Temperature characteristics of quality factor of silicon micromachined gyroscope under high-vacuum environment

JIANG Shao-dong; SU Yan; QIU An-ping; SHI Qin

doi:10.3788/OPE.20152307.1990

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Temperature characteristics of quality factor of silicon micromachined gyroscope under high-vacuum environment

更新时间：2020-08-12

- Temperature characteristics of quality factor of silicon micromachined gyroscope under high-vacuum environment
- Optics and Precision Engineering Vol. 23, Issue 7, Pages: 1990-1995(2015)
- 作者机构：
  
  南京理工大学机械工程学院,江苏南京,中国,210094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152307.1990
  CLC： TH824.3;V241.5
- Received：10 November 2014，
  
  Revised：23 January 2015，
  
  Published：25 July 2015
- 稿件说明：
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姜劭栋, 苏岩, 裘安萍等. 高真空环境下硅微机械陀螺品质因数的温度特性[J]. 光学精密工程, 2015,23(7): 1990-1995

JIANG Shao-dong, SU Yan, QIU An-ping etc. Temperature characteristics of quality factor of silicon micromachined gyroscope under high-vacuum environment[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 1990-1995
姜劭栋, 苏岩, 裘安萍等. 高真空环境下硅微机械陀螺品质因数的温度特性[J]. 光学精密工程, 2015,23(7): 1990-1995 DOI： 10.3788/OPE.20152307.1990.

JIANG Shao-dong, SU Yan, QIU An-ping etc. Temperature characteristics of quality factor of silicon micromachined gyroscope under high-vacuum environment[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 1990-1995 DOI： 10.3788/OPE.20152307.1990.

摘要

分析了温度在高真空环境下对硅微机械陀螺品质因数的影响机理。阐述了热弹性阻尼的复频率模型和硅材料的温度特性

建立了品质因数温度特性理论模型

并对理论模型进行了仿真验证和实验验证。理论计算得到常温下品质因数的温度系数为-9.7610

-3

/℃。利用ANSYS对品质因数的温度系数进行仿真分析

得到常温下品质因数温度系数的仿真值为-9.9610

-3

/℃。对硅微机械陀螺进行品质因数温度实验

得到常温下品质因数的温度系数为-9.0210

-3

/℃

与理论计算结果相差8.20%。实验结果表明:高真空环境下建立陀螺品质因数温度特性的理论模型可为陀螺的温度误差补偿提供理论依据

为陀螺的优化设计提供实际指导。

Abstract

The influence mechanism of temperature on the quality factor of a Silicon Micromachined Gyroscope (SMG) under a high-vacuum environment was analyzed. The complex frequency model of thermoelastic damping and the temperature characteristics of silicon were presented. Then

the theoretical model of temperature characteristic of quality factor was set up

and the the simulation analysis and experimental verification were performed. The temperature coefficient of quality factor is -9.7610

-3

/℃ at a normal temperature with a theoretical calculation. The ANSYS was used to simulate the temperature coefficient of quality factor

and the simulation result is -9.9610

-3

/℃. The temperature experiment for quality factor was carried out

and the temperature coefficient of quality factor is -9.0210

-3

/℃

which is different from the theoretical calculation by 8.20%. The analytical results demonstrate that the theoretical model of temperature characteristic of quality factor in the high-vacuum environment provides theoretical basis for temperature compensation of the SMG and gives a guidance for optimization design of the SMG.

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Keywords

references

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