Preparation of hollow electrode used for micro ECM

KONG Quan-cun; LIU Guo-dong; LI Yong; ZHOU Kai

doi:10.3788/OPE.20152310.2810

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Preparation of hollow electrode used for micro ECM

Micro Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Preparation of hollow electrode used for micro ECM
- Optics and Precision Engineering Vol. 23, Issue 10, Pages: 2810-2818(2015)
- 作者机构：
  
  1. 清华大学机械工程系, 精密/超精密制造装备及控制北京市重点实验室北京,100084
  2. 北京信息科技大学仪器科学与光电工程学院北京,100192
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152310.2810
  CLC： TG662
- Received：22 March 2015，
  
  Revised：01 June 2015，
  
  Published：25 October 2015
- 稿件说明：
移动端阅览
孔全存, 刘国栋, 李勇等. 微细电解加工用中空电极的制备[J]. 光学精密工程, 2015,23(10): 2810-2818

KONG Quan-cun, LIU Guo-dong, LI Yong etc. Preparation of hollow electrode used for micro ECM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10): 2810-2818
孔全存, 刘国栋, 李勇等. 微细电解加工用中空电极的制备[J]. 光学精密工程, 2015,23(10): 2810-2818 DOI： 10.3788/OPE.20152310.2810.

KONG Quan-cun, LIU Guo-dong, LI Yong etc. Preparation of hollow electrode used for micro ECM[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10): 2810-2818 DOI： 10.3788/OPE.20152310.2810.

摘要

为了改进加工间隙内电解产物的排出条件和加速电解液的更新

提出了一种嵌套式微细中空电极的精确可控焊接制备工艺。仿真分析了电极的过流特性

优化了电极长度

并进行了性能测试及加工实验。通过穿丝、黏结、嵌套尺寸及位置调整和焊接工序

制备出加工段内径为65 μm、外径为130 μm、长3.25 mm左右

后段便于装夹和连通的嵌套式中空电极。在供液压力为1.15 MPa时

其出口流速可达10 m/s左右。利用制备的中空电极

开展微细孔电解加工实验

在0.5 mm厚不锈钢片上加工出最小入口孔径约为157 μm

出口孔径约为133 μm的微细孔

并将其延伸应用于微结构加工中

铣削出了长554 μm、宽160 μm、深224 μm的微细T型槽。实验结果表明:制备的微细中空电极有效提高了加工间隙内电解液的流动特性

且连/导通可靠、装夹方便

适用于高深宽比微结构的电解加工。

Abstract

To release electrolysis products and refresh electrolyte greatly within a machining gap

a welding preparation process of Micro Nested Hollow Electrode (MNHE) for micro electrochemical machining (ECM) was researched. The flow characteristics of the MNHE were simulated and analyzed to optimize its length

then

the performance test and machining experiments for the MNHE were performed. The MNHE was prepared through threading

bonding

nested size & position adjusting and welding process. The front section of the MNHE was machined into a inner diameter of 65 μm

an outer diameter of 130 μm and a length about 3.25 mm

while its rear section was convenient for clamping and connectivity. The flow rate for outlet of the MNHE could reach up to 10 m/s under fluid supplying pressure of 1.15 MPa. Finally

experiments on micro ECM holes were carried out by utilizing the prepared hollow electrode. Micro holes with the minimum inlet diameter of 157 μm and outlet diameter of 133 μm were achieved on 0.5 mm thick stainless steel. A micro T-shaped groove with 554 μm length

160 μm width

and 224 μm depth was also milled. Experimental results indicate that the MNHE effectively improves the flow characteristics of the electrolyte within the machining gap

and it is suitable for electrochemical machining of micro structures with high aspect ratio for its easy clamp and reliable connectivity/conductivity

关键词

Keywords

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