Coupled feed phased array antenna integrated with MEMS phase shifter

HAN Qi; XU Li-xin; WANG Ting; CONG Lin

doi:10.3788/OPE.20152313.0272

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Coupled feed phased array antenna integrated with MEMS phase shifter

更新时间：2020-08-13

- Coupled feed phased array antenna integrated with MEMS phase shifter
- Optics and Precision Engineering Vol. 23, Issue 10z, Pages: 272-278(2015)
- 作者机构：
  
  北京理工大学机电学院北京,100081
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152313.0272
  CLC： TN821.8
- Received：07 April 2015，
  
  Revised：15 May 2015，
  
  Published：14 November 2015
- 稿件说明：
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韩琦, 徐立新, 王婷等. 集成MEMS移相器缝隙耦合相控阵天线[J]. 光学精密工程, 2015,23(10z): 272-278

HAN Qi, XU Li-xin, WANG Ting etc. Coupled feed phased array antenna integrated with MEMS phase shifter[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 272-278
韩琦, 徐立新, 王婷等. 集成MEMS移相器缝隙耦合相控阵天线[J]. 光学精密工程, 2015,23(10z): 272-278 DOI： 10.3788/OPE.20152313.0272.

HAN Qi, XU Li-xin, WANG Ting etc. Coupled feed phased array antenna integrated with MEMS phase shifter[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 272-278 DOI： 10.3788/OPE.20152313.0272.

摘要

研究了相控阵天线系统使用的MEMS移相器的结构设计以及与耦合馈电相控天线阵的集成方法。根据相移原理和波束扫描原理

提出了移相器传输线的长度计算方法;对悬臂梁结构的MEMS开关进行设计

总结了优化开关结构的途径;最后给出了MEMS移相器与耦合馈电天线阵的集成方法。提出的制作工艺简单易于实现。结果显示:优化的MEMS开关在25 GHz频率内插入损耗小于0.2 dB

隔离度大于-15 dB;移相器在15~20 GHz的频段内阻抗匹配良好

相移特性呈良好的线性变化

相移度数为45

最大相移误差为5。基于此移相器集成的22MEMS耦合天线阵在17.3GHz的工作频率下波束可以进行30的扫描

最大增益为9.3 dB

满足低成本单片集成相控阵天线的需求。

Abstract

The structure design of a MEMS(Micro-electromechanical System) phase shifter used in phase array antennas was studied and its integration method with a coupled feed phased array antenna was given. The length of the transmission line according to the phase shift principle and the beam scanning principle was calculated. Then

the cantilever MEMS switch was designed and the optimization method of the switch was summarized. Finally

the integration method of the MEMS phase shifter with the coupled feed antenna array was presented. The results show that the insertion loss and the isolation of the optimized switch are less than 0.2 dB and more than-15 dB within 25 GHz

respectively. The phase shifter has a good impedance matching in 15 GHz-20 GHz

and its phase shift characteristics vary linearly. The shift phase is 45 with a maximum phase error of 5. The 22 MEMS coupled antenna array integration with this phase shifter can complete a beam steering angle of 30 at 17.3 GHz. The highest gain of the array is 9.3 dB. This phase shifter meets low-cost monolithic integrated demand of the phased array antennas.

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Keywords

references

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