Application of 3D queue micro-electrode to micro-EDM

XU Bin; WANG Zhen-long; WU Xiao-yu; LEI Jian-guo; RUAN Shuang-chen

doi:10.3788/OPE.20152305.1304

您当前的位置：

首页 >

文章列表页 >

Application of 3D queue micro-electrode to micro-EDM

更新时间：2020-08-13

- Application of 3D queue micro-electrode to micro-EDM
- Optics and Precision Engineering Vol. 23, Issue 5, Pages: 1304-1313(2015)
- 作者机构：
  
  1. 深圳大学机电与控制工程学院深圳市模具先进制造技术重点实验室,广东深圳,518060
  2. 哈尔滨工业大学机电工程学院微系统与微结构制造教育部重点实验室,黑龙江哈尔滨,150001
  3. 深圳大学电子科学与技术学院深圳市激光工程重点实验室,广东深圳,518060
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152305.1304
  CLC： TG661
- Received：12 November 2015，
  
  Revised：20 December 2015，
  
  Published：25 May 2015
- 稿件说明：
移动端阅览
徐斌, 王振龙, 伍晓宇等. 三维队列微电极在微细电火花加工的应用[J]. 光学精密工程, 2015,23(5): 1304-1313

XU Bin, WANG Zhen-long, WU Xiao-yu etc. Application of 3D queue micro-electrode to micro-EDM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1304-1313
徐斌, 王振龙, 伍晓宇等. 三维队列微电极在微细电火花加工的应用[J]. 光学精密工程, 2015,23(5): 1304-1313 DOI： 10.3788/OPE.20152305.1304.

XU Bin, WANG Zhen-long, WU Xiao-yu etc. Application of 3D queue micro-electrode to micro-EDM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(5): 1304-1313 DOI： 10.3788/OPE.20152305.1304.

摘要

研究了三维微型腔模具的制备方法。该方法基于微型双工位分层实体制造工艺(DLOM)

通过多层铜箔二维微结构叠加拟合出三维队列微电极

将制备的微电极用于微细电火花加工来制得三维微型腔模具。首先

利用线切割对100 m 厚的多层铜箔进行逐层切割

获得多层二维微结构。然后

通过真空压力热扩散焊对多层铜箔二维微结构进行连接

叠加拟合出三维队列微电极。最后

在电压80 V

脉冲频率0.2 MHZ

脉冲宽度800 ns

休止脉宽4 200 ns的作用下

将上述工艺制备的三维队列微电极用于微细电火花加工

获得表面质量良好、形状与尺寸精度较高的三维微型腔模具。为了有效减少电极损耗对加工精度的不利影响

使用队列电极中的微电极依序对三维微型腔进行了加工。基于上述研究结果

制备了两种形状的三维队列微电极并通过微细电火花加工获得了表面粗糙度

为0.48 m的三维微型腔模具。与目前主流的微细电极逐层扫描放电加工三维微结构的工作方式相比

提出的三维微电极只需进行上下往返式加工便可获得三维微型腔模具

工作效率高且损耗低。

Abstract

This paper focuses on the fabrication of 3D micro-cavity molds. Based on micro Double-staged Laminated Object Manufacturing (DLOM) process

3D micro-electrodes were fabricated by superimposing multilayer 2D micro-structures and they were applied to the micro Electrical Discharge Machining (EDM) to obtain a 3D micro-cavity mold. Firstly

100 m-thick Cu foils were cut by micro-EDM to obtain multilayer 2D micro-structures and then the 2D micro-structures were connected together to fit out 3D micro-electrodes through a vacuum pressure thermal diffusion welding. Under the conditions of a voltage of 80 V

a pulse frequency of 0.2 MHz

pulse width of 800 ns and a pulse interval 4 200 ns

the 3D micro-electrodes were applied to the micro-EDM and the 3D micro-cavity mold with high surface quality and a precise shape was obtained. In order to reduce the adverse impact of electrode wear on machining precision of the 3D micro-cavity mold

the 3D queue micro-electrodes were used to process the same 3D micro-cavity mold

by which the first electrode was for rough machining and the others for fine machining. On the basis of these studies

two kinds of 3D queue micro-electrodes were fabricated and the 3D micro-cavity molds with surface roughness of 0.48 m were obtained through the Micro-EDM. As compared with the current scanning 3D micro-EDM process

the 3D micro-cavity molds fabricated could be obtained through up and down reciprocating method of the 3D queue micro-electrodes

showing a sample machining process and higher efficiency.

关键词

Keywords

references

YU Z Y, MASUZAWA T, FUJINO M. Micro-EDM for three-dimensional cavities-development of uniform wear method [J]. CIRP Annals-Manufacturing Technology, 1998, 47 (1): 169-172.

RAJURKAR K P, YU Z Y. 3D Micro-EDM using CAD/CAM [J]. Annals of the CIRP, 2000, 49(7): 127-130.

TONG H, LI Y, WANG Y, et al.. Servo scanning 3D micro-EDM based on macro/micro-dual-feed spindle [J]. International Journal of Machine Tools and Manufacture, 2008, 48: 858-869.

李勇, 佟浩, 郁鼎文, 等. 三维微细电火花伺服扫描加工工艺[J]. 纳米技术与精密工程, 2008, 4(6):307-311. LI Y, TONG H, YU D W, et al.. Servo scanning process of 3D micro EDM [J]. Nanotechnology and Precision Engineering, 2008, 4(6): 307-311. (in Chinese)

YAN M T, LIN S S. Process planning and electrode wear compensation for 3D micro-EDM [J]. International Journal of Advanced Manufacturing Technology, 2011, 53: 209--219.

王振龙, 彭子龙, 金柏冬. 空气介质微细电火花沉积加工微结构机理 [J]. 纳米技术与精密工程, 2009, 7(1): 51-55. WANG ZH L, PENG Z L, JIN B D. Forming mechanism of micro electrical discharge machining deposition in air [J]. Nanotechnology and Precision Engineering, 2009, 7(1): 51-55. (in Chinese)

PENG Z L, WANG Z L, DONG Y H, et al.. Development of a reversible machining method for fabrication of microstructures by using micro-EDM [J]. Journal of Materials Processing Technology, 2010, 210(1): 129-136.

ZHANG L X, JIA ZH Y, LIU W, et al.. A two-stage servo feed controller of micro-EDM based on interval type-2 fuzzy logic [J]. International Journal of Advanced Manufacturing Technology, 2012, 59(5-8): 633-645.

张玲瑄, 贾振元, 任小涛, 等. 微细电火花加工放电状态逐级映射检测[J]. 光学精密工程, 2010, 18(3): 662-669. ZHANG L X, JIA ZH Y, REN X T, et al..Successive mapping detection of micro EDM discharge state [J]. Opt. Precision Eng., 2010, 18(3): 662-669. (in Chinese)

李剑中, 栾纪杰, 虞慧岚, 等. 微细电火花三维加工中电极损耗补偿新方法 [J]. 大连理工大学学报, 2011, 51(4): 525-528. LI J ZH, LUAN J J, YU H L, et al.. A new method of electrode wear compensation in 3D micro-EDM [J]. Journal of Dalian University of Technology, 2011, 51(4): 525-528. (in Chinese)

付秀琢, 张勤河, 张建华, 等. 压电自适应微细电火花加工系统特性分析 [J]. 机械工程学报, 2011, 47(9): 164-168. FU X ZH, ZHANG Q H, ZHANG J H, et al.. Characteristics analysis of piezoelectric self-adaptive micro electrical discharge machining system [J]. Journal of Mechanical Engineering, 2011, 47(9): 164-168. (in Chinese)

杜连明, 张勤河, 张建华, 等. 基于PZT 激励同步压缩放电通道的微细电火花加工技术 [J]. 机械工程学报, 2013, 49(9): 184-189. DU L M, ZHANG Q H, ZHANG J H, et al.. Discharge channel compressed micro-EDM techniques based on PZT excitation [J]. Journal of Mechanical Engineering, 2013, 49(9): 184-189. (in Chinese)

LI L, GU L, XI X CH, et al.. Influence of flushing on performance of EDM with bunched electrode [J]. International Journal of Advanced Manufacturing Technology, 2012, 58(1-4): 187-194.

Gu L, LI L, ZHAO W SH, et al.. Electrical discharge machining of Ti6Al4V with a bundled electrode [J]. International Journal of Machine Tools & Manufacture, 2012, 53: 100-106.

XU B, WU X Y, LEI J G, et al.. Research on micro-electric resistance slip welding of copper electrode during the fabrication of 3D metal micro-mold [J]. Journal of Materials Processing Technology, 2013, 213: 2174-2183.

XU B, WU X Y, LING SH Q, et al.. Fabrication of 3D metal micro-mold based on femtosecond laser cutting and micro-electric resistance slip welding [J]. International Journal of Advanced Manufacturing Technology, 2013, 66: 601-609.

徐斌, 伍晓宇, 凌世全, 等. 飞秒激光切割与微细电阻滑焊组合制备三维金属微结构[J]. 光学精密工程, 2012, 20(8): 1811-1822. XU B, WU X Y, LING SH Q, et al.. Fabrication of 3D metal micro-structure based on fs laser cutting and micro electric resistance slip welding [J].Opt. Precision Eng., 2012, 20(8): 1811-1822. (in Chinese)

徐斌, 伍晓宇, 雷建国, 等. 逐层微细电阻滑焊工艺制备三维微结构[J]. 光学精密工程, 2014, 22(5): 1251-1259. XU B, WU X Y, LEI J G, et al.. Fabrication of 3D microstructure with layer-by-layer micro-electric resistance slip welding [J].Opt. Precision Eng., 2014, 22(5): 1251-1259. (in Chinese)

EKMEKCI B, SAYAR A. Debris and consequences in micro electric discharge machining of micro-holes [J]. International Journal of Machine Tools and Manufacture, 2013, 65:58-67.

Views

361

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰