ZHANG Cheng-jin, ZHAO Xue-liang, LIU Hong-bo. Compensation for dynamic creep of stack piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2273-2279
ZHANG Cheng-jin, ZHAO Xue-liang, LIU Hong-bo. Compensation for dynamic creep of stack piezoelectric actuator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(8): 2273-2279 DOI: 10.3788/OPE.20152308.2273.
Compensation for dynamic creep of stack piezoelectric actuator
The dynamic creep phenomenon of a piezoelectric actuator was confirmed by experiments. Based on the high frequency response of the piezoelectric actuator and the higher real time ability of the PID
a composite controller was proposed to compensate the dynamic creep. The composite controller used a direction inverse controller with Prandtl Ishlinskii operators as the feed-forward controller
and an increment PI as the feed-backward controller based on the online test results and demanded real time abilities
in which the parameters of PI were tuned by a fuzzy logic controller. The validity of compensating dynamic creep phenomenon of the piezoelectric actuator by the composite controller was verified. The results show that when a 0.1 Hz sine-wave is discretized into 20
40
80 stairs respectively
the dynamic creep corresponding the equal voltages has different creep processing and different creep ranges. It verifies that the dynamic creep is complex nonlinearity. It concludes that the proposed controller compensates both static creep and dynamic creep in different discretization stairs and the root-mean square errors(RMSE) of compensated creep have decreased by 71.4%
69.0% and 64.6% respectively.
关键词
Keywords
references
陈远晟, 裘进浩, 季宏丽, 等. 基于双曲函数的Preisach类迟滞非线性建模与逆控制[J]. 光学 精密工程, 2013,21(5): 1205-1212. CHEN Y SH, QIU J H, JI H L, et al.. Modeling and inverse control of preisach type hysteresis nonlinearity using hyperbola functions [J]. Opt. Precision Eng., 2013,21(5): 1205-1212. (in chinese)
李朋志, 闫丰, 葛川, 等. 压电驱动器的开闭环迭代学习控制 [J]. 光学 精密工程, 2014, 22(2):414-419. LI P ZH, YAN F, GE CH, et al.. Open closed loop iterative learning control of piezoelectric actuators [J]. Opt. Precision Eng., 2014, 22(2):414-419. (in chinese)
王钰锋, 郭咏新,毛剑琴. 压电作动器的率相关迟滞建模与跟踪控制[J]. 光学 精密工程, 2014, 22(3):616-625. WANG Y F, GUO Y X, MAO J Q. Rate dependent modeling and tracking control of piezoelectric actuators [J]. Opt. Precision Eng., 2014, 22(3):616-625. (in chinese)
张桂林, 张承进, 赵学良. 压电驱动器记忆特性迟滞非线性建模 [J]. 光学 精密工程, 2012, 20(5):996-1001. ZHANG G L, ZHANG CH J, ZHAO X L. Modeling of nonlocal memory hysteresis in piezoelectric actuators [J]. Opt. Precision Eng., 2012, 20(5):996-1001. (in chinese)
XIAO SH L, LI Y M. Modeling and High Dynamic Compensating the Rate-Dependent Hysteresis of Piezoelectric Actuators via a Novel Modified Inverse Preisach Model [J]. IEEE T. Cont.r Syst. T., 2013, 22(5):1549-1557.
JANOCHA H, KUHNEN K. Real-time compensation of hysteresis and creep in piezoelectric actuators [J]. Sensor. Actuat. A-Phys., 2000, 79(2): 83-89.
WOLF F, SUTOR A, RUPITSCH S J, et al.. Modeling and measurement of creep- and rate-dependent hysteresis in ferroelectric actuators [J]. Sensor. Actuat. A-Phys, 2011, 172(1):245-252,.
JUNG H, GWEON D G. Creep characteristics of piezoelectric actuators[J]. Rev. Sci. Instrum., 2000, 71(4):1896-1900.
RU CH H, SUN L N. Hysteresis and creep compensation for piezoelectric actuator in open-loop operation [J]. Sensor. Actuat. A-Phys., 2005, 122(1):124-130.
MA Y T, HUANG L, LIU Y B, et al.. Note: creep character of piezoelectric actuator under switched capacitor charge pump control [J]. Rev. Sci. Instrum., 2011, 82(4):046106.
ZHAO X L, ZHANG CH J, LIU H B, et al.. Analysis of Hysteresis-free creep of the stack piezoelectric actuator[J]. Math. Probl. Eng., 2013:187262.
GU G Y, ZHU L M, SU CH Y. Modeling and compensation of asymmetric hysteresis nonlinearity for piezoceramic actuators with a modified prandtl ishlinskii model [J]. IEEE T Ind. Electron., 2014, 61(3):1583-1595.
CLAYTON G M, TIEN S, LEANG K K, et al.. A review of feedforward control approaches in nanopositioning for high-speed SPM [J]. J. Dyn. Syst. –T ASME, 2009,131(6): 061101.
QIN Y D, TIAN Y L, ZHANG D W, et al.. A novel direct inverse modeling approach for hysteresis compensation of piezoelectric actuator in feedforward applications [J]. IEEE-ASME T. Mech., 2013, 18(3):981-989.
CHOI G S, LIM Y A, CHOI G H. Tracking position control of piezoelectric actuators for periodic reference inputs [J]. Mechatronics, 2002, 12(5):669-684.
TAN K K, LEE T H, ZHOU X H X. Micro-positioning of linear-piezoelectric motors based on a learning nonlinear PID controller [J]. IEEE-ASME T. Mech., 2001, 6(4):428-436.
赵学良, 张承进, 顾建军,等. 离散化正弦电压作用下的压电驱动器蠕变特性 [J]. 光学 精密工程, 2014, 22(4) :942-948. ZHAO X L, ZHANG CH J, GU J, et al.. creep characteristics of stack piezoactuator effected by discretized sine voltage [J]. Opt. Precision Eng., 2014,22(4):942-948. (in chinese)