Piezoelectric driven hydraulic amplification jetting system

GU Shou-dong; YANG Zhi-gang; JIANG Hai; LIU Jian-fang; LU Song; LIU Qin

doi:10.3788/OPE.20152306.1627

您当前的位置：

首页 >

文章列表页 >

Piezoelectric driven hydraulic amplification jetting system

更新时间：2020-08-13

- Piezoelectric driven hydraulic amplification jetting system
- Optics and Precision Engineering Vol. 23, Issue 6, Pages: 1627-1634(2015)
- 作者机构：
  
  吉林大学机械科学与工程学院,吉林长春,130025
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152306.1627
  CLC： TP67;TN405
- Received：27 November 2014，
  
  Revised：06 February 2015，
  
  Published：25 June 2015
- 稿件说明：
移动端阅览
顾守东, 杨志刚, 江海等. 压电驱动液压放大式喷射系统[J]. 光学精密工程, 2015,23(6): 1627-1634

GU Shou-dong, YANG Zhi-gang, JIANG Hai etc. Piezoelectric driven hydraulic amplification jetting system[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1627-1634
顾守东, 杨志刚, 江海等. 压电驱动液压放大式喷射系统[J]. 光学精密工程, 2015,23(6): 1627-1634 DOI： 10.3788/OPE.20152306.1627.

GU Shou-dong, YANG Zhi-gang, JIANG Hai etc. Piezoelectric driven hydraulic amplification jetting system[J]. Editorial Office of Optics and Precision Engineering, 2015,23(6): 1627-1634 DOI： 10.3788/OPE.20152306.1627.

摘要

为了实现高速度高精度的非接触喷射式点胶

设计了一种压电驱动液压放大式喷射系统.该系统采用压电叠堆作为驱动源

基于液压放大原理放大压电叠堆的输出位移来实现胶液的喷射.对液压放大单元进行了理论分析

并结合压电叠堆的输出位移对液压放大单元进行了参数化设计;然后

利用激光测微仪分别测量了撞针和压电叠堆的位移

得到了液压放大单元在不同电压下的输出位移.最后

搭建了喷射系统实验平台

选用黏度为1 000 cps的环氧树脂进行点胶性能测试

得到了驱动电压和高低电平时间对胶点体积的影响规律.实验显示

该喷射系统可稳定地实现每秒喷射143个胶点

胶点的体积误差可控制在±3.11%以内

是适用于电子封装行业的高效、高精度点胶方法.

Abstract

To pursue a more accurate non-contact dispensing in a higher speed

a piezoelectric-driven hydraulic amplification jetting system is designed. The system uses a piezostack as the driving source and amplifies the output displacement of piezostack based on the hydraulic amplifier principle to implement the jet glue. Through theoretical analysis of hydraulic amplification module

the structure parameters of the module are designed by combining with the analysis of output displacement of the piezostack. Then

the displacements of the needle and the piezostack are measured by a laser micrometer

and the magnifications of the hydraulic amplifier module on different voltages are obtained. Finally

a jetting system platform is set up

the epoxy with a viscosity of 1 000 cps is chosen to check its property of dispensing

and the relations between the driving voltage

high-low voltage time and the volume of droplet are obtained. The experiments show that the jetting system can stably jet 143 glue dots per second and the volume error of each dot is within ±3.11%

which is a more efficient and accurate dispensing method for the electronic packaging.

关键词

Keywords

references

张勤,徐策,徐晨影,等. 超微量点胶方法与实验[J]. 光学精密工程,2013,21(8):2071-2078. ZHANG Q, XU C, XU CH Y, et al.. Approach and experiment of ultra-micro dispensing [J]. Opt. Precision Eng., 2013, 21(8):2071-2078.(in Chinese)

LI J P, DENG G L. Technology development and basic theory study of fluid dispensing-a review [C].Proceedings of the Sixth IEEE CPMT Conference on High Density Microsystem Design and Packaging and Component Failure Analysis(HDP'04), Shanghai, China. CPMT, 2004:198-205.

史亚莉,李福东,杨鑫,等. 用于微胶接的pL级点胶方法[J]. 光学精密工程,2013,20(12):2744-2750. SHI Y L, LI F D, YANG X, et al.. pL class adhesive dispensing approach for micro bonding [J]. Opt. Precision Eng., 2013, 20(12):2744-2750.(in Chinese)

KUMAGAI K, FUCHIWAKI O. A development of dispenser for high-viscosity liquid and pick and place of micro objects using capillary force[J]. Key Engineering Materials, 2012, 516: 48-53.

赵翼翔,陈新度,陈新. 微电子封装中的流体点胶技术综述[J]. 液压与气动,2006(2):52-54. ZHAO Y X, CHEN X D, CHEN X. An overview of fluid dispensing technology for micro-electronics packaging [J]. Chinese Hydraulics & Pneumatics, 2006(2):52-54.(in Chinese)

孙道恒, 高俊川, 杜江,等. 微电子封装点胶技术的研究进展[J]. 中国机械工程,2011,22(20):2513-2519. SUN D H, GAO J CH, DU J,et al.. Advances in fluid dispensing technology for micro-electronics packaging [J]. China Mechanical Engineering, 2011,22(20):2513-2519.(in Chinese)

陈丹儿,王小萍,王申,等. 压电式喷射点胶控制系统的电路设计[J]. 电子与封装,2013(7):20-24. CHEN D E, WANG X P, WANG SH,et al.. The circuit design of piezoelectric jetting dispensing control system [J]. Electronics & Packaging, 2013(7):20-24.(in Chinese)

SHU X Y, ZHANG H H, LIU H Y, et al.. Experimental study on high viscosity fluid micro-droplet jetting system [J]. Science in China Series E: Technological Sciences, 2010, 53(1): 182-187.

焦晓阳, 刘建芳, 谷峰春, 等. 压电喷射点胶阀的喷射性能分析及实验研究[J]. 四川大学学报:工程科学版,2013, 45(2): 193-198. JIAO X Y, LIU J F, GU F CH, et al.. Analysis and research on jetting ability of the jet dispensing valve driven by a piezostack [J]. Journal of Sichuan University:Engineering Science Edition, 2013, 45(2): 193-198.(in Chinese)

姚玉峰, 路士州, 刘亚欣, 等. 微量液体自动分配技术研究综述[J]. 机械工程学报, 2013, 49(14): 140-153. YAO Y F, LU SH ZH, LIU Y X,et al.. Research on automated micro-liquid dispensing technology [J]. Journal of Mechanical Engineering, 2013, 49(14): 140-153.(in Chinese)

LU S Z, LIU Y X, YAO Y F, et al.. Bond-graph model of a piezostack driven jetting dispenser[J]. Simulation Modelling Practice and Theory, 2014, 49: 193-202.

ADAMSON S J, WANG D. 非接触式喷射点胶--未来的点胶技术[J]. 半导体技术, 2004, 29(3): 67-70. ADAMSON S J, WANG D. A change in dispensing technology-jetting takes off [J]. Semiconductor Technology, 2004, 29(3): 67-70.(in Chinese)

QUINONES H, BABIARZ A, DECK C, et al.. Fluid jetting for next generation packages [Z]. Pac Tech, Berlin, 2002.

陈立国, 孙慧, 孙立宁, 等. 基于撞针原理的高粘性微喷系统的设计与分析[J]. 压电与声光,2012, 34(3):372-375. CHEN L G, SUN H, SUN L N, et al.. Design and analysis of slight-jet system based on firing pin principle for high viscosity adhesives [J]. Piezoelectrics & Acoustooptics, 2012, 34(3):372-375.(in Chinese)

WANG L Y, DU J, LUO Z W, et al.. Design and Experiment of a Jetting Dispenser Driven by Piezostack Actuator [J]. IEEE Transactions on Components, Packaging and Manufacturing Technology, 2013, 3(1): 147-156.

WANG L Y, DU X H, LI Y P, et al.. Simulation and experiment study on adhesive ejection behavior in jetting dispenser [J]. Journal of Adhesion Science and Technology, 2014, 28(1): 53-64.

JEON J C, NGUYEN Q H, CHOI S B. The design and modeling of jetting dispenser actuated by dual piezostack actuator [J]. Applied Mechanics and Materials, 2013, 433-435: 72-75.

焦晓阳, 刘建芳, 丁宁宁, 等. 压电气体混合驱动式喷射点胶阀的设计与实验[J]. 哈尔滨工程大学学报,2013, 34(11): 1445-1449. JIAO X Y, LIU J F,DING N N, et al.. Design and experiment for the piezoelectric-gas hybrid driven jet dispensing valve [J]. Journal of Harbin Engineering University, 2013, 34(11): 1445-1449.(in Chinese)

杨志刚, 刘登云, 吴丽萍, 等. 应用于压电叠堆泵的微位移放大机构[J]. 光学精密工程,2007,15(6):884-888. YANG ZH G, LIU D Y, WU L P,et al.. Micro-displacement magnifying mechanism used in piezo-stack pump [J]. Opt. Precision Eng.,2007,15(6):884-888.(in Chinese)

刘建芳, 杨志刚, 范尊强, 等. 压电直线精密驱动器研究[J]. 光学精密工程,2005,13(1):65-72. LIU J F, YANG ZH G, FAN Z Q,et al.. Precise PZT linear step actuator [J]. Opt. Precision Eng., 2005,13(1):65-72.(in Chinese)

张涛, 孙立宁, 蔡鹤皋. 压电陶瓷基本特性研究[J]. 光学精密工程,1998,6(5): 26-32. ZHANG T, SUN L N, CAI H G. Study on thefundamental characteristics of piezoelectric element [J]. Opt. Precision Eng., 1998,6(5): 26-32.(in Chinese)

杨兴, 贾振元, 郭东明,等. 基于圆形膜片柔性结构的超磁致伸缩执行器的研究[J]. 中国机械工程,2002,13(6):474-477. YANG X, JIA ZH Y, GUO D M, et al..Study on giant magnetostrictive actuator based on disk-shape diaphragm compliant structure [J]. China Mechanical Engineering, 2002,13(6):474-477.(in Chinese)

NGUON B, JOUANEH M. Design and characterization of a precision fluid dispensing valve [J]. The International Journal of Advanced Manufacturing Technology, 2004, 24(3-4): 251-260.

Views

175

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Design and experiment of high frequency jetting dispenser driven by double piezoelectric stacks

Influences of balanced stiffness of clamping body on performance of inverse piezoelectric inchworm motor

Design and experiment of piezoelectric resonance high frequency fatigue testing machine

Novel linear motor driven by piezostack pump

Related Author

Xiang HUANG

Si-ying LIN

Xiao-long LIN

Zhi-hong LIN

Ling-yun WANG

WANG Jun-xiong

QU Hua-jie

QU Jian-jun

Related Institution

Shenzhen Research Institute of Xiamen University

Department of Mechanical and Electrical Engineering, Xiamen University

School of Mechatronics Engineering, Harbin Institute of Technology

College of Mechanical and Electrical Engineering, Jilin Institute of Chemical Technology

School of Mechanical Engineering, Northeast Dianli University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰