Applicable conditions of phase retrieval based on transport of intensity equation

LIU Bei-bei; YU Ying-jie; WU Xiao-yan; ZHOU Wen-jing

doi:10.3788/OPE.20152313.0076

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Applicable conditions of phase retrieval based on transport of intensity equation

更新时间：2020-08-13

- Applicable conditions of phase retrieval based on transport of intensity equation
- Optics and Precision Engineering Vol. 23, Issue 10z, Pages: 77-84(2015)
- 作者机构：
  
  上海大学精密机械工程系上海,200072
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152313.0076
  CLC： O436.1;TH742
- Received：11 May 2015，
  
  Revised：31 May 2015，
  
  Published：14 November 2015
- 稿件说明：
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刘贝贝, 于瀛洁, 伍小燕等. 基于光强传输方程的相位恢复条件[J]. 光学精密工程, 2015,23(10z): 77-84

LIU Bei-bei, YU Ying-jie, WU Xiao-yan etc. Applicable conditions of phase retrieval based on transport of intensity equation[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 77-84
刘贝贝, 于瀛洁, 伍小燕等. 基于光强传输方程的相位恢复条件[J]. 光学精密工程, 2015,23(10z): 77-84 DOI： 10.3788/OPE.20152313.0076.

LIU Bei-bei, YU Ying-jie, WU Xiao-yan etc. Applicable conditions of phase retrieval based on transport of intensity equation[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 77-84 DOI： 10.3788/OPE.20152313.0076.

摘要

由于基于光强传输方程的相位恢复技术对照明方式、记录系统和样本有一定的选择性

本文通过理论分析和数值模拟分析了光强传输方程相位恢复的适用条件

并通过实验验证了适用条件的有效性。分析认为相位恢复技术需满足照明光的广义相位为常数;记录系统为远心光路结构;样本为光通过时强度变化较小的物体。利用4

记录系统和无限远校正光学显微镜系统对微刻玻璃样本进行了验证实验。结果显示:

系统恢复的微刻玻璃样本的平均深度为1.41 μm

与激光共聚焦显微镜的测量结果1.59 μm偏差较大;显微镜系统恢复的微刻玻璃样本的平均深度为1.56 μm

与激光共聚焦显微镜的测量结果1.59 μm比较吻合。实验证明

记录系统和无限远校正光学显微镜系统可以有效恢复出物体的相位

且显微镜系统恢复的相位质量更高。

Abstract

As phase retrieval based on the Transport of Intensity Equation (TIE) is selective about lighting

recording systems and samples. This paper analyzes the applicable conditions of phase retrieval based on the TIE through theoretical analysis and numerical simulation

and verifies the effectiveness of the applicable conditions. It points out that the phase retrieval is suitable for objects with little intensity variation especially. The generalized phase of the light need to be a constant. and the recording systems are of infinity optical structure. Two experiments are conducted in a 4

system and an infinity optical microscope system for a micro-engraved glass sample. The results show that recovered average depth of the 4

recording system is 1.41 μm and that of the infinity optical microscope system is 1.56 μm. The result of the infinity optical microscope system is very close to that of the laser scanning confocal microscope. It concludes that the phase of the object can be effectively recovered by the 4

recording system and the infinity optical microscope system

and the phase retrieval accuracy of the microscope system is higher.

关键词

Keywords

references

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