Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging

WANG Da-hui; QIAN Hang; ZHAO Xue-qing; MA Lian-ying; ZHANG Yong-sheng; SHAO Bi-bo; FENG Ga

doi:10.3788/OPE.20152304.0949

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Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging

更新时间：2020-08-13

- Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging
- Optics and Precision Engineering Vol. 23, Issue 4, Pages: 949-955(2015)
- 作者机构：
  
  西北核技术研究所激光与物质相互作用国家重点实验室,陕西西安,710024
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152304.0949
  CLC： TH703;TN248.2
- Received：08 August 2014，
  
  Revised：08 October 2014，
  
  Published：25 April 2015
- 稿件说明：
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王大辉, 钱航, 赵学庆等. 基于荧光成像的准分子激光系统多路光束自动准直[J]. 光学精密工程, 2015,23(4): 949-955

WANG Da-hui, QIAN Hang, ZHAO Xue-qing etc. Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 949-955
王大辉, 钱航, 赵学庆等. 基于荧光成像的准分子激光系统多路光束自动准直[J]. 光学精密工程, 2015,23(4): 949-955 DOI： 10.3788/OPE.20152304.0949.

WANG Da-hui, QIAN Hang, ZHAO Xue-qing etc. Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging[J]. Editorial Office of Optics and Precision Engineering, 2015,23(4): 949-955 DOI： 10.3788/OPE.20152304.0949.

摘要

研究了基于准直光束成像的准分子激光主振荡功率放大(MOPA)系统的多路光束自动准直

实现了激光在放大器中的多程放大及高的靶面指向精度。采用352 nm He-Cd激光作为准直光源

提出了多光束感光屏同步接收与可见光CCD荧光成像相结合的复合图像采集技术

解决了自动准直系统多路激光的近场、远场图像获取问题。利用图像区域分割处理方法编制了准直信息处理软件

实现了对多光束的自动准直闭环反馈控制。最后

结合准分子激光MOPA系统中的预放大器光学设计进行了自动准直验证实验。结果表明:准直成像光强可调谐倍数为300

成像系统在放大器窗口处固有误差占放大器口径比例小于设计值1.08%

3路激光的自动准直时间为40 s

完全满足放大器的几何填充和能量提取要求。

Abstract

The multiplexed beam automatic alignment of a Master Oscillator Power Amplifier(MOPA) system in a high power excimer laser based on scattering imaging was explored to achieve the multi-pass amplifications of amplifiers and high pointing accuracy of a target. A 325 nm He-Cd laser was selected as an automatic alignment source in the whole optical path. Then a complex imaging collection system was proposed by combining the photosensitive paper synchronized reception and a CCD visible imaging to complete the near-field and far-field scattering imaging in the automatic alignment system. Meanwhile

the information processing software was compiled based on the image region segmentation to accomplish the closed loop feedback control for automatic alignment of several array beams. Finally

image collection validation experiments for pre-amplifier beam automatic alignment were carried out. The results indicate that the light intensity tunable multiple value of the scattering imaging system is 300

the ratio of the error of automatic alignment beams on the amplifier windows and the window diameters is lower than the designed value by 1.08% and the total time of automatic alignment of the three beams is 40 s

which satisfies the demands of the amplifier for geometric fill and energy extraction.

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Keywords

references

LIU D ZH, XU R F, FAN D Y. Design and performance of a video-based laser beam automation alignment system[J]. Chin. Opt. Lett., 2004, 2(2): 92-94.

EATON D J, GAYHART A R. High speed pointing control system[J]. SPIE, 1992, 1697: 251-260.

KROHA H. Laser-alignment system with transparent silicon strip sensors and its application[J]. Nuclear Physics B, 1997, 53(3)(suppl.): 80-85.

BOEGE S J, BLISS E S, CHOCOL C J, et al.. NIF pointing and centering systems and target using a 351 nm laser source[J]. SPIE, 1997, 3047:248-258.

王大辉, 赵学庆, 张永生, 等. 电子束泵浦准分子激光放大器的双程光路自动准直[J]. 光学精密工程, 2012, 20(7): 1434-1439. WANG D H, ZHAO X Q, ZHANG Y SH, et al.. Automatic alignment of double paths in electron pumped excimer laser amplifier[J]. Opt. Precision Eng., 2012, 20(7): 1434-1439.(in Chinese)

CHANG CH W, SU D CH. Collimation method that uses spiral gratings and Talbot interferometry[J]. Opt. Lett., 1991, 16(22):1783-1784.

刘代中, 徐仁芳, 范滇元. 激光聚变装置光束自动准直系统的研究进展[J]. 激光与光电子学进展, 2004, 41(2): 1-5. LIU D ZH, XU R F, FAN D Y. Evolution of beam automatic alignment system in laser-fusion facility[J]. Laser & Optoelectronics Progress, 2004, 41(2): 1-5.(in Chinese)

高妍琦, 朱宝强, 刘代中, 等. 神光II升级装置远场准直系统研究[J]. 物理学报, 2011, 60(6): 065204-1-065204-6. GAO Y Q, ZHU B Q, LIU D ZH, et al.. Far field auto-alignment system used in SG-Ⅱ-Up system[J]. Acta Physica Sinica, 2011, 60(6): 065204-1-065204-6.(in Chinese)

孟贤男, 曾理江. 用大像元CMOS线阵光电探测器和插值法测量激光光斑中心位置[J]. 中国激光, 2002, 29(1): 69-72. MENG X N, ZENG L J. Measuring the laser beam position by using a CMOS photodiode array and interpolation method[J]. Chinese Journal of Lasers, 2002, 29(1): 69-72.(in Chinese)

田振华, 胡永生, 秦莉, 等. 高功率垂直腔面发射激光器的光束准直特性[J]. 发光学报, 2011, 32(9): 939-943. TIAN ZH H, HU Y SH, QIN L, et al.. Collimation of high power vertical cavity surface emitting laser[J]. Chin. J Lumn., 2011, 32(9): 939-943.(in Chinese)

潘高峰, 张景旭, 陈娟. 一种共光路自动对准系统[J]. 中国激光, 2008, 35(10): 1500-1502. PAN G F, ZHANG J X, CHEN J. Common path auto-alignment system[J]. Chinese Journal of Lasers, 2008, 35(10): 1500-1502.(in Chinese)

刘代中, 朱健强, 徐仁芳, 等. 4程放大光路自动准直系统研究[J]. 强激光与粒子束, 2004, 16(5): 582-586. LIU D ZH, ZHU J Q, XU R F, et al.. Study of beams automatic alignment in four-pass amplifiers[J]. High Power Laser and Particle Beams, 2004, 16(5):582-586.(in Chinese)

ZHENG D F, WANG X ZH, TANG F. An improved method of angle measurement with a position sensitive detector[J]. Chin. Opt. Lett., 2007, 5(7): 403-406.

何为, 徐庆浩, 徐仁芳, 等. 激光核聚变装置中基于像传递的激光自动准直技术研究[J]. 光学学报, 1999, 19(9): 1279-1283. HE W, XU Q H, XU R F, et al.. Image transfer based automatic laser alignment technique for laser -fusion facility[J]. Acta Optica Sinica, 1999, 19(9): 1279-1283.(in Chinese)

尉鹏飞, 刘军, 李晓芳, 等. 激光光束实时监测与自动准直系统设计[J]. 光学学报, 2008, 28(8): 1590-1595. WEI P F, LIU J, LI X F, et al.. Design of laser beam real-time monitoring and adaptive collimation system[J]. Acta Optica Sinica, 2008, 28(8): 1590-1595.(in Chinese)

吕凤年, 刘代中, 徐仁芳, 等. 图像处理在光路自动准直系统中的应用[J]. 光学技术, 2005, 31(3): 335-337. L F N, LIU D ZH, XU R F, et al.. Performance of image processing in beams automatic alignment system[J]. Optical Technique, 2005, 31(3): 335-337.(in Chinese)

孔冰, 王昭, 谭玉山. 基于圆拟合的激光光斑中心检测算法[J]. 红外与激光工程, 2002, 31(3): 275-279. KONG B, WANG ZH, TAN Y SH. Algorithm of laser spot detection based on circle fitting[J]. Infrared and Laser Engineering, 2002, 31(3):275-279.(in Chinese)

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