Application of laser displacement sensor to free-form surface measurement

LI Bing; SUN Bin; Chen Lei; WEI Xiang

doi:10.3788/OPE.20152307.1939

您当前的位置：

首页 >

文章列表页 >

Application of laser displacement sensor to free-form surface measurement

更新时间：2020-08-12

- Application of laser displacement sensor to free-form surface measurement
- Optics and Precision Engineering Vol. 23, Issue 7, Pages: 1939-1947(2015)
- 作者机构：
  
  西安交通大学机械制造系统工程国家重点实验室, 陕西西安 710049
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152307.1939
  CLC： TP212.12;TH744.5
- Received：31 March 2015，
  
  Revised：29 April 2015，
  
  Published：25 July 2015
- 稿件说明：
移动端阅览
李兵, 孙彬, 陈磊等. 激光位移传感器在自由曲面测量中的应用[J]. 光学精密工程, 2015,23(7): 1939-1947

LI Bing, SUN Bin, CHEN Lei etc. Application of laser displacement sensor to free-form surface measurement[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 1939-1947
李兵, 孙彬, 陈磊等. 激光位移传感器在自由曲面测量中的应用[J]. 光学精密工程, 2015,23(7): 1939-1947 DOI： 10.3788/OPE.20152307.1939.

LI Bing, SUN Bin, CHEN Lei etc. Application of laser displacement sensor to free-form surface measurement[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 1939-1947 DOI： 10.3788/OPE.20152307.1939.

摘要

以点激光位移传感器(HL-C211BE)为对象

研究它在自由曲面测量中的应用。针对激光位移传感器因测点倾角代入的测量误差

提出了一个可以量化的倾角误差模型。基于直射式点激光三角法原理

分析了激光光路的几何关系

从会聚光斑光能质心发生的偏移推导出倾角误差模型。随后

用高精度激光干涉仪和正弦规对激光位移传感器进行校对实验

并用误差模型对测量结果进行补偿。结果显示

补偿后激光位移传感器的测量精度得到明显提高。对一非球面凸透镜进行了实验测量

得到了自由曲面测点倾角的计算方法

并用倾角误差模型修正了测量数据。实验结果表明

量化的倾角误差模型可以将激光位移传感器的测量误差控制到小于10

满足激光位移传感器在自由曲面测量中应用的要求。

Abstract

By taking a point displacement laser as an object

this paper researches the application of the sensor to free-form surface measurement. In consideration of the measurement error of the laser displacement sensor due to the inclination of the measuring point

a quantifiable inclination error model was proposed to improve the measuring accuracy. On the basis of the principle of direct-point laser triangulation start

the geometric relationship of the laser light paths was analyzed. According to the shift of convergent light spot centroid

the inclination error model was derived. Following that

the laser displacement sensor was calibrated with a high precision laser interferometer and a sine bar

the measured data by the laser displacement sensor were compensated by the error model

and the measurement accuracy was significantly improved. Finally

the experimental measurement on an aspheric lens surface was performed

the free-form surface inclination measuring point was calculated and the measurement data were corrected by the proposed model. Experimental results show that inclination quantization error model has controlled the measurement error of the laser displacement sensor by less than 10

which meets the requirements of the free surface measurements by laser displacement sensors.

关键词

Keywords

references

陈骥,王鑫,曹久大,等. 高速CCD 激光位移传感器[J]. 光学精密工程,2008,16(4):611-616. CHEN J, WANG X, CAO J D,et al.. Development of high-speed CCD laser displacement sensor[J]. Opt. Precision Eng., 2008,16(4):611-616. (in Chinese)

温新,周云飞,穆海华,等. 激光测量几何误差补偿算法[J]. 机械设计与制造,2011,9(9):46-48. WEN X,ZHOU Y F,MU H H,et al.. An algorithm for the compensation of geometrical error in laser interferometer measurement [J]. Machinery Design ＆ Manufacture.,2011,9(9):46-48.(in Chinese)

李醒飞,姚旺,赵新华,等. 多传感器测量系统的联合标定[J]. 光学精密工程,2013,21(11):2877-2884. LI X F,YAO W,ZHAO X H, et al..Joint calibration of multi-sensor measurement system[J]. Opt. Precision Eng., 2013,21(11):2877-2884. (in Chinese)

杜颖,李真,张国雄. 三维曲面的光学非接触测量技术[J]. 光学精密工程,1999,7(3):1-6. DU Y, LI ZH, ZHANG G X. Optical non-contact measurement technology for 3-D surface [J]. Opt. Precision Eng., 1999,7(3):1-6. (in Chinese)

李冬冬,王永强,许增朴,等. 激光三角法在物面倾斜时的测量误差研究[J]. 传感器与微系统,2015,34(2):28-29. LI D D,WANG Y Q,XU Z P,et al.. Research on measurement error while workpiece surface is inclining by laser triangulation[J]. Transducer and Microsystem Technologies.,2015,34(2):28-29. (in Chinese)

陈岳坪,高健,邓海祥,等. 复杂曲面零件在线检测与误差补偿方法[J]. 机械工程学报,2012,48(23):143-151. CHEN Y P,GAO J,DENG H X,et al.. On-line inspection and machining error compensation for complex surfaces[J]. Journal of Mechanical Engineering,2012,48(23):143-151. (in Chinese)

解则晓,张宏君,张国雄. 影响激光三角测头测量精度的因素及其补偿措施[J]. 现代计量测试,1999(1):23-26. XIE Z X,ZHANG H J,ZHANG G X. Factors af fecting the measurement precision of laser triang ular probe and the compensation methods[J]. Advanced Measurement and Laboratory Management,1999(1):23-26. (in Chinese)

罗立强. 激光三角测量装置的优化研究[D]. 哈尔滨:哈尔滨工业大学,2008. LUO L Q. Research on the Optimization of Laser Triangulation on Device[D]. Harbin:Harbin Institute of Technology University,2008. (in Chinese)

吴剑锋,王文,陈子辰. 激光三角法测量误差分析与精度提高研究[J]. 机电工程,2003,20(5):89-91. WU J F,WANG W,CHEN Z CH. Study on the analysis for error in triangular laser measurement and the method of improving accuracy[J]. Mechanical & Electrical Engineering Magazine,2003,20(5):89-91. (in Chinese)

宋开臣,张国雄. 激光三角法扫描测头特性的研究[J]. 中国机械工程,2000(4):385-389. SONG K CH, ZHANG G X. Study on the characteristics of the laser triangulation scanning probe[J]. China Mechanical Engineering,2000 (4):385-389. (in Chinese)

VUKASINOVIC N, MOZINA J, DUHOVNIK J.Correlation between incident angle, measurement distance[J]. J. Mech. Eng., 2012, 58:23-28.

黄潇苹. 激光传感器位移测量精度分析及不确定度评定[D]. 大连:大连理工大学,2012. HUANG X P. Uncertainty Evaluation and Accuracy Analysis of Laser Displacement Sensor in Measuring Curved Surface[D]. Dalian:Dalian University of Technology,2012. (in Chinese)

王少清,庄葆华,张文伟. 基于朗伯定律重建光学三角法测位移原理公式[J]. 光学学报,1996,16(12):1802-1808. WANG SH Q,ZUANG B H,ZHANG W W. Rebuilding principle formula of optical triangulation method of displacement measurement in view of the Lambert theory[J]. Acta Optica Sinica,1996,16(12):1802-1808. (in Chinese)

王晓嘉,高隽,王磊. 激光三角法综述[J]. 仪器仪表学报,2004,25(4):601-606. WANG X J, GAO J, WANG L. Survey on the laser triangulation[J]. Chinese Journal of Scientific Instrument, 2004,25(4):601-606.(in Chinese)

邹振书,李喜增,张景和,等. 非接触测量激光光学探头[J]. 光学精密工程,1997,5(3):83-90. ZOU ZH SH,LI X ZH,ZHANG J H,et al.. Laser optical probe for non-contact measurements[J]. Opt. Precision Eng., 1997,5(3):83-90. (in Chinese)

LEE R, SHIOU F. Multi-beam laser probe for measuring position and orientation of freeform surface[J]. Measurement, 2011, 44:1-10.

LEE R, SHIOU F. Calculation of the unit normal vector using the cross-curve moving mask method for probe radius compensation of a freeform surface measurement[J]. Measurement, 2010, 43:469-478.

Views

583

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Calibration of beam direction of laser displacement sensor based on spherical target

Embedded position detection method and error compensation for servo motors

Grating interferometric precision nanometric measurement technology

Parallelism measurement and trajectory planning of multi-channel double crystal monochromator

Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system

Related Author

BI Chao

FANG Jian-guo

LIU Jing-liang

LIU Yong

LI Cheng-wei

ZHENG Fangyan

XU Haojie

YUAN Binfei

Related Institution

Aviation Key Laboratory of Science and Technology on Precision Manufacturing Technology, Beijing Precision Engineering Institute for Aircraft Industry

Engineering Research Center of Mechanical Testing Technology and Equipment， Ministry of Education， Chongqing University of Technology

Shenzhen International Graduate School， Tsinghua University

Tsinghua-Berkeley Shenzhen Institute， Tsinghua University

School of Power and Mechanical Engineering， Wuhan University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰