Optimization of quadrature error correction method for silicon MEMS gyroscopes

CAO Hui-liang; WANG Yu-liang; SHI Yun-bo; SHEN Chong; LI Hong-sheng; LIU Jun; YANG Zhi-cai

doi:10.3788/OPE.20162401.0134

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Optimization of quadrature error correction method for silicon MEMS gyroscopes

更新时间：2020-08-13

- Optimization of quadrature error correction method for silicon MEMS gyroscopes
- Optics and Precision Engineering Vol. 24, Issue 1, Pages: 134-142(2016)
- 作者机构：
  
  1. 东南大学仪器科学与工程学院,江苏南京,210096
  2. 中北大学电子测试技术国防科技重点实验室,山西太原,030051
  3. 中北大学仪器科学与动态测试教育部重点实验室, 山西太原 030051
  4. 北京航天控制仪器研究所, 北京 100094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162401.0134
  CLC： TH824.3;U666
- Received：15 May 2015，
  
  Revised：17 June 2015，
  
  Published：25 January 2016
- 稿件说明：
移动端阅览
曹慧亮, 王玉良, 石云波等. 硅微陀螺正交误差校正方案优化[J]. 光学精密工程, 2016,24(1): 134-142

CAO Hui-liang, WANG Yu-liang, SHI Yun-bo etc. Optimization of quadrature error correction method for silicon MEMS gyroscopes[J]. Editorial Office of Optics and Precision Engineering, 2016,24(1): 134-142
曹慧亮, 王玉良, 石云波等. 硅微陀螺正交误差校正方案优化[J]. 光学精密工程, 2016,24(1): 134-142 DOI： 10.3788/OPE.20162401.0134.

CAO Hui-liang, WANG Yu-liang, SHI Yun-bo etc. Optimization of quadrature error correction method for silicon MEMS gyroscopes[J]. Editorial Office of Optics and Precision Engineering, 2016,24(1): 134-142 DOI： 10.3788/OPE.20162401.0134.

摘要

本文意在寻求双质量硅微机械陀螺仪正交校正最优方案。首先介绍了带有正交校正和检测力反馈梳齿的双质量硅微机械陀螺结构

量化分析了正交误差对输出信号的影响并进行了仿真

结果显示解调相角变化为±2°

200(°)/s的正交误差等效输入角速率可引起15(°)/s的输出信号变化。然后

对目前3种比较主流的硅微机械陀螺仪正交校正方法(电荷注入法(CIM)、正交力校正法(QFCM)和正交耦合刚度校正法(QCSCM))进行了实验研究

从理论上证明了这3种方法的可行性。对未加入正交校正环节的陀螺进行了实验

结果显示其左、右质量块输出的正交误差信号峰峰值分别为150 mV 和300 mV。针对两质量块正交误差不等的实际问题提出了质量块单独校正的方案。采用CIM、QFCM和QCSCM对校正前零偏及其稳定性分别为-4.589(°)/s和378(°)/h的陀螺进行了实验校正

结果显示3种方法均可有效消除检测通道中正交信号

3种方法的零偏及零偏稳定性结果分别为-8.361(°)/s和423(°)/h

2.419(°)/s 和82(°)/h

1.751(°)/s和25(°)/h

证明了正交耦合刚度校正法为3种方法中的最优方案。

Abstract

This paper focuses on finding out a optimum quadrature error correction method for a dual-mass Micro-electro-mechanical System (MEMS) gyroscope with quadrature error correction combs and sense feedback combs. The structure of the gyroscope was introduced

and influences of quadrature errors on the output signals were simulated and quantized. The results show that quadrature error equivalent angular rate is 200(°)/s and the demodulation phase error is less than 2°

which generates 15(°)/s variation of output signal. Three kinds of quadrature error correction methods used commonly in measuring this structure were investigated

and they are Charge Injecting Method (CIM)

Quadrature Force Correction Methods (QFCM) and Quadrature Coupling Stiffness Correction Method (QCSCM). The feasibility of the three method was verified in theory. A gyroscope without quadrature error correction was tested

the results show that the quadrature signal peak-peak amplitudes from left and right mass preamplifiers are 150 mV and 300 mV respectively. Then

the correction method based on left mass and right mass independently was proposed. The the experiments based on CIM

QFCM and QCSCM were performed. The results show that the quadrature error signals are eliminated basically

their bias values and bias stabilities are -8.361(°)/s and 423(°)/h

2.419(°)/s and 82(°)/h

1.751(°)/s and 25(°)/h

respectively. According to the results

the QCSCM is verified to be the optimal method for quadrature error correction

and the theory analysis result is correct.

关键词

Keywords

references

曹慧亮,李宏生,王寿荣,等. 硅微机械陀螺仪测控电路的温度补偿[J]. 光学精密工程,2013,21(12):3118-3125. CAO H L, LI H SH, WANG SH R, et al.. Temperature compensation methods for silicon MEMS gyroscope monitoring circuit [J]. Opt. Precision Eng. , 2013, 21(12): 3118-3125.(in Chinese)

杨波,王寿荣,李坤宇,等. 利用负刚度效应调谐的硅调谐式陀螺仪[J]. 光学精密工程,2010,18(11):2398-2406. YANG B, WANG SH R, LI K Y, et al.. Silicon turning gyroscope tuned by negative stiffness effect [J]. Opt. Precision Eng. , 2010, 18(11): 2398-2406.(in Chinese)

夏国明,杨波,王寿荣. 硅微机械陀螺自激驱动数字化技术[J]. 光学精密工程,2010,19(3):635-640. XIA G M, YANG B, WANG SH R. Digital self-oscillation driving technology for silicon micro machined gyroscopes [J]. Opt. Precision Eng. , 2010, 19(3): 635-640.(in Chinese)

PRIKHODKO I P,ZOTOV S A,TRUSOV A A,et al..Sub-degree-per-hour silicon MEMS rate sensor with 18million Q-factor[C].Proc.16th International Solid-State Sensors,Actuators and Microsystems Conference Transducers,2011.2809-2812.

SHARMA A,ZAMAN N F,AYAZI F.A sub-0.2°/hr bias drift micromechanical silicon gyroscope with automatic CMOS mode-matching[J].Journal of Solid-State Circuits,2009,44(5):1593-1608.

PAINTER C.Micromachined vibratory gyroscopes with imperfections [D].University of California Irvine,2005.

LI H,CAO H,NI Y.Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope [J].J. Micro/Nanolith. MEMS MOEMS,2014, 12(3): 033003.

SAUKOSKI M,AALTONEN L,HALONEN K A I.Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes [J].IEEE Sensors Journal,2007,7(12):1639-1652.

CAO H, LI H. Investigation of a vacuum packaged MEMS gyroscope architecture's temperature robustness [J]. International Journal of Applied Electromagnetics and Mechanics, 2013(41): 495-506.

CHAUMET B,LEVERRERr B,ROUGEOT C,et al..A new silicon tuning fork gyroscope for aerospace applications [J].Syposium Gyro Technology 2009,1:1-13.

TATAR E,ALPER S E,AKIN T,et al..Quadrature-error compensation and corresponding effects on the performance of fully decoupled MEMS gyroscopes [J].Journal of Microelectromechanical Systems,2012,21(3):656-667.

MO B,ZHOU H,ZHENG Q,et al..Quadrature error and offset error suppression methods for micro-gyroscopes [J].Key Engineering Materials,2012, 503: 174-178.

倪云舫,李宏生,杨波,等. 硅微陀螺正交误差直流校正设计与分析[J]. 中国惯性技术学报,2014,22(1):104-108. NI Y, LI H, YANG B, et al.. Design and analysis of a quadrature correction method sing DC voltages for silicon micro-gyroscope [J]. Journal of Chinese Inertial Technology, 2014, 22(1):104-108.(in Chinese)

罗兵,张辉,吴美平. 硅微陀螺正交误差及其对信号检测的影响[J]. 中国惯性技术学报,2009,17(5):604-607. LUO B, ZHANG H, WU M. Quadrature signal of micro gyroscope and its effect on signal detection [J]. Journal of Chinese Inertial Technology, 2009, 17(5): 604-607.(in Chinese)

曹慧亮. 硅微机械陀螺仪静电补偿与控制技术研究和实验 [D]. 南京:东南大学, 2014. CAO H. Research and experiment on the technology of electrostatic compensation and control of silicon micro-machined gyroscope [D]. Nanjing:Southeast University, 2014.(in Chinese)

刘学,陈志华,肖定邦,等. 振动式微陀螺正交误差自补偿方法[J]. 传感技术学报,2012,25(9):1221-1225. LIU X, CHEN ZH H, XIAO D B, et al.. The self-compensation method for eliminating quadrature error of the vibratory micro-gyroscope [J]. Chinese Journal of Sensors and Actuators, 2012, 25(9):1221-1225.(in Chinese)

SEEGER J,PARK M,RASTEGAR A,et al..Method and apparatus for electronic cancellation of quadrature error [P].United States Patent,7290435B2.

ANTONELLO R,OBOE R,PRANDI L,et al..Open loop compensation of the quadrature error in MEMS vibrating gyroscopes [C].IEEE 35th Annual Conference of Industrial Electronics,2009:4034-4037.

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