Magnetorheological finishing for curve surface based on 4-axis machine

LI Long-xiang; ZHENG Li-gong; DENG Wei-jie; WANG Xiao-kun; LI Li-fu; BAI Yang; ZHANG Xue-j

doi:10.3788/OPE.20152310.2819

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Magnetorheological finishing for curve surface based on 4-axis machine

Micro Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Magnetorheological finishing for curve surface based on 4-axis machine
- Optics and Precision Engineering Vol. 23, Issue 10, Pages: 2819-2826(2015)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2. 中国科学院大学, 北京 100049,中国
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152310.2819
  CLC： TH161;TN305.2
- Received：15 December 2014，
  
  Revised：03 February 2015，
  
  Published：25 October 2015
- 稿件说明：
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李龙响, 郑立功, 邓伟杰等. 应用四轴联动磁流变机床加工曲面[J]. 光学精密工程, 2015,23(10): 2819-2826

LI Long-xiang, ZHENG Li-gong, DENG Wei-jie etc. Magnetorheological finishing for curve surface based on 4-axis machine[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10): 2819-2826
李龙响, 郑立功, 邓伟杰等. 应用四轴联动磁流变机床加工曲面[J]. 光学精密工程, 2015,23(10): 2819-2826 DOI： 10.3788/OPE.20152310.2819.

LI Long-xiang, ZHENG Li-gong, DENG Wei-jie etc. Magnetorheological finishing for curve surface based on 4-axis machine[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10): 2819-2826 DOI： 10.3788/OPE.20152310.2819.

摘要

以永磁型磁流变抛光机为基础

提出了在光栅式加工轨迹下结合四轴联动机床(不含抛光轮转动轴)和变去除函数实现磁流变抛光技术确定性加工曲面的方法。讨论了曲面上光栅式加工轨迹等面积规划原则和基于矩阵乘积运算的驻留时间求解算法。分析了磁流变四轴联动机床的机械补偿方式

同时以变去除函数模型为基础从算法上实现了机械的剩余补偿。应用以氧化铈为抛光粉的水基磁流液对口径为80 mm、曲率半径为800 mm的BK7材料凸球面进行了修形验证实验

一次加工(5.5 min)后显示:面形误差分布峰谷值 (PV) 和均方根值(RMS) 从117.47 nm和22.78 nm分别收敛到60.80 nm和6.28 nm。实验结果表明:结合四轴联动的低自由度机床和变去除函数算法补偿的磁流变加工工艺能够有效地实现球面及低陡度非球面等曲面的高效确定性加工

为磁流变抛光在光学制造中的应用提供了有力的支持。

Abstract

On the basis of permanent magnet Magnetorheological Finishing (MRF) machine

a magnetorheological finishing method by combining a 4-axis machine with a variable removal function was developed to figure the sphere surface in a raster path. The principle of equal area observed on the raster path and the dwell time algorithm based on matrix multiplication computation were discussed. A mechanical compensating strategy based on the 4-axis machine was analyzed

including machine compensating and algorithm compensating of the variable removal function. By using water based magnetorheological fluid with the polishing powder of cerium oxide

a polishing experiment on a convex made of BK7 material with a diameter of 80 mm and curvature radius of 800 mm was carried out. The experiments show that error values( PV and RMS) have been converged from 117.47nm and 22.78 nm to 60.80 nm and 6.28 nm respectively with just one polishing cycle (5.5 min). The result demonstrates that strategy of variable removal function compensating based on the 4-axis machine can effectively figure the sphere and asphere surfaces determinately by the MRF

which reduces the cost of the MRF machine

and pushes its applications to the the usual optical shop.

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Keywords

references

DANIEL C H.History of magnetorheological finishing [C]. SPIE, 2011, 8016: 1-22.

JACOBS S D, GOLINI D, HSU Y, et al.. Magnetorheological finishing: a deterministic process for optics manufacturing [C]. SPIE, 1995, 2576:372-382.

ARIC S, WILLIAM K, MARC T. Magnetorheological finishing of large and lightweight optics [C]. SPIE, 2004, 533: 99-107.

康健, 宣斌, 谢京江. 表面改性碳化硅基底反射镜加工技术现状[J]. 中国光学,2013, 6 (6):824-833. KANG J, XUAN B, XIE J J. Manufacture technology status of surface modified silicon carbide mirrors[J]. Chinese Optics, 2013, 6 (6):824-833.

吕东喜,王洪祥,黄燕华,等. 光学材料磨削的亚表面损伤预测[J]. 光学精密工程, 2013, 21(3): 680-686. LU D X, WANG H X, HUANG Y H,et al.. Prediction of grinding induced subsurface damage of optical materials[J]. Opt. Precision Eng., 2013,21(3): 680-686.(in Chinese)

李圣怡,戴一帆. 大中型光学非球面镜制造和测量新技术[M]. 北京:国防工业出版社, 2011,51-67. LI SH Y,DAI Y F.New Technology for Manufacturing and Measurement of large and Middle-scale aspheric surfaces[M]. Beijing: National Defence Industry Press, 2011,51-67.(in Chinese)

李圣怡,彭小强. 光学零件可控柔体制造的理论基础与方法[J]. 机械工程学报, 2013, 49(7): 1-9. LI SH Y, PENG X Q. Basic theory and method of controllable compliant tools for optic elements manufacturing[J]. Journal of Mechanical Engineering, 2013, 49(7):1-9.(in Chinese)

戴子华,朱永伟,王建彬,等. K9玻璃亚表面损伤的分步腐蚀法测量[J]. 光学精密工程,2013,21(2):287-293. DAI Z H, ZHU Y W, WANG J B, et.al.. Measurement of sub_surface damage of K9 glass by step-by-step etching method[J]. Opt. Precision Eng., 2013,21(2):287-293 .(in Chinese)

李龙响, 邓伟杰, 张斌智,等. 大口径光学元件磁流变加工驻留时间求解算法[J]. 光学学报,2014,31(5):0522001. LI L X, DENG W J, ZHANG B ZH, et al.. Dwell time algorithm for large optics in magnetorheological finishing [J]. Acta Optica Sinica, 2014,31(5):0522001. (in Chinese)

邓伟杰, 郑立功, 史亚莉,等. 基于线性代数和正则化方法的驻留时间算法[J]. 光学精密工程, 2007, 15 (7): 1009-1015.13. DENG W J,ZHENG L G, SHI Y L, et al.. Dwell time algorithm based on matrix algebra and regularization method [J]. Opt. Precision Eng., 2007,15(7):1009-1015. (in Chinese)

SRA D K S,DHILLON I S. A non-monotonic method for large-scale non-negative least squares [J]. Optimization Methods & Software, 2012,1: 1-29.

白杨,张峰,邓伟杰,等. 磁流变抛光液的配制及其抛光稳定性[J]. 光学学报,2014,34(4):0416001. BAI Y, ZHANG F, DENG W J. Preparation of magnetorheological polishing fluid and its polishing stability[J]. Acta Optica Sinica, 2014,34(4):0416001.(in Chinese)

ELMAR P, MARKUS S. Correlation between influence-function quality and predictability of a computer-controlled polishing process [J]. Optical Engineering,2006,45(6):063401.

HAO H, DAI Y F, PENG X Q, et al.. Research on reducing the edge effect in magnetorheological finishing[J]. Applied Optics, 2011, 50(9):1220-1226.

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