Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer

LI Jia-lin; HUA Shun-ming; LI Zhi-qiang; MENG Yu-ming; LOU Ying-hou

doi:10.3788/OPE.20152313.0335

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Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer

更新时间：2020-08-13

- Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer
- Optics and Precision Engineering Vol. 23, Issue 10z, Pages: 335-341(2015)
- 作者机构：
  
  1. 太原科技大学机械工程学院,山西太原,030024
  2. 浙江大学宁波理工学院,浙江宁波,315100
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20152313.0335
  CLC： TM384
- Received：15 May 2015，
  
  Revised：10 June 2015，
  
  Published：14 November 2015
- 稿件说明：
移动端阅览
李加林, 华顺明, 李志强等. 指数型变幅杆螺旋驱动直线压电作动器[J]. 光学精密工程, 2015,23(10z): 335-341

LI Jia-lin, HUA Shun-ming, LI Zhi-qiang etc. Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 335-341
李加林, 华顺明, 李志强等. 指数型变幅杆螺旋驱动直线压电作动器[J]. 光学精密工程, 2015,23(10z): 335-341 DOI： 10.3788/OPE.20152313.0335.

LI Jia-lin, HUA Shun-ming, LI Zhi-qiang etc. Spiral-driving linear piezoelectric actuator based on exponential amplitude transformer[J]. Editorial Office of Optics and Precision Engineering, 2015,23(10z): 335-341 DOI： 10.3788/OPE.20152313.0335.

摘要

为实现微小型机电系统中驱动单元的小型化

设计了一种采用指数型变幅杆放大定子振幅的螺杆式直线压电作动器。分析了作动器运行机理

设计了作动器定子基体内螺纹副和变幅杆。然后

利用有限元软件仿真分析了定子基体的振动模态。最后

确定了作动器尺寸并加工出样机;搭建实验平台

对作动器样机的机械性能进行了测试。测试结果显示

在电压有效值为300 V

激励频率为15.6 kHz

两相激励电压之间的相位差为

/2时

作动器输出直线速度最大值达到3.392 mm/s

最大输出力达到15.02 N。得到的结果表明:作动器具有良好的输出性能

具备了作为微小型机电系统直接驱动单元的能力

可满足微小型设备微量进给的要求。

Abstract

To miniaturize the driving unit in a micro-electro-mechanical system

a spiral-driving linear piezoelectric actuator based on an exponential amplitude transformer was designed. the operation mechanism of the actuator was analyzed

and the screw pairs of stator and the exponential amplitude transformer were designed. Then

the stator vibration modes were analyzed by finite element software in simulation. At last

the dimension of actuator was determined

the prototype was made

an experimental platform was established and the actuator output performance was tested. Under the conditions of an effective voltage of 300 V

resonant frequency of 15.6 kHz

the phase difference between two driving voltages of

the actuator reaches a maximum linear velocity of 3.392 mm/s

and the output force of 15.02 N. The test results indicate that the actuator has a good output performance

and it can be employed in MEMS driving unit to meet the demands of subminiature equipment for the micro feed.

关键词

Keywords

references

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