Self-sensing piezoelectric micro-gripper

CUI Yu-guo; ZHENG Jun-hui; MA Jian-qiang; CAI Cheng-bo

doi:10.3788/OPE.20152307.1996

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Self-sensing piezoelectric micro-gripper

更新时间：2020-08-12

- Self-sensing piezoelectric micro-gripper
- Optics and Precision Engineering Vol. 23, Issue 7, Pages: 1996-2004(2015)
- 作者机构：
  
  1. 宁波大学机械工程与力学学院,浙江宁波,315211
  2. 宁波大学浙江省零件轧制成型技术研究重点实验室,浙江宁波,315211
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152307.1996
  CLC： TN384;TH703.8
- Received：14 November 2014，
  
  Revised：04 January 2015，
  
  Published：25 July 2015
- 稿件说明：
移动端阅览
崔玉国, 郑军辉, 马剑强等. 压电自感知微夹钳[J]. 光学精密工程, 2015,23(7): 1996-2004

CUI Yu-guo, ZHENG Jun-hui, MA Jian-qiang etc. Self-sensing piezoelectric micro-gripper[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 1996-2004
崔玉国, 郑军辉, 马剑强等. 压电自感知微夹钳[J]. 光学精密工程, 2015,23(7): 1996-2004 DOI： 10.3788/OPE.20152307.1996.

CUI Yu-guo, ZHENG Jun-hui, MA Jian-qiang etc. Self-sensing piezoelectric micro-gripper[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 1996-2004 DOI： 10.3788/OPE.20152307.1996.

摘要

研制了不需要外部附加微位移与微力传感器、采用自感知方法来获取压电微夹钳的钳指位移与夹持力的压电自感知微夹钳。根据压电陶瓷晶片在驱动电压与外力作用下发生变形会在其表面产生电荷的思想

提出了基于积分电荷的钳指位移与夹持力的自感知方法;基于Jan G. Smits的压电悬臂梁弯曲变形理论

给出了钳指位移与夹持力的自感知表达式

即用钳指上压电陶瓷晶片表面的电荷来表达钳指位移与夹持力。设计了获取晶片表面电荷的积分电路

给出了其平衡条件为晶片电容与其绝缘电阻之积同积分电容与反馈电阻之积相等。自感知验证实验结果表明:修正后在31.59

m最大钳指位移范围内的自感知位移最大偏差为0.78

m;在35.91 mN最大钳指夹持力范围内的自感知夹持力的最大偏差为0.24 mN。实验结果验证了所提自感知方法是有效的。

Abstract

A self-sensing method was utilized to acquire the finger displacement and gripping force of a piezoelectric micro-gripper without micro-displacement and micro-force sensors. As the surface of piezoelectric ceramic wafer will generate free charges when it deforms under the external voltage and external force

a self-sensing method based on integral charges was proposed for sensing the finger displacement and gripping force. According to Jan G. Smits's piezoelectric cantilever bending deformation theory

the self-sensing formulas of the finger displacement and gripping force were derived

namely

the free charges on the surface of the piezoelectric ceramic wafer were used to represent the finger displacement and gripping force. Then an integral circuit was designed to acquire the surface free charges. The balance condition of self-sensing circuit was derived

which was that the product of the equivalent capacitance and leakage resistance of the piezoelectric crystals should be equal to that of the integrating capacitor and balancing resistor. Self-sensing experimental results indicate that the maximum error of modified self-sensing displacement is 0.78

m for the finger displacement of 31.59

m. The maximum error of modified self-sensing gripping force is 0.24 mN for the gripping force of 35.91 mN. Those experimental results show that the proposed self-sensing method is effective to detect the finger displacement and the gripping force.

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references

孙立宁,陈立国, 荣伟彬, 等. 面向微机电系统组装与封装的微操作装备关键技术[J]. 机械工程学报, 2008, 44(11):13-19. SUN L N, CHEN L G, RONG W B, et al..Key techniques of micromanipulation devices for MEMS assembling and packaging[J]. Chinese Journal of Mechanical Engineering, 2008, 44(11): 13-19. (in Chinese)

陈立国, 刘柏旭. 复合式MEMS微夹持器的研制[J]. 光学精密工程, 2009, 17(8): 1928-1934. CHEN L G, LIU B X. Development of hybrid-type MEMS microgripper[J]. Opt. Precision Eng., 2009, 17(8): 1928-1934. (in Chinese)

郝永平,董福禄,张嘉易, 等. 基于MEMS机构装配的微夹持器研究[J]. 中国机械工程, 2014, 25(5): 596-601. HAO Y P, DONG F L, ZHANG J Y,et al.. Study on micro-gripper on MEMS mechanism assembly[J]. China Mechanical Engineering, 2014, 25(5): 596-601. (in Chinese)

蔡建华,黄心汉, 吕遐东,等. 一种集成微力检测的压电式微夹钳[J]. 机器人, 2006, 28(1): 59-64. CAI J H, HUANG X H, LU X D,et al.. A micro-force sensing integrated piezoelectric microgripper[J]. Robot, 2006, 28(1): 59-64. (in Chinese)

XU Q. A new compliant microgripper with integrated position and force sensing[C]. Advanced Intelligent Mechatronics (AIM), 2013 IEEE/ASME International Conference on, IEEE, 2013: 591-596.

余大海,吴文荣,罗敏,等. 基于有限元分析的ICF靶半自动装配系统的微夹钳设计[J]. 传感器与微系统, 2011, 30(4): 120-123. YU D H, LUO W R, WU M, et al.. Design of the micro-gripper used for semi-automatic assembly system of ICF targets based on finite element analysis[J]. Transducer and Microsystem Technologies, 2011, 30(4): 120-123. (in Chinese)

吴俊杰,李源,李东升,等. MEMS电容式三维微触觉侧头设计及校准[J]. 光学精密工程, 2013, 20(12):3087-3094. WU J J, LI Y, LI D SH, et al.. Design and calibration of 3D micro tactile probe based on MEMS capacitance sensor[J]. Opt. Precision Eng., 2013, 20(12): 3087-3094. (in Chinese)

RAKOTONDRABE M, IVAN I A. Development and force/position control of a new hybrid thermo-piezoelectric microgripper dedicated to micromanipulation tasks[J]. Automation Science and Engineering, IEEE Transactions on, 2011, 8(4): 824-834.

席文明,钟辉. 电磁力驱动的微夹持技术[J]. 纳米技术与精密工程, 2008, 6(3): 195-198. XI W M, ZHONG H. Micro-tweezer technology driven by electromagnetic force[J]. Nanotechnology and Precision Engineering, 2008, 6(3): 195-198. (in Chinese)

KIM D H, KIM B, KANG H. Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation[J]. Microsystem Technologies, 2004, 10: 275-280.

ZHOU Y, NELSON B J. The effect of material properties and gripping force on micrograsping[C]. Proceedings of the 2000 IEEE National Conference on Robotics and Automation, 2002: 1115-1120.

赵学增,周法权,李宁,等. 一种消除AFM中悬臂梁横向扭转串扰误差的修正技术[J]. 纳米技术与精密工程, 2011, 9(2): 121-126. ZHAO X Z, ZHOU F Q, LI N, et al.. Correction of cross-talk caused by torsion of cantilever in AFM[J]. Nanotechnology and Precision Engineering, 2011, 9(2): 121-126. (in Chinese)

NELSON B J, ZHOU Y, VIKRAMADITYA B. Sensor-based microassembly of hybrid MEMS devices[J]. IEEE Communications Magazine, 1998, 18: 35-45.

SMITS JAN G, WSH CHOI. The constituent equations of piezoelectric heterogeneous bimorphs[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991, 38(3): 256-270.

邱磊. 基于积分电荷的压电自感知微夹钳研究[D]. 宁波: 宁波大学, 2012. QIU L. Research on Piezoelectric Self-sensing Micro-gripper Based on Integrator[D]. Ningbo: Ningbo University, 2012. (in Chinese)

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Detection of finger displcement and gripping force of piezoelectric micro-gripper

Related Author

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