Fabrication and properties of ultra-lightweight SiC mirror

DONG Bin-chao; ZHANG Ge

doi:10.3788/OPE.20152308.2185

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Fabrication and properties of ultra-lightweight SiC mirror

更新时间：2020-08-12

- Fabrication and properties of ultra-lightweight SiC mirror
- Optics and Precision Engineering Vol. 23, Issue 8, Pages: 2185-2191(2015)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152308.2185
  CLC： TH703
- Received：02 April 2015，
  
  Revised：19 May 2015，
  
  Published：25 August 2015
- 稿件说明：
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董斌超, 张舸,. 超轻量化SiC反射镜的制备及性能[J]. 光学精密工程, 2015,23(8): 2185-2191

DONG Bin-chao, ZHANG Ge,. Fabrication and properties of ultra-lightweight SiC mirror[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2185-2191
董斌超, 张舸,. 超轻量化SiC反射镜的制备及性能[J]. 光学精密工程, 2015,23(8): 2185-2191 DOI： 10.3788/OPE.20152308.2185.

DONG Bin-chao, ZHANG Ge,. Fabrication and properties of ultra-lightweight SiC mirror[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2185-2191 DOI： 10.3788/OPE.20152308.2185.

摘要

采用真空辅助凝胶注模和反应烧结法制备了面密度分别为9.35和11.7 kg/m

直径分别为200和500 mm的两块超轻量化SiC反射镜

检测了反射镜的主要性能。结果显示:由于在真空环境下浇注

坯体没有宏观缺陷。材料中细小SiC颗粒的存在使材料具有相对较高的抗弯强度(335 MPa)和断裂韧性(4.5MPa· m

1/2

)。此外

反射镜材料金相组织中未出现明显的SiC颗粒定向排列

具有较好的各向同性度:不同方向热膨胀系数差异小于3%

模量差异为1.3%。镜坯经过光学加工后面形误差(RMS值)为0.043λ(λ=632.8 nm)

表面粗糙度(

值)优于5 nm。实验表明

真空辅助凝胶注模成型结合反应烧结工艺制备的超轻量化SiC反射镜各方面性能良好

适用于制备空间相机用反射镜。

Abstract

Vacuum pressure assisted gel-casting and reaction sintering were applied to fabrication of

200 and

500mm ultra-lightweight SiC mirrors with the area densities of 9.17 kg/m

and 10.8 kg/m

respectively. The main properties of the SiC mirrors were tested. The results show that the green bodies of the SiC mirrors have no macroscopic defects due to its pouring in a vacuum environment. The mirror materials have high flexural strength (335 MPa) and fracture toughness (4.5 MPa· m

1/2

) because of the fine SiC particles. The metallographic structures of the mirror materials do not show the directional alignment of SiC particles

which means the mirror materials possess a high isotropy ratio

in which the relative deviation of Coefficient of Thermal Expansion(CTE) is less than 3%

and the relative deviation of modulus reaches 1.3%. After polishing

the surface profile accuracy (RMS) of the mirror is 0.043λ (λ=632.8 nm)

and the toughness is better than 5 nm. These results demonstrate that the ultra-lightweight SiC mirrors fabricated by vacuum-assisted gel-casting and reaction sintering have excellent performance

and are suitable for fabrication of the mirrors of space cameras.

关键词

Keywords

references

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