Error calibration and correction of mirror tilt in laser trackers

ZHANG Zi-li; ZHU Han; ZHOU Wei-hu

doi:10.3788/OPE.20152305.1205

您当前的位置：

首页 >

文章列表页 >

Error calibration and correction of mirror tilt in laser trackers

更新时间：2020-08-13

- Error calibration and correction of mirror tilt in laser trackers
- Optics and Precision Engineering Vol. 23, Issue 5, Pages: 1205-1212(2015)
- 作者机构：
  
  中国科学院光电研究院北京,100094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152305.1205
  CLC： TB922;V556.7
- Received：26 January 2015，
  
  Revised：26 February 2015，
  
  Published：25 May 2015
- 稿件说明：
移动端阅览
张滋黎, 朱涵, 周维虎. 激光跟踪仪转镜倾斜误差的标定及修正[J]. 光学精密工程, 2015,23(5): 1205-1212

ZHANG Zi-li, ZHU Han, ZHOU Wei-hu. Error calibration and correction of mirror tilt in laser trackers[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1205-1212
张滋黎, 朱涵, 周维虎. 激光跟踪仪转镜倾斜误差的标定及修正[J]. 光学精密工程, 2015,23(5): 1205-1212 DOI： 10.3788/OPE.20152305.1205.

ZHANG Zi-li, ZHU Han, ZHOU Wei-hu. Error calibration and correction of mirror tilt in laser trackers[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1205-1212 DOI： 10.3788/OPE.20152305.1205.

摘要

为了提高激光跟踪仪的测量精度

分析了跟踪仪的几何结构误差

重点研究了其转镜倾斜误差的标定和修正方法。利用矢量分析和坐标转换相结合的方法建立了跟踪仪转镜倾斜误差模型

推导出了跟踪仪几何空间坐标修正公式

并基于自准直仪、多面棱体和可调反射镜建立了高精度误差标定装置。利用标定装置分析了误差标定方法

通过系统仿真研究了转镜倾斜误差对系统测角误差及最终坐标测量误差的影响。利用误差标定实验检测出的系统转镜倾斜误差约为4"

将其带入坐标修正公式

并与修正前的坐标进行了比对分析。对比结果显示

经误差修正后系统空间坐标测量误差可减小约210

-6

验证了转镜倾斜误差标定和误差修正方法的有效性

表明利用该方法可在不改变系统硬件结构的基础上提高测量系统的测量精度。

Abstract

To improve the measuring accuracy of laser trackers

the geometric errors of a tracker were analyzed

and the error calibration and error correction methods for a tilted mirror in the tracker were explored. An error model for the titled mirror was established based on vector analysis and coordinate transformation

and the error correction formulation for geometric space coordinate of the tracker was deduced. Then

a high precision error calibration device was built based on a multi-mirror polygon

an adjustable reflected mirror and autocollimators. The calibration device was used to analyze the error calibration method

and the system simulations were used to research the influence of mirror tilt error on angle and coordinate measurement errors. The error calibration test shows that the mirror tilt error is 4". The tested error was induced to the coordinate correction formulation

and the spatial length measurement errors of the system before and after correction were tested. The results indicate that the measuring error of the laser tracker decreases by about 210

-6

which shows that the error calculation and error correction methods are effective. The method improves the measuring accuracy without changing the hardware structure of the system.

关键词

Keywords

references

ESTLER W T, EDMUNDSON K L, PEGGS G N, et al.. Large-scale metrology:an update[J]. CIRP Annals-Manufacturing Technology, 2002, 51(2):587-609.

叶声华, 邾继贵, 张滋黎, 等. 大空间坐标尺寸测量研究的现状与发展[J]. 计量学报, 2008, 29(4A):1-6. YE SH H, ZHU J G, ZHANG Z L, et al..Status and development of large-scale coordinate measurement research [J].Acta Metrologica Sinica, 2008, 29(4A):1-6. (in Chinese)

张福民, 曲兴华, 叶声华. 面向对象的大尺寸测量不确定度分析 [J]. 光学精密工程, 2008, 16(11): 2239-2243. ZHANG F M, QU X H, YE SH H. Uncertainty estimation of large-scale measurement for special fitting task [J]. Opt. Precision Eng., 2008, 16(11):2239-2243. (in Chinese)

周维虎, 丁蕾, 王亚伟, 等. 光束平差在激光跟踪仪系统精度评定中的应用[J]. 光学精密工程, 2012, 20(4): 851-857. ZHOU W H, DING L, WANG Y W, et al..Application of bundle adjustment to accuracy evaluation of laser tracker [J].Opt. Precision Eng., 2012, 20(4): 851-857. (in Chinese)

LOSER R, KYLE S. Alignment and field check procedures for the Leica laser tracker LTD 500 [R]. Boeing Large Scale Optical Metrology Seminar, Seattle, 1999:1-4.

MURALIKRISHNAN B, SAWYER D, BLACKBURN C, et al..ASME B89.4.19 performance evaluation tests and geometric misalignments in laser trackers[J]. Journal of Research of the National Institute of Standards and Technology, 2009, 114(1):21-35.

CONTE J, SANTOLARIA J, MAJARENA A C, et al..Identification and kinematic calculation of laser tracker errors[C]. The Manufacturing Engineering Society International Conference: MESIC, 2013: 379-387.

王亚伟. 空间目标光电跟踪测量系统关键技术研究[D]. 北京:北京航空航天大学, 2011. WANG Y W. Key techniques of optoelectronic tracking measurement system for space target [D]. Beijing:Beihang University, 2011. (in Chinese)

林嘉睿, 邾继贵, 张皓琳, 等. 激光跟踪仪测角误差的现场评价[J]. 仪器仪表学报, 2012, 33(2):463-468. LIN J R, ZHU J G, ZHANG H L, et al..Field evaluation of laser tracker angle measurement error [J]. Chinese Journal of Scientific Instrument, 2012, 33(2): 463-468. (in Chinese)

ZHANG Z L, ZHOU W H, LAO D B, et al..Research and development of the laser tracker measurement system [C].Proceedings of the Eighth International Symposium on Precision Engineering Measurements and Instrumentation, Chengdu: ISPEMI, 2012: 87593Z1-87593Z7.

卢荣胜, 李万红, 劳达宝, 等. 激光跟踪仪测角误差补偿[J]. 光学精密工程, 2014, 22(9):2299-2305. LU R SH, LI W H, LAO D B, et al..Angular error compensation for laser tracker [J]. Opt. Precision Eng., 2014:22(9): 2299-2305. (in Chinese)

王玉田. 三轴转台轴线垂直度的测试方法[J]. 计测技术, 2014, 34(1):42-52. WANG Y T.The method of measuring perpendicularities of three-axis turntable [J].Metrology & Measurement Technology, 2014, 34(1): 42-52. (in Chinese)

Views

1117

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Calibration and correction of geometric errors in laser tracker

Model establishment and error correction of FMCW lidar

High-precision attitude measurement with active aiming composite sensing for laser tracker

Research on factors influencing the pointing accuracy of large telescopes and the correction model

Related Author

WANG Shan

ZHANG Zili

DONG Dengfeng

ZHOU Weihu

JI Rongyi

PAN Yingling

WANG Guoming

CUI Chengjun

Related Institution

Institute of Microelectronics of the Chinese Academy of Sciences

University of Chinese Academy of Sciences

Institute of Ultra-precision Optoelectronic Instrument Engineering， Harbin Institute of Technology

Beijing Aerospace Institute for Metrology and Measurement Technology

Institute of Microelectronics， Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰