Piezoelectric fast steering mirror with large excursion angle

YUAN Gang; WANG Dai-hua; LI Shi-dong

doi:10.3788/OPE.20152308.2258

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Piezoelectric fast steering mirror with large excursion angle

更新时间：2020-08-12

- Piezoelectric fast steering mirror with large excursion angle
- Optics and Precision Engineering Vol. 23, Issue 8, Pages: 2258-2264(2015)
- 作者机构：
  
  1. 重庆大学光电技术及系统教育部重点实验室重庆,400030
  2. 重庆大学光电工程学院, 精密与智能实验室重庆,400044
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152308.2258
  CLC： TN384;TH703
- Received：17 January 2015，
  
  Revised：20 February 2015，
  
  Published：25 August 2015
- 稿件说明：
移动端阅览
袁刚, 王代华, 李世栋. 大角度压电式快速控制反射镜[J]. 光学精密工程, 2015,23(8): 2258-2264

YUAN Gang, WANG Dai-hua, LI Shi-dong. Piezoelectric fast steering mirror with large excursion angle[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2258-2264
袁刚, 王代华, 李世栋. 大角度压电式快速控制反射镜[J]. 光学精密工程, 2015,23(8): 2258-2264 DOI： 10.3788/OPE.20152308.2258.

YUAN Gang, WANG Dai-hua, LI Shi-dong. Piezoelectric fast steering mirror with large excursion angle[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2258-2264 DOI： 10.3788/OPE.20152308.2258.

摘要

针对现有的基于压电陶瓷叠堆执行器的快速控制反射镜偏转角度较小的问题

提出了一种大角度定轴偏转压电式快速控制反射镜。采用基于柔性铰链的桥式位移放大机构将压电陶瓷叠堆执行器的输出位移放大

并将其作用到反射镜面上实现大角度定轴偏转。在此基础上

建立了压电式快速控制反射镜的结构和偏转角度输出方程

并通过理论推导和仿真对其工作时的最大偏转角度、最大应力和自然频率特性进行了分析。最后

通过实验测试对建立的压电式快速控制反射镜的工作原理和特性分析结果进行了验证。结果表明

建立的偏转角度输出方程能够根据压电陶瓷叠堆执行器的输出位移准确估计压电式快速控制反射镜的机械偏转角度

从而大大提高设计的效率;建立的压电式快速控制反射镜可以实现大于3°的镜面机械偏转

其固有频率为180 Hz

能够满足高速稳像系统的偏转角度大、响应速度快的要求。

Abstract

To extend the excursion angle of the Piezoelectric Ceramic Stack Actuator (PCSA) based fast steering mirror (FSM)

a piezoelectric FSM with a large excursion angle and a fixed rotation axis was proposed and explored. The output displacement of the PCSA was amplified by a bridge-type flexure hinge and applied to a mirror to generate a fixed axis deflection with the large excursion angle. On this basis

the configuration and the corresponding output equation of the piezoelectric FSM were established

and the characteristics of the FSM

including the maximum excursion angle

the maximum stress

and the natural frequency

were analyzed through theoretical derivation and finite element simulation. Finally

the principle and characteristics of the proposed piezoelectric FSM were validated through experiments and tests. The results show that the output equation of the piezoelectric FSM estimates exactly the mechanical defection angles of the piezoelectric FSM based on the output displacement of the PCSA and improves the design efficiency. Moreover

the developed piezoelectric FSM provides a mechanical excursion angle larger than 3°with natural frequency of 180 Hz

which satisfies the requirements of the high-speed image stabilization system for the large excursion angle and rapid response.

关键词

Keywords

references

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