Vibration error compensation of high speed and high precision positioning platform

LIU Ji-zhu; ZHANG Wen-wen; LI Jian; CHEN Li-guo

doi:10.3788/OPE.20152313.0328

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Vibration error compensation of high speed and high precision positioning platform

更新时间：2020-08-13

- Vibration error compensation of high speed and high precision positioning platform
- Optics and Precision Engineering Vol. 23, Issue 10z, Pages: 328-334(2015)
- 作者机构：
  
  苏州大学机电工程学院苏州纳米科技协同创新中心,江苏苏州,215021
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152313.0328
  CLC： TH703;TP273
- Received：05 May 2015，
  
  Revised：10 June 2015，
  
  Published：14 November 2015
- 稿件说明：
移动端阅览
刘吉柱, 张雯雯, 李健等. 高速精密定位平台振动误差补偿[J]. 光学精密工程, 2015,23(10z): 328-334

LIU Ji-zhu, ZHANG Wen-wen, LI Jian etc. Vibration error compensation of high speed and high precision positioning platform[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 328-334
刘吉柱, 张雯雯, 李健等. 高速精密定位平台振动误差补偿[J]. 光学精密工程, 2015,23(10z): 328-334 DOI： 10.3788/OPE.20152313.0328.

LIU Ji-zhu, ZHANG Wen-wen, LI Jian etc. Vibration error compensation of high speed and high precision positioning platform[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 328-334 DOI： 10.3788/OPE.20152313.0328.

摘要

搭建了宏微结合精密定位系统以便减小定位平台在

方向的振动误差

实现高精度定位。该系统由高性能直线电机驱动

气体静压导轨支撑和导向的宏动平台实现系统的大行程微米级定位

由安装在宏动平台上的压电陶瓷驱动微动平台对系统进行

方向定位精度补偿。建立了定位系统

向振动模型

采用模糊PID控制策略

用电容式微位移传感器实时检测定位系统终端的位置输出信号并将其作为微动台的输入信号

实现了定位系统的闭环反馈控制

最终完成了宏动平台的振动误差实时补偿。实验结果显示:所设计的微动补偿平台具有好的动态特性

定位系统的误差实时补偿效果优良

针对

向的振动范围由补偿前的6

m减小到补偿后的2

m。结果表明本文研究的振动误差补偿方法可以有效减小定位系统的振动误差

提高系统的定位精度。

Abstract

A macro-micro-combined positioning system was built to reduce the vibration error of the positioning platform in the

direction and to realize its high precision positioning. It was driven by a high performance linear motor. The micron-level large-stroke position was done in the macro-moving platform supported and guided by a static pressure gas guide rail. The position accuracy in

direction was compensated by the micro platform driven by piezoelectric ceramics installed in the macro-moving platform. Then the

direction vibration model of this positioning system was established

where the fuzzy PID control strategy was used. Furthermore

the output position signal of the positioning terminal detected by a capacitive small-displacement sensor in real-time was treated as the input signal of micro-moving platform to achieve closed loop feedback control of positioning system

and the real-time compensation of vibration error of the macro moving system was ultimately impletemented. Experimental results indicate that the micro compensating platform designed has good dynamic characteristics and real time error compensation effect. For

direction positioning

the vibration range is reduced from 6

m to 2

m after compensation. The results show that the vibration error compensation method studied in this paper can efficiently reduce the vibration error of the positioning system and improve the positioning accuracy.

关键词

Keywords

references

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