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High precision adjustable mechanism for Shack-Hartmann sensor
Micro Nano Technology and Fine Mechanics | 更新时间:2020-08-13
    • High precision adjustable mechanism for Shack-Hartmann sensor

    • Optics and Precision Engineering   Vol. 23, Issue 10, Pages: 2852-2859(2015)
    • DOI:10.3788/OPE.20152310.2852    

      CLC: TP212.14;O439
    • Received:20 January 2015

      Revised:17 February 2015

      Published:25 October 2015

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  • LI Wen-jie, MU Quan-quan, WANG Shao-xin etc. High precision adjustable mechanism for Shack-Hartmann sensor[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10): 2852-2859 DOI: 10.3788/OPE.20152310.2852.

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