Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator

Wu Zhi-qiang; YANG Liang; XIA Guo-ming; Su Yan

doi:10.3788/OPE.20152309.2540

您当前的位置：

首页 >

文章列表页 >

Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator

更新时间：2020-08-12

- Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator
- Optics and Precision Engineering Vol. 23, Issue 9, Pages: 2540-2545(2015)
- 作者机构：
  
  1. 南京理工大学机械工程学院,江苏南京,中国,210094
  2. 中国电子科技集团公司第十三研究所,河北石家庄,050051
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152309.2540
  CLC： TP212.12;U666.1
- Received：20 March 2015，
  
  Revised：17 April 2015，
  
  Published：25 September 2015
- 稿件说明：
移动端阅览
吴志强, 杨亮, 夏国明等. 基于带通<em>Σ</em>-Δ调制器的硅微机械陀螺力反馈闭环检测[J]. 光学精密工程, 2015,23(9): 2540-2545

Wu Zhi-qiang, YANG Liang, XIA Guo-ming etc. Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2540-2545
吴志强, 杨亮, 夏国明等. 基于带通<em>Σ</em>-Δ调制器的硅微机械陀螺力反馈闭环检测[J]. 光学精密工程, 2015,23(9): 2540-2545 DOI： 10.3788/OPE.20152309.2540.

Wu Zhi-qiang, YANG Liang, XIA Guo-ming etc. Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator[J]. Editorial Office of Optics and Precision Engineering, 2015,23(9): 2540-2545 DOI： 10.3788/OPE.20152309.2540.

摘要

为了提高硅微机械陀螺(SMG)的性能

研究了一种基于四阶机电结合带通

-Δ调制器(SDM)的硅微机械陀螺力反馈闭环检测方法。基于谐振器级联谐振前馈(CRFF)结构设计了该方法的仿真模型

并利用商用软件SD TOOLS计算了环路参数。采用MATLAB/SIMULINK对设计结果进行了行为级仿真

结果表明

1 Hz条件下环路的信噪比达到了109.2 dB

符合设计预期。在此基础上

以现场可编程门阵列(FPGA)为数字处理核心搭建了硅微机械陀螺数字化测控电路并进行了性能测试。结果表明

采用带通SDM闭环检测技术和数字化闭环驱动技术后

硅微机械陀螺的Allan方差零偏不稳定性约为1.15(°)/h

角度随机游走约为7.74×10

-2

(°)/√h

且信噪比参数满足了设计目标。得到的结果证明了设计方法的正确性;显示提出的带通SDM力反馈闭环检测方法有助于提高SMG的性能

拓展其应用领域。

Abstract

To enhance the performance of a silicon micromachined gyroscope

a force feedback close-loop detection method based on a fourth-order electromechanical bandpass Sigma Delta modulator(SDM) was researched. A simulation model was established based on Cascade Resonant Feed Forward(CRFF) structure of a resonator. Meanwhile

the loop parameters were calculated with the commercial software SD TOOLS. Then behavioral simulations were carried out with MATLAB/SIMULINK to test the results. The results suggest that the Signal to Noise Ratio(SNR) of the loop achieves 109.2 dB at the bandpass of 1 Hz

which meets the previous expectation. A force feedback close-loop detection system for the silicon micromachined gyroscope was designed by using a Field Programming Gate Array(FPGA) as the processing core

and the properties of gyroscope were tested. Experiments indicate that based on this detecting method and digital close-loop driving technology

the zero bias instability of the gyroscope achieves 1.15(°)/h

and the Angle Random Walk (ARW) is around 7.74×10

-2

(°)/√h. Meanwhile

the Signal and Noise Ratio(SNR) meets the designed specifications. These results verify the validity of the detecting technique. The method is conductive to improving the performance of the SMGs and extending their application fields.

关键词

Keywords

references

HENRION W, DISANZA L, LP M, et al.. Wide dynamic range direct accelerometer [C]. Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE, 1990:153-157.

FEDDER G K, HOWE R T. Multimode digital control of a suspended polysilicon microstructure [J]. Journal of Microelectromechanical Systems, 1996, 5(4):283-297.

PETKOV V P. High-order sigma delta interface for micromachined inertial sensors [D]. California:University of California, Berkeley, 2004.

OBOE R, ANTONELLO R, LASALANDRA E, et al.. Control of a z-axis MEMS vibrational gyroscope [J]. IEEE/ASME Transactions on Mechatronics, 2005, 10(4):364-370.

NEUL R, GOMEZ U M, KEHR K, et al.. Micromachined angular rate sensors for automotive applications [J].Sensors Journal, IEEE, 2007, 7(2):302-309.

PETKOV V P, BOSER B E. A fourth-order ΣΔ interface for micromachined inertial sensors [C]. IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, 2004:320-321.

DONG Y, KRAFT M, HEDENSTIERNA N, et al.. Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator [J]. Sensors and Actuators A:Physical, 2008, 145:299-305.

NORTHEMANN T, MAURER M, ROMBACH S, et al.. A digital interface for gyroscopes controlling the primary and secondary mode using bandpass sigma-delta modulation [J]. Sensors and Actuators A:Physical, 2010, 162(2):388-393.

NORSWORTHY S R, SCHREIER R, TEMES G C. Delta-sigma Data Converters:Theory, Design, and Simulation [M]. New York:IEEE press, 1997.

SCHREIER R, TEMES G C. Understanding Delta-sigma Data Converters [M].New Jersey:IEEE press, 2005.

DING H T, YANG Z C, WANG Z F, et al.. MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator[J].Science China Information Sciences, 2013, 56(10):1-10.

程剑平. 带通Σ-Δ调制器的研究和设计[D]. 南京:东南大学,2006. CHENG J P. Study and design of bandpass sigma delta modulator [D]. Nanjing:Southeast University, 2006. (in Chinese)

曾博. Sigma-Delta调制器的研究和设计[D]. 成都:电子科技大学, 2010. ZENG B.Research and design of the Sigma-Delta modulator [D]. Chengdu:University of Electronic Science and Technology of China, 2010.(in Chinese)

杨亮. 硅微机械陀螺数字化测控技术研究[D]. 南京:南京理工大学, 2013. YANG L.Research on digital measurement and control technology of silicon micro-machined gyroscope [D]. Nanjing:Nanjing University of Science and Technology, 2013.(in Chinese)

杨亮, 苏岩, 裘安萍, 等. 脉冲密度反馈对力平衡微机械陀螺的影响[J]. 光学精密工程, 2013, 21(8):2087-2094. YANG L, SU Y, QIU A P, et al.. Effect of pulse density feedback on force balance micro machined gyroscope [J].Opt. Precision Eng., 2013,21(8):2087-2094.(in Chinese)

杨亮, 苏岩, 裘安萍, 等. 具有增益补偿功能的微机械陀螺数字化驱动闭环[J]. 光学精密工程, 2014, 22(1):109-116. YANG L, SU Y, QIU A P, et al.. Digital drive closed-loop with gain compensation for micro-machined gyroscope [J].Opt. Precision Eng., 2014, 22(1):109-116.(in Chinese)

SCHREIER R.The Delta-Sigma Toolbox 6.0[CP]. 2004.

GYROS V. IEEE Standard Specification Format Guide and Test Procedure for Coriolis Vibratory Gyros. 2004.

邹学锋, 卢新艳. 基于Allan方差的MEMS陀螺仪性能评价方法[J]. 微纳电子技术, 2010, 47(8):490-493. ZOU X F, LU X Y. Estimate method of MEMS gyroscope performance based on Allan variance[J]. MEMS Device & Technology, 2010, 47(8):490-493.(in Chinese)

赵阳, 裘安萍, 施芹, 等. 微机械陀螺检测接口建模及前置放大器优化[J]. 光学精密工程, 2013, 21(7):1734-1740. ZHAO Y, QIU A P, SHI Q, et al.. Modeling of sensing interface for micromachined gyroscope andits front-end optimization [J]. Opt. Precision Eng., 2013, 21(7):1734-1740.(in Chinese)

SONMEZOGLU S, ALPER S E, AKIN T. An automatically mode-matched MEMS gyroscope with wide and tunable bandwidth [J]. Journal of Microelectromechanical Systems, 2014, 23(2):284-297.

CUI J, GUO Z, ZHAO Q, et al.. Force rebalance controller synthesis for a micromachined vibratory gyroscope based on sensitivity margin specifications [J]. Journal of microelectromechanical Systems, 2011, 20(6):1382-1394.

Views

415

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Online laser absorption spectroscopy detection of trace ethylene in coal pyrolysis

MEMS gyro denoising based on fuzzy interval threshold EMD

Temperature characteristics of quality factor of silicon micromachined gyroscope under high-vacuum environment

Spectral analysis and de-noising of MIMU raw measurement

Related Author

CAI Tingdong

QIU Xuanbing

LI Chuanliang

GONG Ting

TIAN Yali

SUN Xiaocong

LI Kailiang

MENG Xingxing

Related Institution

School of Applied Science， Taiyuan University of Science and Technology， Shanxi Precision Measurement and Online Testing Equipment Engineering Research Center， Shanxi Province Light Field Regulation and Integration Application Technology Innovation Center， Taiyuan University of Science and Technology

College of Physics and Electronic Engineering， Jiangsu Normal University

Automatic Control Research Institute, Lanzhou Jiaotong University

Gansu Provincial Key Laboratory of Traffic Information Engineering and Control

College of Electromechanical Engineering and Automation, National University of Defense Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰