Position resolution of quadrant detector for uniform spot

CHEN Yun-shan

doi:10.3788/OPE.20152313.0112

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Position resolution of quadrant detector for uniform spot

更新时间：2020-08-13

- Position resolution of quadrant detector for uniform spot
- Optics and Precision Engineering Vol. 23, Issue 10z, Pages: 113-119(2015)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152313.0112
  CLC： TN212.12
- Received：08 June 2015，
  
  Revised：30 June 2015，
  
  Published：14 November 2015
- 稿件说明：
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陈云善,. 四象限探测器的均匀光斑位置分辨率[J]. 光学精密工程, 2015,23(10z): 113-119

CHEN Yun-shan,. Position resolution of quadrant detector for uniform spot[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 113-119
陈云善,. 四象限探测器的均匀光斑位置分辨率[J]. 光学精密工程, 2015,23(10z): 113-119 DOI： 10.3788/OPE.20152313.0112.

CHEN Yun-shan,. Position resolution of quadrant detector for uniform spot[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 113-119 DOI： 10.3788/OPE.20152313.0112.

摘要

为了精确分析四象限探测器(Quadrant Detector

QD)位置检测系统性能

研究了均匀光斑模型下影响QD位置分辨率检测的主要因素。分析了在均匀光斑模型下QD位置检测原理;根据误差理论并利用光斑位置近似解算公式

推导出了该探测器位置分辨率与光斑半径、光斑中心位置和总信噪比关系的近似数学模型;最后

对模型的正确性进行了实验验证。结果表明

当光斑位置与靶面中心的距离在二分之一光斑半径以内

总信噪比为63.04dB时

在不同光斑半径情况下使用该模型估算的位置分辨率误差约为12%。另外

使用该模型可直接估算出该探测器位置检测系统可以达到的分辨率

极大地方便了工程应用。

Abstract

To precisely analyze the performance of a position detecting system based on a quadrant detector (QD)

the main factors affecting QD position resolution for a uniform spot model were studied. The basic principle of the QD position detection was firstly analyzed. Based on the approximation formula of spot position and according to the error theory

an approximate mathematical model was derived to characterize the relationship between the position resolution and the beam radius

the spot centroid position and the total signal to noise ratio. Finally

an experimental system was designed to verify the validity of the mathematical model. The research results show that the estimation error of position resolution using the mathematical model is about 12% for various radii when the distance between the center of QD and the position of spot is in a half radius range and the total signal to noise ratio is 63.04 dB. Furthermore

the mathematical model could exactly and directly estimate the position resolution of detection system of the QD

which brings great convenience to engineering applications.

关键词

Keywords

references

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