sensor for seismic motion monitoring [J]. Journal of Microelectromechanical Systems, 2014, 23(1):92-99.

Views

422

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Thermoacoustic efficiency of graphene sound-generators using different structures

Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching

MEMS gyro denoising based on fuzzy interval threshold EMD

Development of capacitive MEMS vibrating ring gyroscope

Auto-focusing in optical microscopy for machine-vision-based precise measurement

Related Author

De-bo WANG

Xing-yue HE

Ji-hao XIN

Xin-long WANG

Jing-bing DING

Wei-da CAO

Ping-hua LI

Bing-gen CHEN

Related Institution

College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunication

East China Institute of Photo-Electronic IC

Automatic Control Research Institute, Lanzhou Jiaotong University

Gansu Provincial Key Laboratory of Traffic Information Engineering and Control

Science and Technology on Electronic Test & Measurement Laboratory, North University of China

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰