Nanostructure machining by AFM probe combined with continuous laser

CHENG Bai; HAN Bing; GU Li-shan; CHEN Xiao-ping; YANG Li-jun

doi:10.3788/OPE.20152307.2043

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Nanostructure machining by AFM probe combined with continuous laser

更新时间：2020-08-12

- Nanostructure machining by AFM probe combined with continuous laser
- Optics and Precision Engineering Vol. 23, Issue 7, Pages: 2043-2050(2015)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 哈尔滨工业大学机电工程学院,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152307.2043
  CLC： TN249;TN305.7
- Received：19 December 2014，
  
  Revised：12 February 2015，
  
  Published：25 July 2015
- 稿件说明：
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程柏, 韩冰, 谷立山等. 纳结构的连续激光复合微纳探针刻划加工[J]. 光学精密工程, 2015,23(7): 2043-2050

CHENG Bai, HAN Bing, GU Li-shan etc. Nanostructure machining by AFM probe combined with continuous laser[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 2043-2050
程柏, 韩冰, 谷立山等. 纳结构的连续激光复合微纳探针刻划加工[J]. 光学精密工程, 2015,23(7): 2043-2050 DOI： 10.3788/OPE.20152307.2043.

CHENG Bai, HAN Bing, GU Li-shan etc. Nanostructure machining by AFM probe combined with continuous laser[J]. Editorial Office of Optics and Precision Engineering, 2015,23(7): 2043-2050 DOI： 10.3788/OPE.20152307.2043.

摘要

为了加工形貌稳定且尺寸尽可能小的纳结构

建立了一套连续激光复合微纳探针的加工系统

并研究了光纤探针导光的连续激光辐照微纳探针的近场增强效应以及该系统的加工性能。首先

根据表面等离子体激元理论仿真分析了激光辐照原子力显微镜(AFM)探针的近场增强因子

并研究了微纳探针的针尖温度场和针尖热膨胀。接着

搭建了基于光纤探针导光的连续激光复合微纳探针的纳结构加工系统。最后

对聚乙烯片状材料样品进行了纳结构加工。结果显示:加工得到的纳米点尺度为200 nm左右;纳米线的尺度为30~40 nm。结果表明:光纤探针导光连续激光复合微纳探针系统避免了复杂的空间光路结构

是一种成本低廉

结构简单的系统

能够实现纳结构的加工。

Abstract

To obtain the nanostructure with stable morphology and a smallest possible size

a nanostructure machining system is established by an Atomic Force Microscopic(AFM) probe combined with a continuous laser. With this method

the study focuses on the near-field enhancement theoretical analysis and simulation when the continuous laser irradiates the AFM probe and the machining performance of this system. Firstly

based on the mechanism of surface plasmon(SP)

the Factor of Enhancement Field(FEF)

temperature field and the thermal expansion on the probe tip are researched. A nanostructure machining system is set up based on the optical fiber probe to guide the laser to irradiate on the AFM probe. At last

the polyethylene(PE) is chosen as a sample to do the experiment. Experimental results indicate that the size of the processed nanodot is about 200 nm and that of the nanowire is about 30-40 nm. This method shows the proposed probe has simple-structure and inexpensive-cost and could achieve nanostructure machining.

关键词

Keywords

references

王立鼎,褚金奎,刘冲,等. 中国微纳制造研究进展[J]. 机械工程学报,2008,44(11): 2-12. WANG L D, CHU J K, LI CH, et al.. New developments on micro-nano manufacture technology in China[J].Chinese Journal of Mechanical Engineering, 2008,44(11): 2-12.(in Chinese)

张昔峰, 黄强先, 袁钰,等. 具有角度修正功能的大行程二维纳米工作台[J]. 光学精密工程, 2013, 21(7): 1811-1817. ZHANG X F, HUANG Q X, YUAN Y, et al.. Large stroke 2-DOF nano-positioning stage with angle error correction[J]. Opt. Precision Eng., 2013, 21(7): 1811-1817.(in Chinese)

胡克想, 王庆康, 胡晓东,等. 基于AFM调制电信号的矢量式纳米加工系统的开发及其应用[J]. 航空精密制造技术, 2013, 49(1): 1-6. HU K X, WANG Q K, HU X D, et al.. Development and application of vector-mode nanofabrication system by modulating electric signals based on AFM[J]. Aviation Precision Manufacturing Technology, 2013, 49(1): 1-6.(in Chinese)

胡克想,王庆康,胡晓东.AFM电场诱导氧化加工技术制备微纳米结构[J]. 航空精密制造技术, 2012,48(3). HU K X, WANG Q K, HU X D. Preparation of micro/nanostructures by AFM field-induced oxidation[J].Aviation Precision Manufacturing Technology, 2012,48(3). (in Chinese)

刘增磊,焦念东,刘志华,等. 基于AFM的纳米线沉积加工方法[J]. 科学通报, 2013,58(S2):200-206. LIU Z L, JIAO N D, LIU ZH H, et al.. Atomic force microscope deposition method for nano-lines[J].Chinese Science Bulletin, 2013,58(S2):200-206. (in Chinese)

张朝阳, 李中洋, 王耀民,等. 激光冲击效应下的力学电化学微细刻蚀加工[J]. 光学精密工程, 2012, 20(6): 1310-1315. ZHANG CH Y, LI ZH Y, WANG Y M, et al.. Mechanical-electrochemical micro-etching under laser shock effect[J].Opt. Precision Eng., 2012, 20(6): 1310-1315. (in Chinese)

HUANG S M, HONG M H, LU Y F, et al.. Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy[J]. Journal of Applied Physics, 2002, 91(5): 3268-3274.

HUANG S M, HONG M H, LUKYANCHUK B S, et al.. Sub-50 nm nanopatterning of metallic layers by green pulsed laser combined with atomic force microscopy [J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002, 20(3): 1118-1125.

CHIMMALGI A, GRIGOROPOULOS C P, KOMVOPOULOS K. Surface nanostructuring by nano-/femtosecond laser-assisted scanning force microscopy[J]. Journal of Applied Physics, 2005, 97(10): 104319-104319-12.

黄文浩, 朱兰芳, 陈宇航, 等. 基于原子力显微镜的 PMMA 飞秒激光纳米加工[J]. 光学精密工程, 2007, 15(12): 1959-1962. HUANG W H, ZHU L F, CHEN Y H, et al.. AFM based femto-second laser nanofabrication of PMMA[J]. Opt. Precision Eng., 2007, 15(12): 1959-1962. (in Chinese)

言峰, 周明, 范晓萌, 等. 基于局域场加强的近场纳米加工技术[J]. 光学学报, 2008, 28(s1): 176. YAN F, ZHOU M, FAN X M, et al.. Near-field nanofabrication technology base on local field enhancement effect[J].Acta Optica Sinica, 2008, 28(s1): 176. (in Chinese)

童廉明, 徐红星. 表面等离激元——机理, 应用与展望[J]. 物理, 2012, 41(9): 582-588. TONG L M, XU H X. Surface plasmons-mechanisms, applications and perspectives[J].PHYSICS, 2012, 41(9): 582-588. (in Chinese)

李景清. 常用材料实用手册 [M].北京:中国标准出版社, 2012. LI J Q. Commonly used Materials Practical Handbook[M]. Beijing: China Standard Press, 2012. (in Chinese)

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